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1.发明授权公开(公告)号：US11467394B2
公开(公告)日：2022-10-11
申请号：US16804424
申请日：2020-02-28
发明人： Richard Schroedter , Han Woong Yoo , David Brunner , Georg Schitter , Franz Michael Darrer , Marcus Edward Hennecke
摘要： An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.
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公开(公告)号：US20220206401A1
公开(公告)日：2022-06-30
申请号：US17685432
申请日：2022-03-03
申请人： Carl Zeiss SMT GmbH
发明人： Alexandra PAZIDIS , Kerstin HILD , Thilo POLLAK , Martin NOAH , Juergen NASER , Dirk KLEINHENZ
摘要： A mirror arrangement (30) includes: a substrate (31), which has a front side (31a) having a mirror face (32a) for reflecting radiation (5), and a rear side (31b) facing away from the front side (31a), as well as at least one actuator (27) arranged to generate deformations of the mirror face (32a). The at least one actuator (27) is secured on the rear side (31b) of the substrate (31), and the mirror arrangement (30) has a hydrogen barrier (38) which is configured to protect a hydrogen-sensitive material (M) on the rear side (31b) of the substrate (31), in particular on the at least one actuator (27), from the attack by hydrogen (37) from the surroundings (36) of the mirror arrangement (30). An associated optical arrangement, in particular an EUV lithography apparatus (1), incorporating such a mirror arrangement (30) is also disclosed.
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公开(公告)号：US20220124901A1
公开(公告)日：2022-04-21
申请号：US17562819
申请日：2021-12-27
发明人： Ting-Ya CHENG , Chun-Lin CHANG , Li-Jui CHEN , Han-Lung CHANG
摘要： An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.
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4.发明授权公开(公告)号：US10185221B2
公开(公告)日：2019-01-22
申请号：US15830876
申请日：2017-12-04
申请人： Carl Zeiss SMT GmbH
摘要： The invention relates to arrangements for actuating an element in a microlithographic projection exposure apparatus. In accordance with one aspect, an arrangement for actuating an element in a microlithographic projection exposure apparatus comprises a first number (nR) of degrees of freedom, wherein an adjustable force can be transmitted to the optical element in each of the degrees of freedom, and a second number (nA) of actuators, which are coupled to the optical element in each case via a mechanical coupling for the purpose of transmitting force to the optical element, wherein the second number (nA) is greater than the first number (nR). In accordance with one aspect, at least one of the actuators is arranged in a node of at least one natural vibration mode of the optical element.
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公开(公告)号：US20170351093A1
公开(公告)日：2017-12-07
申请号：US15536048
申请日：2015-12-25
申请人： BYD COMPANY LIMITED
CPC分类号： G02B27/0149 , G02B7/185 , G02B7/188 , G02B26/0825 , G02B27/01 , G02B27/0101 , G02B2027/011 , G02B2027/0127
摘要： A vehicle, a head-up displaying system and a projector are provided, the projector including a displaying component (1) configured to project an image, and a three-mirror optical device positioned in an optical path of an emergent light of the displaying component (1), configured to reflect the image projected by the displaying component (1) onto a front windshield (5) such that the front windshield (5) reflects the image to eyes of a driver and including: a zoom lens assembly (2) having a zoom lens (21) for zooming in/out the image projected by the displaying component (1), and a first curvature adjusting component configured to adjust a curvature of the zoom lens (21); an image quality compensation lens assembly (3) having an image quality compensation lens (31) configured to compensate for an image quality distortion caused during a change of the curvature of the zoom lens (21), and a second curvature adjusting component configured to adjust a curvature of the image quality compensation lens (31); and a front windshield compensation lens assembly (4) configured to compensate for an image distortion caused by the front windshield (5).
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公开(公告)号：US20120026614A1
公开(公告)日：2012-02-02
申请号：US12848288
申请日：2010-08-02
IPC分类号： G02B7/185
CPC分类号： G02B5/10 , G02B26/0825
摘要： A method for varying a radius of curvature of a concave mirror includes coupling a concave mirror to a mirror frame, coupling the mirror frame to a vertical slide, coupling the vertical slide to a horizontal slide, coupling the horizontal slide to a fixed support, coupling an end of the mirror frame to an actuator, coupling a first proximity sensor to the mirror frame, coupling a second proximity sensor to the horizontal slide, and coupling a third proximity sensor to the vertical slide. The method also includes translating the mirror frame along the vertical slide and translating the vertical slide along the horizontal slide to facilitate aligning a pole of the concave mirror with a center of an object, and varying the radius of curvature of the concave mirror to magnify an image of an object in the concave mirror for optimum clarity.
摘要翻译： 用于改变凹面镜的曲率半径的方法包括将凹面镜耦合到镜框，将镜框连接到垂直滑动件，将竖直滑动件联接到水平滑动件，将水平滑块联接到固定支撑件，联接 将镜框的端部连接到致动器，将第一接近传感器耦合到镜框，将第二接近传感器耦合到水平滑动件，以及将第三接近传感器耦合到垂直滑动件。 该方法还包括沿着垂直滑动平移反射镜框架并沿着水平滑动件平移垂直滑动件，以便于将凹面镜的磁极与物体的中心对准，并且改变凹面镜的曲率半径以放大 在凹面镜中的物体的图像以获得最佳清晰度。
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7.发明申请公开(公告)号：US20100326521A1
公开(公告)日：2010-12-30
申请号：US11934772
申请日：2007-11-03
申请人： Mario Rabinowitz
发明人： Mario Rabinowitz
CPC分类号： G02B19/0019 , F24S23/70 , F24S30/48 , F24S50/20 , F24S2023/85 , F24S2030/11 , F24S2030/17 , G02B7/183 , G02B19/0042 , G02B19/0076 , G02B26/0841 , H01L31/0543 , H01L31/0547 , H02S20/10 , H02S20/30 , H02S40/22 , Y02E10/47 , Y02E10/52
摘要： This invention deals with novel method and apparatus for positioning and motion control of the elements (mirrors) of a Fresnel reflector solar concentrator tracking heliostat array by induced and/or permanent dipole coupling to an electronic grid to produce angular deflection, and rotational motion. Thus forces and torques are produced without the use of internal moving parts. Control is achieved without recourse to magnetic fields, by means of high electric fields which may be attained at relatively low voltages. At low voltages, the instant invention exceeds the capability of conventional systems. It can perform dynamic motion control with independent amplitude and frequency modulation. It is ideally suited for maximization of solar energy focused by the array onto a receiver. Since there are no internal moving parts, the instant invention is the most adapted for fabrication from the mini- to the microtechnology realm. Furthermore it provides less costly and greater ease of manufacture from the mini- to the micro-realm.
摘要翻译： 本发明涉及用于定位和运动控制菲涅尔反射器太阳能集中器的元件（反射镜）的新颖方法和装置，其通过感应和/或永久偶极耦合到电子栅格产生角度偏转和旋转运动来跟踪定日镜阵列。 因此，在不使用内部移动部件的情况下产生力和扭矩。 通过可在相对较低的电压下获得的高电场实现控制，而无需借助于磁场。 在低电压下，本发明超出常规系统的能力。 它可以执行独立的幅度和频率调制的动态运动控制。 它非常适合将由阵列聚焦的太阳能最大化到接收器上。 由于没有内部移动部件，因此本发明最适于从微型技术领域制造。 此外，从微型到微型领域，它提供的成本更低，制造更容易。
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公开(公告)号：US20100202071A1
公开(公告)日：2010-08-12
申请号：US12685386
申请日：2010-01-11
申请人： André PREUMONT , Gonçalo Rodrigues
发明人： André PREUMONT , Gonçalo Rodrigues
CPC分类号： G02B26/06 , G02B26/0858 , Y10T29/49826
摘要： The present invention is related to a deformable mirror comprising individual units (1), each unit including a continuous reflective substrate (2) having a front and back surface, on the back surface of the substrate: a continuous mass electrode (3) and a plurality of in-plane actuators (4) of electrostrictive or piezo-electric material, arranged between the mass electrode (3) and individual addressing electrodes (5).
摘要翻译： 本发明涉及包括各个单元（1）的可变形反射镜，每个单元包括在基板的背面上具有前表面和后表面的连续反射基板（2）：连续质量电极（3）和 布置在质量电极（3）和单个寻址电极（5）之间的多个电致伸缩或压电材料的平面内致动器（4）。
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公开(公告)号：US20090237822A1
公开(公告)日：2009-09-24
申请号：US12457030
申请日：2009-05-29
申请人： Lionnel Escolano , Paul Sauvageot
发明人： Lionnel Escolano , Paul Sauvageot
IPC分类号： G02B7/185
CPC分类号： G02B26/0825
摘要： A correction and focusing device for a beam, through the deformation of a mirror, wherein it incorporates a frame supporting the mirror, at least one curve generator applying at least one torque to at least one extremity of the mirror, and correction actuators spaced along the mirror so as to apply stresses to the different zones of the mirror.
摘要翻译： 一种用于光束的校正和聚焦装置，其通过反射镜的变形，其中其包括支撑反射镜的框架，至少一个曲线发生器，其向镜子的至少一个末端施加至少一个扭矩，以及校正致动器沿着 镜子，以便对镜子的不同区域施加应力。
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公开(公告)号：US20090153934A1
公开(公告)日：2009-06-18
申请号：US12332523
申请日：2008-12-11
申请人： Katsunori Shoji
发明人： Katsunori Shoji
CPC分类号： G02B27/0031 , G02B7/182 , G02B26/126
摘要： A curvature-adjustment device used for an optical scanner that includes an optical beam emission unit to emit an optical beam, a deflection unit to deflect the optical beam in a main scanning direction and a mirror to reflect the optical beam. The curvature-adjustment device corrects a curvature of a main scanning line on a surface of a scanning target, and includes a support unit to support the mirror at an end thereof by contacting a rear surface of the mirror, an edge-positioned adjustment unit to curve the mirror by exerting a first force, a center-positioned adjustment unit to curve the mirror reversely in a direction to which the edge-positioned adjustment unit curves the mirror by providing a second force perpendicular to the reflecting surface at a center of the mirror, and a fine adjustment unit to adjust the strength of the first force depending on the strength of the second force.
摘要翻译： 一种用于光扫描器的曲率调节装置，包括用于发射光束的光束发射单元，使主光学方向偏转光束的偏转单元和反射光束的反射镜。 曲率调节装置校正扫描对象物的表面上的主扫描线的曲率，并且包括支撑单元，其通过使反射镜的后表面接触来支撑反射镜的一端，边缘定位的调节单元与 通过施加第一力来弯曲反射镜，中心定位的调节单元，通过在反射镜的中心处提供垂直于反射表面的第二力，沿着边缘定位的调节单元弯曲反射镜的方向反向弯曲反射镜 以及微调单元，用于根据第二力的强度来调节第一力的强度。
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