Invention Grant
- Patent Title: Vertical transport devices with greater density through modified well shapes
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Application No.: US15955283Application Date: 2018-04-17
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Publication No.: US10943911B2Publication Date: 2021-03-09
- Inventor: Brent A. Anderson , Stuart A. Sieg , Junli Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Randall Bluestone
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/08 ; H01L29/10 ; H01L29/66 ; H01L29/06 ; H01L29/78 ; H01L21/8238 ; H01L21/762
Abstract:
In accordance with an embodiment of the present invention, a memory cell is provided. The memory cell includes a first L-shaped bottom source/drain including a first dopant, and a first adjoining bottom source/drain region abutting the first L-shaped bottom source/drain, wherein the first adjoining bottom source/drain region includes a second dopant that is the opposite type from the first dopant.
Public/Granted literature
- US20190319032A1 VERTICAL TRANSPORT DEVICES WITH GREATER DENSITY THROUGH MODIFIED WELL SHAPES Public/Granted day:2019-10-17
Information query
IPC分类:
