- 专利标题: Silicon carbide semiconductor device having a step film formed between a plating film and a first electrode
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申请号: US16050401申请日: 2018-07-31
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公开(公告)号: US11245013B2公开(公告)日: 2022-02-08
- 发明人: Yuichi Hashizume , Keishirou Kumada , Yasuyuki Hoshi
- 申请人: FUJI ELECTRIC CO., LTD.
- 申请人地址: JP Kawasaki
- 专利权人: FUJI ELECTRIC CO., LTD.
- 当前专利权人: FUJI ELECTRIC CO., LTD.
- 当前专利权人地址: JP Kawasaki
- 优先权: JPJP2017-170679 20170905
- 主分类号: H01L29/16
- IPC分类号: H01L29/16 ; H01L29/66 ; H01L29/10 ; H01L29/06 ; H01L29/78 ; H01L29/417 ; H01L21/02 ; H01L23/532 ; H01L23/00 ; H01L29/423 ; H01L29/739
摘要:
A silicon carbide semiconductor device includes a first semiconductor layer of a first conductivity type provided on a front surface of a semiconductor substrate of the first conductivity type; a second semiconductor layer of a second conductivity type; a first semiconductor region of the first conductivity type; and a gate electrode having a striped-shape and provided on a gate insulating film. The silicon carbide semiconductor device further includes a first electrode provided on a surface of the second semiconductor layer and the first semiconductor region; a step film provided on the first electrode; a plating film provided on the first electrode and the step film; and a solder on the plating film. The step film is provided on the first electrode on which the solder and the plating film are provided, the step film being provided so as to be embedded in grooves formed on the first electrode.
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