发明申请
- 专利标题: MAGNETORESISTIVE DEVICE DESIGN AND PROCESS INTEGRATION WITH SURROUNDING CIRCUITRY
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申请号: US16143088申请日: 2018-09-26
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公开(公告)号: US20190043921A1公开(公告)日: 2019-02-07
- 发明人: Thomas ANDRE , Sanjeev AGGARWAL , Kerry Joseph NAGEL , Sarin A. DESHPANDE
- 申请人: Everspin Technologies, Inc.
- 申请人地址: US AZ Chandler
- 专利权人: Everspin Technologies, Inc.
- 当前专利权人: Everspin Technologies, Inc.
- 当前专利权人地址: US AZ Chandler
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; H01L43/12 ; H01L43/02 ; G11C11/16 ; H01L43/08
摘要:
Magnetoresistive device architectures and methods for manufacturing are presented that facilitate integration of process steps associated with forming such devices into standard process flows used for surrounding logic/circuitry. In some embodiments, the magnetoresistive device structures are designed such that the devices are able to fit within the vertical dimensions of the integrated circuit associated with a single metal layer and a single layer of interlayer dielectric material. Integrating the processing for the magnetoresistive devices can include using the same standard interlayer dielectric material as used in the surrounding circuits on the integrated circuit as well as using standard vias to interconnect to at least one of the electrodes of the magnetoresistive devices.
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