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1.发明授权公开(公告)号：US11782263B2
公开(公告)日：2023-10-10
申请号：US17851297
申请日：2022-06-28
发明人： Richard Schroedter , Han Woong Yoo , David Brunner , Georg Schitter , Franz Michael Darrer , Marcus Edward Hennecke
CPC分类号： G02B26/0841 , G02B7/185 , G02B7/1821 , G02B26/0858 , G02B26/10
摘要： An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.
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公开(公告)号：US11835710B2
公开(公告)日：2023-12-05
申请号：US17122300
申请日：2020-12-15
发明人： David Brunner , Stephan Gerhard Albert , Franz Michael Darrer , Georg Schitter , Richard Schroedter , Han Woong Yoo
CPC分类号： G02B26/0841 , G01D5/2417 , G02B26/105
摘要： A scanning system includes a microelectromechanical system (MEMS) scanning structure configured with a desired rotational mode of movement based on a driving signal; a plurality of comb-drives configured to drive the MEMS scanning structure according to the desired rotational mode of movement based on the driving signal, each comb-drive including a rotor comb electrode and a stator comb electrode that form a capacitive element that has a capacitance that depends on the deflection angle of the MEMS scanning structure; a driver configured to generate the at least one driving signal; a sensing circuit selectively coupled to at least a subset of the plurality of comb-drives for receiving sensing signals therefrom, wherein each sensing signal is representative of the capacitance of a corresponding comb-drive; and a processing circuit configured to determine a scanning direction of the MEMS scanning structure in the desired rotational mode of movement based on the sensing signals.
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3.发明授权公开(公告)号：US11467394B2
公开(公告)日：2022-10-11
申请号：US16804424
申请日：2020-02-28
发明人： Richard Schroedter , Han Woong Yoo , David Brunner , Georg Schitter , Franz Michael Darrer , Marcus Edward Hennecke
摘要： An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.
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公开(公告)号：US11356059B2
公开(公告)日：2022-06-07
申请号：US16861647
申请日：2020-04-29
IPC分类号： H03B5/30
摘要： An oscillator system includes a first oscillator structure configured to oscillate about a first rotation axis at a first oscillation frequency; a second oscillator structure configured to oscillate about a second rotation axis at a second oscillation frequency; a driver circuit configured to generate a first driving signal to drive an oscillation of the first oscillator structure with a first oscillation phase and the first oscillation frequency and generate a second driving signal to drive an oscillation of the second oscillator structure with a second oscillation phase and the second oscillation frequency. The first oscillation frequency and the second oscillation frequency have a variable frequency ratio with respect to each other that varies over time. The driver circuit is configured to modulate at least one of the first oscillation phase or the second oscillation phase to modulate the variable frequency ratio.
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