The invention relates to the technical field of vehicles, and provides a vacuum pump control method, device and system of a hybrid vehicle. The vacuum pump control method comprises the steps that a vacuum degree signal is acquired in real time; when the vacuum degree signal is higher than a first preset closing value of an electronic vacuum pump, the electronic vacuum pump is controlled to stop working, otherwise the electronic vacuum pump continues to work, and the continuous work time is recorded; in an engine work mode, whether an electronic vacuum pump work signal exists or not is detected, if yes, the electronic vacuum pump is controlled to continuously work, otherwise the electronic vacuum pump stops working; and in a pure electric work mode, if the vacuum degree signal does not reach the first preset closing value and the continuous work time reaches safe work time, the first preset closing value is reduced to judge whether the vacuum degree signal reaches a new closing value ornot again, if yes, the electronic vacuum pump is controlled to stop working, otherwise the electronic vacuum pump continues to work, or the engine work mode is started. According to the vacuum pump control method, device and system, dependency on the overload capacity of the electronic vacuum pump is reduced, and the safety of vehicle braking performance is improved.