Measuring device and operation method of system for inspecting focus ring

    公开(公告)号:US11164729B2

    公开(公告)日:2021-11-02

    申请号:US16296704

    申请日:2019-03-08

    摘要: A measuring device and method, provided in a region surrounded by a focus ring and configured to measure an amount of consumption of the focus ring, includes a disc-shaped base substrate, sensor electrodes provided on the base substrate, a high frequency oscillator configured to apply a high frequency signal to the sensor electrodes, and an operation unit configured to calculate measurement values indicating electrostatic capacitances of the sensor electrodes from detection values corresponding to potentials of the sensor electrodes. The operation unit calculates a representative value (for example an average value) of the measurement values corresponding to the amount of consumption of the focus ring and derives the amount of consumption of the focus ring with reference to a table in which the amount of consumption of the focus ring is associated with the representative value of the measurement values.

    Apparatus for aging field emission device and aging method thereof

    公开(公告)号:US10600605B2

    公开(公告)日:2020-03-24

    申请号:US16123540

    申请日:2018-09-06

    IPC分类号: H01J9/44 H01J29/04 H01J9/42

    摘要: The inventive concept relates to an apparatus for aging a field emission device configured to emitting electrons based on an electric field between a first electrode and a second electrode, and an aging method thereof. The apparatus according to an embodiment of an inventive concept includes a voltage generator and a current controller. The voltage generator increases the voltage applied to the first electrode to the target voltage level during the first time. The current controller increases the field emission current for the second time to the target current level and increases the pulse width of the field emission current for the third time to the target pulse width. According to the inventive concept, the performance of a large field emission device may be improved with high efficiency and low cost.

    APPARATUS FOR AGING FIELD EMISSION DEVICE AND AGING METHOD THEREOF

    公开(公告)号:US20190080871A1

    公开(公告)日:2019-03-14

    申请号:US16123540

    申请日:2018-09-06

    IPC分类号: H01J9/44 H01J9/42 H01J29/04

    摘要: The inventive concept relates to an apparatus for aging a field emission device configured to emitting electrons based on an electric field between a first electrode and a second electrode, and an aging method thereof. The apparatus according to an embodiment of an inventive concept includes a voltage generator and a current controller. The voltage generator increases the voltage applied to the first electrode to the target voltage level during the first time. The current controller increases the field emission current for the second time to the target current level and increases the pulse width of the field emission current for the third time to the target pulse width. According to the inventive concept, the performance of a large field emission device may be improved with high efficiency and low cost.

    Method for measuring luminance of light-emitting display panel
    7.
    发明授权
    Method for measuring luminance of light-emitting display panel 有权
    发光显示面板的亮度测定方法

    公开(公告)号:US09322707B2

    公开(公告)日:2016-04-26

    申请号:US13688352

    申请日:2012-11-29

    申请人: JOLED INC.

    摘要: Disclosed is a method for measuring luminance of each of entire pixels two-dimensionally arranged in a light-emitting display panel at regular intervals, using an image sensor in which light receiving elements are two-dimensionally arranged at regular intervals, the method including: providing an optical lens between the light-emitting display panel and the image sensor, and adjusting distances between the light-emitting display panel, the image sensor, and the optical lens by setting intervals of images of the entire pixels to be N times as large as intervals of the light receiving pixels, where N is a natural number, the images being to be formed on a light receiving surface of the image sensor through the optical lens; displaying, on the light-emitting display panel, a display pattern in which predetermined pixels from among the entire pixels produce a luminescence; and measuring the luminance of the predetermined pixels, using the light receiving elements.

    摘要翻译: 本发明公开了一种使用以规则间隔二维排列光接收元件的图像传感器,以规则的间隔测量二维排列在发光显示面板中的整个像素的亮度的方法,所述方法包括:提供 在发光显示面板和图像传感器之间的光学透镜,并且通过将整个像素的图像的间隔设置为N倍的N倍,来调整发光显示面板,图像传感器和光学透镜之间的距离 其中N是自然数的光接收像素的间隔,图像将通过光学透镜形成在图像传感器的光接收表面上; 在发光显示面板上显示其中整个像素中的预定像素产生发光的显示图案; 并使用光接收元件测量预定像素的亮度。

    Illuminance adjusting method of liquid crystal photo alignment irradiation machine
    8.
    发明授权
    Illuminance adjusting method of liquid crystal photo alignment irradiation machine 有权
    液晶光取向照射机的照度调节方法

    公开(公告)号:US09091870B2

    公开(公告)日:2015-07-28

    申请号:US13807300

    申请日:2012-11-25

    IPC分类号: H01J9/42 G02F1/13 G02F1/1337

    CPC分类号: G02F1/1303 G02F1/133788

    摘要: The provides an illuminance adjusting method of a liquid crystal photo alignment irradiation machine, including (1) providing a liquid crystal photo alignment irradiation machine, which includes UV lamps, an illuminance collecting device, and a stage for supporting a liquid crystal panel; (2) the illuminance collecting device collecting information of illuminance and illuminance homogeneity of a surface of the stage; (3) calculating distance for the UV lamps to descend according to the information of illuminance and illuminance homogeneity of the surface of the stage; and (4) lowering down altitude of the UV lamps according to the descending distance. The method uses the illuminance collecting device to completely and intensively collect the information of illuminance and illuminance homogeneity of the stage surface and to automatically adjust the altitude of the UV lamps according to the information of illuminance and illuminance homogeneity so as to adjust the illuminance of the stage surface.

    摘要翻译: 本发明提供一种液晶光取向照射机的照度调整方法,其包括(1)提供包括UV灯,照度采集装置和支撑液晶面板的台的液晶光取向照射机。 (2)照度采集装置收集舞台表面的照度和照度均匀性的信息; (3)根据舞台表面的照度和照度均匀度的信息计算紫外灯的距离; 和(4)根据下降距离降低紫外灯的高度。 该方法采用照度采集装置,完全集中收集舞台表面的照度和照度均匀性信息,并根据照度和照度均匀性的信息自动调整紫外灯的高度,调整照度 舞台表面。

    ARC TUBE DEVICE AND STEM STRUCTURE FOR ELECTRODELESS PLASMA LAMP
    9.
    发明申请
    ARC TUBE DEVICE AND STEM STRUCTURE FOR ELECTRODELESS PLASMA LAMP 有权
    电磁等离子体灯的弧管装置和干式结构

    公开(公告)号:US20140187116A1

    公开(公告)日:2014-07-03

    申请号:US14106674

    申请日:2013-12-13

    摘要: A plasma lamp apparatus. The apparatus has an arc tube structure having an inner region and an outer region in one or more embodiments. The arc tube structure has a first end comprising an associated first end diameter and a second end comprising a second end diameter according to a specific embodiment. The apparatus also has a center region provided between the first end and the second end in one or more embodiments. The center region has a center diameter, which is less than a first end diameter and/or a second end diameter.

    摘要翻译: 一种等离子体灯装置。 该装置具有在一个或多个实施例中具有内部区域和外部区域的电弧管结构。 电弧管结构具有包括相关联的第一端直径的第一端和根据具体实施例的包括第二端直径的第二端。 在一个或多个实施例中,设备还具有设置在第一端和第二端之间的中心区域。 中心区域具有小于第一端直径和/或第二端直径的中心直径。

    SOLID STATE LIGHTING SYSTEMS AND ASSOCIATED METHODS OF OPERATION AND MANUFACTURE
    10.
    发明申请
    SOLID STATE LIGHTING SYSTEMS AND ASSOCIATED METHODS OF OPERATION AND MANUFACTURE 审中-公开
    固态照明系统及相关操作和制造方法

    公开(公告)号:US20130293114A1

    公开(公告)日:2013-11-07

    申请号:US13465149

    申请日:2012-05-07

    IPC分类号: H05B37/02 H01J9/42

    CPC分类号: H05B33/086

    摘要: A lighting system includes a solid state lighting device capable of generating mixed light and a controller. The solid state lighting device includes light sources for producing mixed light and a sensor configured to detect light from one of the light sources. The controller controls two or more of the light sources based on output from the sensor. The controller can communicate with the sensor to provide closed-loop control.

    摘要翻译: 照明系统包括能够产生混合光的固态照明装置和控制器。 固体照明装置包括用于产生混合光的光源和被配置为检测来自一个光源的光的传感器。 控制器根据传感器的输出控制两个或多个光源。 控制器可以与传感器通信以提供闭环控制。