发明申请
US20100202071A1 DEFORMABLE MIRROR 审中-公开
可变镜

DEFORMABLE MIRROR
摘要:
The present invention is related to a deformable mirror comprising individual units (1), each unit including a continuous reflective substrate (2) having a front and back surface, on the back surface of the substrate: a continuous mass electrode (3) and a plurality of in-plane actuators (4) of electrostrictive or piezo-electric material, arranged between the mass electrode (3) and individual addressing electrodes (5).
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