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发明公开
CN104350173A 用于涂布基板的方法及涂布机 无效 - 驳回

用于涂布基板的方法及涂布机
摘要：
本发明公开了一种通过一阴极配置来涂布一基板的方法，所述阴极配置包括至少二个可转动阴极。此方法包括于一第一方向中转动所述至少二个可转动阴极的至少一者，且同时于一第二方向中转动所述至少二个可转动阴极的至少一者。第一方向是相反于第二方向。再者，公开了一种用于控制一涂布工艺的控制器。此外，公开了一种用于涂布一基板的涂布机。此涂布机包括一阴极配置及一控制器。阴极配置具有至少二个可转动阴极。此控制器是如此处所公开的。
摘要（英）：

A method for coating a substrate by means of a cathode arrangement is disclosed. The cathode arrangement includes at least two rotatable cathodes. The method includes rotating at least one of the at least two rotatable cathodes in a first direction, and, at the same time, rotating at least one of the at least two rotatable cathodes in a second direction. The first direction is opposite to the second direction. Furthermore, a controller for controlling a coating process is disclosed. Furthermore, a coater for coating a substrate is disclosed. The coater includes a cathode arrangement with at least two rotatable cathodes and a controller as disclosed herein.

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