- 专利标题: POWER SEMICONDUCTOR DEVICE AND OPERATING METHOD
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申请号: US18028454申请日: 2020-11-06
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公开(公告)号: US20230369408A1公开(公告)日: 2023-11-16
- 发明人: Marco BELLINI , Jan VOBECKY , Lars KNOLL , Gianpaolo ROMANO , Giovanni ALFIERI
- 申请人: Hitachi Energy Switzerland AG
- 申请人地址: CH Baden
- 专利权人: Hitachi Energy Switzerland AG
- 当前专利权人: Hitachi Energy Switzerland AG
- 当前专利权人地址: CH Baden
- 国际申请: PCT/EP2020/081287 2020.11.06
- 进入国家日期: 2023-03-24
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; H01L29/78
摘要:
A power semiconductor device is provided. In an embodiment, the power semiconductor device comprises a source region, a channel region in the semiconductor body, and a gate electrode at the channel region. The gate electrode is electrically insulated from the semiconductor body. The channel region is of a second conductivity type different from the first conductivity type. The channel region comprises a first dopant having an activation energy of at most 0.15 eV, and a second dopant having an activation energy of at least 0.3 eV.
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