公开(公告)号：US06713770B2

公开(公告)日：2004-03-30

申请号：US10098975

申请日：2002-03-15

Applicant: Richard L. Sandstrom ,  Alexander I. Ershov ,  William N. Partlo ,  Igor V. Fomenkov ,  Scott T. Smith ,  Daniel J. W. Brown

Inventor： Richard L. Sandstrom ,  Alexander I. Ershov ,  William N. Partlo ,  Igor V. Fomenkov ,  Scott T. Smith ,  Daniel J. W. Brown

IPC: G01J314

CPC classification number: G01J3/26 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/12 ,  G01J3/1804 ,  G01J3/22 ,  G01J9/02

Abstract: A high resolution spectral measurement device. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow-band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034 pm (FWHM) and about 0.091 pm (95 percent integral). The bandwidth of a laser beam can be measured very accurately by a directing portion of the laser beam into the insulator and scanning the laser wavelength over a range which includes the monochromator slit wavelength. In a second embodiment the second slit and the light detector is replaced by a photodiod array and the bandwidth of a laser beam is determined by analyzing a set of scan data from the photodiode array. Alternately, the laser wavelength can be fixed near the middle of the spectrum range of the grating spectrometer, and the etalon can be scanned.

Abstract translation: 高分辨率光谱测量装置。 优选的实施例在紫外线范围内呈现非常窄的狭缝功能，并且对于测量用于集成电路光刻的窄带准分子激光器的带宽是非常有用的。 来自激光的光被聚焦成漫射器，并且离开扩散器的漫射光照射标准具。 将其从标准具出射的光的一部分收集并引导到位于标准具的边缘图案处的狭缝中。 通过狭缝的光线被准直，并且准直光照射位于大约Littrow配置中的光栅，其根据波长散发光。 表示对应于所选择的标准具条纹的波长的调度光​​的一部分通过第二狭缝并由光检测器监视。 当标准具和光栅调谐到相同的精确波长时，定义狭缝功能，其极窄，例如约0.034μm（FWHM）和约0.091μm（95％积分）。 通过激光束的引导部分进入绝缘体并且在包括单色器狭缝波长的范围内扫描激光波长，可以非常精确地测量激光束的带宽。 在第二实施例中，第二狭缝和光检测器由光电二极管阵列替代，并且通过分析来自光电二极管阵列的一组扫描数据来确定激光束的带宽。 或者，激光波长可以固定在光栅光谱仪的光谱范围附近，可以扫描标准具。

公开(公告)号：US06778270B2

公开(公告)日：2004-08-17

申请号：US10243305

申请日：2002-09-13

Applicant: Mina Farr

Inventor： Mina Farr

IPC: G01J314

CPC classification number: G02B5/203 ,  G01J3/14 ,  G01J3/18 ,  G02B5/32 ,  H04Q2011/0028

Abstract: A holographic demultiplexor for filtering and spatially positioning individual optical channels, wavelengths, or sets of wavelengths. The holographic demultiplexor includes a volume hologram that includes holograms for redirecting wavelengths included in a light signal. A diffraction grating linearly disperses the light signal and the individual holograms included in the volume hologram spatially reflect the one or more wavelengths back to the diffraction grating as specific angles. The volume hologram spatially reflects the one or more wavelengths such that they are dispersed in two dimensions. The diffraction grating then reflects the two dimensionally dispersed wavelengths to a two dimensional detector array. The detectors of the detector array for adjacent wavelengths can be interleaved to reduce interference. Alternatively, the volume hologram can redirect sets of wavelengths directly to the detector array and the light is not linearly dispersed by a diffraction grating first.

Abstract translation: 全息解复用器，用于对各个光通道，波长或波长组进行滤波和空间定位。 全息解复用器包括体积全息图，其包括用于重定向包括在光信号中的波长的全息图。 衍射光栅线性地分散光信号，并且包含在体积全息图中的各个全息图在特定角度上空间地将一个或多个波长反射回衍射光栅。 体积全息图在空间上反映一个或多个波长，使得它们分散在二维中。 衍射光栅然后将二维分散的波长反射到二维检测器阵列。 用于相邻波长的检测器阵列的检测器可以交错以减少干扰。 或者，体积全息图可以将波长的组直接重定向到检测器阵列，并且光不首先由衍射光栅线性地分散。

公开(公告)号：US06671044B2

公开(公告)日：2003-12-30

申请号：US09989031

申请日：2001-11-16

Applicant: William E. Ortyn ,  David A. Basiji

Inventor： William E. Ortyn ,  David A. Basiji

IPC: G01J314

CPC classification number: G01J3/2803 ,  G01J3/2823 ,  G01N15/147 ,  G01N21/05 ,  G01N21/6456 ,  G01N21/85 ,  G01N2015/0294 ,  G01N2015/1006 ,  G01N2015/1472 ,  G01N2015/1477 ,  G01N2015/1486 ,  G01N2015/1497 ,  G01N2021/052 ,  G01N2021/058 ,  G02B7/28 ,  G02B27/1013 ,  G02B27/126 ,  G02B27/144 ,  G02B27/145 ,  G02B27/148

Abstract: Light from an object such as a cell moving through an imaging system is collected and dispersed so that it can be imaged onto a time delay and integration (TDI) detector. The light can be emitted from a luminous object or can be light from a light source that has been scattered or not absorbed by the object or can include a light emission by one or more probes within or on the object. Multiple objects passing through the imaging system can be imaged, producing both scatter images and dispersed images at different locations on one or more TDI detectors.

公开(公告)号：US06744505B1

公开(公告)日：2004-06-01

申请号：US10208323

申请日：2002-07-30

Applicant: David Y. Wang ,  David M. Aikens

Inventor： David Y. Wang ,  David M. Aikens

IPC: G01J314

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/1804 ,  G01J3/2823

Abstract: The subject invention relates to the design of a compact imaging spectrometer for use in thin film measurement and general spectroscopic applications. The spectrometer includes only two elements, a rotationally symmetric aspheric reflector and a plane grating. When employed in a pupil centric geometry the spectrometer has no coma or image distortion. Both spherical aberration and astigmatism can be independently corrected. The invention is broadly applicable to the field of optical metrology, particularly optical metrology tools for performing measurements of patterned thin films on semiconductor integrated circuits

Abstract translation: 本发明涉及用于薄膜测量和一般光谱应用的紧凑型成像光谱仪的设计。 光谱仪仅包括两个元件，旋转对称非球面反射器和平面光栅。 当以瞳孔中心几何形式使用时，光谱仪没有昏迷或图像失真。 可以独立地校正球面像差和像散。 本发明广泛地适用于光学测量领域，特别是用于在半导体集成电路上执行图案化薄膜测量的光学测量工具

公开(公告)号：US06538737B2

公开(公告)日：2003-03-25

申请号：US10003513

申请日：2001-10-31

Applicant: Richard L. Sandstrom ,  Alexander I. Ershov ,  William N. Partlo ,  Igor V. Fomenkov ,  Daniel J. W. Brown

Inventor： Richard L. Sandstrom ,  Alexander I. Ershov ,  William N. Partlo ,  Igor V. Fomenkov ,  Daniel J. W. Brown

IPC: G01J314

CPC classification number: G01J3/12 ,  G01J1/4257 ,  G01J3/22 ,  G01J3/26 ,  G01J9/02

Abstract: A high resolution etalon-grating spectrometer. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034 pm (FWHM) and about 0.091 pm (95 percent integral). The etalon and the grating are placed in a leak-fight enclosure filled with a gas, such as nitrogen or helium. The wavelength scanning of the spectrometer is done by changing the gas pressure in the enclosure during the scan.

公开(公告)号：US06583865B2

公开(公告)日：2003-06-24

申请号：US09932844

申请日：2001-08-17

Applicant: David A. Basiji ,  William E. Ortyn

Inventor： David A. Basiji ,  William E. Ortyn

IPC: G01J314

CPC classification number: G06K9/00127 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0232 ,  G01J3/14 ,  G01J3/2823 ,  G01J3/2889 ,  G01N15/14 ,  G01N21/6458 ,  G01N2015/1497

Abstract: Light from an object moving through an imaging system is collected, dispersed, and imaged onto a time delay integration (TDI) detector that is inclined relative to an axis of motion of the object, producing a pixilated output signal. In one embodiment, the movement of the image object over the TDI detector is asynchronous with the movement of the output signal producing an output signal that is a composite of the image of the object at varying focal point along the focal plane. In another embodiment, light from the object is periodically incident on the inclined TDI detector, producing a plurality of spaced apart images and corresponding output signals that propagate across the TDI detector. The inclined plane enables images of FISH probes or other components within an object to be produced at different focal points, so that the 3D spatial relationship between the FISH probes or components can be resolved.

公开(公告)号：US06249341B1

公开(公告)日：2001-06-19

申请号：US09490478

申请日：2000-01-24

Applicant: David A. Basiji ,  William E. Ortyn

Inventor： David A. Basiji ,  William E. Ortyn

IPC: G01J314

CPC classification number: G06K9/00127 ,  G01J3/2803 ,  G01J3/2823 ,  G01N15/147 ,  G01N21/6428 ,  G01N21/6456 ,  G01N21/85 ,  G01N2015/0294 ,  G01N2015/0693 ,  G01N2015/1006 ,  G01N2015/1472 ,  G01N2015/1486 ,  G02B7/28 ,  G02B27/145 ,  G02B27/148

Abstract: Light from an object such as a cell moving through an imaging system is collected and dispersed so that it can be imaged onto a time delay and integration (TDI) detector. The light can be emitted from a luminous object or can be light from a light source that has been scattered by the object or can be a fluorescent emission by one or more FISH probes, frequently used to detect substances within cells. Further, light that is absorbed or reflected by the object can also be used to produce images for determining specific characteristics of the object. The movement of the object matches the rate at which a signal is read from the TDI detector. Multiple objects passing through the imaging system can be imaged, producing both scatter images and spectrally dispersed images at different locations on one or more TDI detectors.

Abstract translation: 来自诸如移动通过成像系统的单元的物体的光被收集和分散，使得其可被成像到时间延迟和积分（TDI）检测器上。 光可以从发光物体发射，或者可以是来自被物体散射的光源的光，或者可以是通常被用于检测细胞内的物质的一种或多种FISH探针的荧光发射。 此外，被物体吸收或反射的光也可以用于产生用于确定物体的特定特征的图像。 对象的移动与从TDI检测器读取信号的速率相匹配。 可以对穿过成像系统的多个物体进行成像，在一个或多个TDI检测器上的不同位置产生散射图像和光谱分散图像。