发明公开
- 专利标题: EMBEDDED COOLING SYSTEMS AND METHODS OF MANUFACTURING EMBEDDED COOLING SYSTEMS
-
申请号: US17876376申请日: 2022-07-28
-
公开(公告)号: US20240038633A1公开(公告)日: 2024-02-01
- 发明人: Belgacem Haba , Thomas Workman , Cyprian Emeka Uzoh , Guilian Gao , Rajesh Katkar
- 申请人: Invensas Bonding Technologies, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Invensas Bonding Technologies, Inc.
- 当前专利权人: Invensas Bonding Technologies, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L23/473
- IPC分类号: H01L23/473 ; H01L23/467 ; H01L25/10 ; H01L25/18 ; H01L23/00 ; H01L25/065 ; H01L23/32
摘要:
Embodiments herein provide for fluidic cooling assemblies embedded within a device package and related manufacturing methods. In one embodiment, the cooling assembly includes a cold plate body attached to a singulated device and a manifold lid attached to the cold plate body. The cold plate body has a first side adjacent to the singulated device and an opposite second side, and the manifold lid is attached to the second side. In some embodiments, the first side of the cold plate body and the backside of the singulated device each comprise a dielectric material surface, the cold plate body is attached to the singulated device by direct dielectric bonds formed between the dielectric material surfaces, the cold plate body, and the manifold lid define one or more cavities, and the one or more cavities form at least a portion of a fluid flow path from an inlet to an outlet of the manifold lid.
信息查询
IPC分类: