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发明公开
CN101604124A 模子、图案形成方法以及图案形成设备 有权

模子、图案形成方法以及图案形成设备
摘要：
本发明提供一种用于形成图案的图案形成方法，包括：制备模子(104)，该模子(104)具有包括图案区域(1000)的第一表面、与第一表面相对的第二表面以及被设在远离第二表面并靠近第一表面的位置处的对准标记(2070)；使模子(104)的图案区域(1000)与设在衬底(5000)上的涂覆材料接触；在涂覆材料被设于衬底(5000)上的对准标记(2070)和衬底(5000)彼此相对的部分处的情况下，通过利用对准标记(2070)和在衬底(5000)上设置的标记(5300)，来获得关于模子(104)和衬底(5000)的位置信息；以及在所述信息的基础上，实施衬底(5000)与模子(104)的高精度对准；相应的模子以及图案形成设备。
摘要（英）：

A pattern forming method for forming a pattern includes: preparing a mold (104) provided with a first surface including a pattern area (1000), a second surface located opposite from the first surface, and an alignment mark (2070) provided at a position at which the alignment mark (2070) is away from the second surface and is close to the first surface; contacting the pattern area (1000) of the mold (104) with the coating material disposed on a substrate (5000); obtaining information about positions of the mold (104) and the substrate (5000) by using the alignment mark (2070) and a mark (5300) provided to the substrate (5000) in a state in which the coating material is disposed on the substrate (5000) at a portion where the alignment mark (2070) and the substrate (5000) are opposite to each other; and effecting alignment of the substrate (5000) with the mold (104) with high accuracy on the basis of the information.

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