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发明公开
CN103556124A 一种在基体材料上沉积钽或铌的方法 无效 - 驳回

一种在基体材料上沉积钽或铌的方法
摘要：
本发明涉及一种在基体材料上沉积钽或铌的方法。其特点是，包括如下步骤：首先将NbCl5或TaCl5放入第一加热炉中升温至250℃-300℃成为气体，然后通入体积比2：1-2的氢气和氩气，一起进入放有基体材料的第二加热炉中进行反应，反应中控制氢气与NbCl5或TaCl5气体的流量比为2-5:1，加热到1000℃-1400℃进行反应，随着反应的进行，Nb或Ta粉末落在基体材料上与基体材料结合形成复合材料。本发明的优点在于工艺简单，并且特别适用于尺寸较小的容器及管、棒、带材等材料。
摘要（英）：

The present invention relates to a method for depositing tantalum or niobium on a substrate material. The method is characterized by comprising the following steps: placing NbCl5 or TaCl5 into a first heating furnace to heat to achieve a temperature of 250-300 DEG C to obtain a gas; introducing hydrogen and argon according to a volume ratio of 2:1-2; adding the materials into a second heating furnace filled with a substrate material to carry out a reaction, wherein a flow ratio of hydrogen to NbCl5 or TaCl5 is 2-5:1 during the reaction; and heating to achieve a temperature of 1000-1400 DEG C to carry out a reaction, wherein Nb or Ta powder falls on the substrate material and is combined with the substrate material to form a composite material along with performing of the reaction. The method has an advantage of simple process, and is especially suitable for small-size containers and tubes, rods, tapes and other materials.

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