- 专利标题: METHOD OF FABRICATING A PEROVSKITE-MATERIAL BASED TRENCH CAPACITOR USING RAPID THERMAL ANNEALING (RTA) METHODOLOGIES
-
申请号: US17649899申请日: 2022-02-03
-
公开(公告)号: US20230246064A1公开(公告)日: 2023-08-03
- 发明人: Niloy Mukherjee , Somilkumar J. Rathi , Jason Y. Wu , Pratyush Pandey , Zeying Ren , FNU Atiquzzaman , Gabriel Antonio Paulius Velarde , Noriyuki Sato , Mauricio Manfrini , Tanay Gosavi , Rajeev Kumar Dokania , Amrita Mathuriya , Ramamoorthy Ramesh , Sasikanth Manipatruni
- 申请人: Kepler Computing Inc.
- 申请人地址: US CA San Francisco
- 专利权人: Kepler Computing Inc.
- 当前专利权人: Kepler Computing Inc.
- 当前专利权人地址: US CA San Francisco
- 主分类号: H01L49/02
- IPC分类号: H01L49/02 ; H01L21/324 ; H01L21/768 ; H01L27/11507 ; H01L45/00
摘要:
A memory device includes a first electrode comprising a first conductive nonlinear polar material, where the first conductive nonlinear polar material comprises a first average grain length. The memory device further includes a dielectric layer comprising a perovskite material on the first electrode, where the perovskite material includes a second average grain length. A second electrode comprising a second conductive nonlinear polar material is on the dielectric layer, where the second conductive nonlinear polar material includes a third grain average length that is less than or equal to the first average grain length or the second average grain length.
公开/授权文献
信息查询
IPC分类: