- 专利标题: Three-dimensional memory device having support-die-assisted source power distribution and method of making thereof
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申请号: US16243469申请日: 2019-01-09
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公开(公告)号: US10510738B2公开(公告)日: 2019-12-17
- 发明人: Kwang-Ho Kim , Masaaki Higashitani , Fumiaki Toyama , Akio Nishida
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 代理机构: The Marbury Law Group, PLLC
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L27/11582 ; H01L25/18 ; H01L23/00 ; H01L25/00 ; H01L23/48 ; H01L27/11519 ; H01L27/11556 ; H01L27/11529 ; H01L27/11565 ; H01L27/11573 ; H01L23/522
摘要:
A memory-containing die includes a three-dimensional memory array, a memory dielectric material layer located on a first side of the three-dimensional memory array, and memory-side bonding pads. A logic die includes a peripheral circuitry configured to control operation of the three-dimensional memory array, logic dielectric material layers located on a first side of the peripheral circuitry, and logic-side bonding pads included in the logic dielectric material layers. The logic-side bonding pads includes a pad-level mesh structure electrically connected to a source power supply circuit within the peripheral circuitry and containing an array of discrete openings therethrough, and discrete logic-side bonding pads. The logic-side bonding pads are bonded to a respective one, or a respective subset, of the memory-side bonding pads. The pad-level mesh structure can be used as a component of a source power distribution network.
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