- Patent Title: Silicon carbide field-effect transistor including shielding areas
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Application No.: US17375034Application Date: 2021-07-14
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Publication No.: US11626477B2Publication Date: 2023-04-11
- Inventor: Ralf Siemieniec , Thomas Aichinger , Thomas Basler , Wolfgang Bergner , Rudolf Elpelt , Romain Esteve , Michael Hell , Daniel Kueck , Caspar Leendertz , Dethard Peters , Hans-Joachim Schulze
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE102018110943.1 20180507
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L29/16 ; H01L21/04 ; H01L29/66 ; H01L29/10

Abstract:
A semiconductor component includes: gate structures extending from a first surface into an SiC semiconductor body; a drift zone of a first conductivity type formed in the SiC semiconductor body; first mesas and second mesas arranged between the gate structures in the SiC semiconductor body; body areas of a second conductivity type arranged in the first mesas and the second mesas, the body areas each adjoining a first side wall of one of the gate structures; first shielding areas of the second conductivity type adjoining a second side wall of one of the gate structures; second shielding areas of the second conductivity type adjoining the body areas in the second mesas; and diode areas of the conductivity type of the drift zone, the diode areas forming Schottky contacts with a load electrode between the first shielding areas and the second shielding areas.
Public/Granted literature
- US20210343835A1 Silicon Carbide Semiconductor Component Public/Granted day:2021-11-04
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