Abstract:
A variable capacitor. The variable capacitor has a movable capacitor electrode including a major surface and a fixed capacitor electrode including a major surface. The major surface of the fixed capacitor electrode is opposite the major surface of the movable capacitor electrode and is separated therefrom by a gap. The major surface of the movable capacitor electrode includes a rigidity-increasing feature. The rigidity-increasing feature further provides a capacitance-increasing topography and reduces snap-together of the capacitor electrodes.
Abstract:
A tunable capacitor includes a substrate, a stationary electrode and a movable electrode supported by the substrate, piezoelectric actuators that are supported by the substrate and drive the movable electrode, and a dielectric layer interposed between the stationary electrode and the movable electrode.
Abstract:
An input device for a personal computer or the like has an elastic member, a slider horizontally movable on the elastic member, and a key top operatively connected to the elastic member through the slider. The elastic member 5 has a coupling portion provided with a flange which vertically movably fits in a fit hole formed in the slider. A horizontal movement of the key top causes the wall of the fit hole of the slider to press the flange, which in turn causes deformation of the flange and of the movable electrode, with the result that the size of the gap and, hence, capacitive value between the movable electrode and the fixed electrode are changed, whereby the direction of movement of the key top is detected with a high degree of accuracy.
Abstract:
MEMS devices include a substrate, an anchor attached to the substrate, and a multilayer member attached to the anchor and spaced apart from the substrate. The multilayer member can have a first portion that is remote from the anchor and that curls away from the substrate and a second portion that is adjacent the anchor that contacts the substrate. Related methods are also disclosed.