APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
    3.
    发明申请
    APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES 有权
    用于液体处理形状文章的装置

    公开(公告)号:US20140097580A1

    公开(公告)日:2014-04-10

    申请号:US13648916

    申请日:2012-10-10

    申请人: LAM RESEARCH AG

    IPC分类号: H01L21/687 B23B31/169

    摘要: Apparatus for processing wafer-shaped articles comprises a chuck adapted to hold a wafer-shaped article of a predetermined diameter during a processing operation to be performed on the wafer-shaped article. The chuck comprises a chuck body having an outer surface that faces a wafer-shaped article when positioned on the chuck. The outer surface comprises a first electrically conductive material and the chuck body further comprises a first conductive pathway between the first conductive material and ground.

    摘要翻译: 用于处理晶片状物品的装置包括卡盘,该卡盘适于在晶圆形物品的处理操作期间保持具有预定直径的晶片状物品。 卡盘包括卡盘主体,当夹具位于卡盘上时,其具有面向晶片状物品的外表面。 外表面包括第一导电材料,并且卡盘主体还包括在第一导电材料和地之间的第一导电路径。

    Gear reducing collet nut assembly
    4.
    发明授权
    Gear reducing collet nut assembly 失效
    齿轮减速夹头螺母总成

    公开(公告)号:US06932357B2

    公开(公告)日:2005-08-23

    申请号:US10435441

    申请日:2003-05-09

    摘要: A gear reducing collet nut assembly is provided for holding a tool bit. The assembly includes an outer grip sleeve that can be rotated to actuate a clamping structure with a bore for holding a tool bit. More specifically, the assembly includes a planetary gear system to amplify torque from the grip sleeve to facilitate effective manual operation. The assembly includes a base member that is securable to a shaft of a rotary power tool, and the planetary gears are rotatably mounted at a plurality of positions on the base member. The planetary gears are driven by a central sun gear that is fixed to the grip sleeve. The planetary gears deliver torque to a ring gear that extends peripherally around the planetary gears. Movement of the ring gear is effective to actuate the clamping structure. In an embodiment, an exterior of the ring gear is threaded to the base member and axially fixed relative to the grip sleeve. As a result, rotation of the outer sleeve causes axial translation of the sun gear, which has a tapered surface that acts against the clamping structure to selectively constrain or release a tool from an axial bore in the clamping structure.

    摘要翻译: 提供减速夹头螺母组件用于保持工具头。 该组件包括外部夹紧套筒,该外部夹紧套筒可以旋转以致动具有用于保持工具头的孔的夹持结构。 更具体地,组件包括行星齿轮系统,用于放大来自把手套的扭矩以便于有效的手动操作。 组件包括可固定到旋转动力工具的轴的基座构件,并且行星齿轮可旋转地安装在基座构件上的多个位置。 行星齿轮由固定在手柄套筒上的中央太阳齿轮驱动。 行星齿轮将扭矩传递给在行星齿轮周围延伸的环形齿轮。 齿圈的移动对于致动夹紧结构是有效的。 在一个实施例中,环形齿轮的外部被螺纹连接到基座构件并相对于把手套轴向地固定。 结果,外套筒的旋转导致太阳齿轮的轴向平移,该太阳齿轮具有锥形表面,该锥形表面作用在夹紧结构上,以选择性地约束或释放夹持结构中的轴向孔的工具。

    Chuck
    5.
    发明授权
    Chuck 失效
    查克

    公开(公告)号:US4247124A

    公开(公告)日:1981-01-27

    申请号:US938833

    申请日:1978-09-01

    申请人: Rudolf Wagner

    发明人: Rudolf Wagner

    摘要: A chuck, especially for a device for machining pipes and the like as for instance for threading, deburring, cutting and similar operations, with chucking jaws pivotable about an axis substantially parallel to the axis of the chuck for chucking the workpiece to be machined. The chuck is mounted on a rotatable support, and the chucking jaws are positively connected to the driving motor so that the chucking jaws automatically move into their chucking position in response to the start of the motor.

    摘要翻译: 卡盘,特别是用于加工管道等的装置,例如用于螺纹加工,去毛刺,切割和类似操作,夹具爪可围绕基本上平行于卡盘的轴线的轴线枢转,以夹紧待加工的工件。 卡盘安装在可旋转的支撑件上,并且夹紧钳口与驱动马达正确连接,使得夹紧卡爪响应于马达的起动而自动移动到夹紧位置。

    ROTARY CHUCK FOR A MACHINE TOOL
    8.
    发明申请
    ROTARY CHUCK FOR A MACHINE TOOL 有权
    用于机床的旋转式切割机

    公开(公告)号:US20140097581A1

    公开(公告)日:2014-04-10

    申请号:US13644572

    申请日:2012-10-04

    申请人: Craig Jackson

    发明人: Craig Jackson

    IPC分类号: B23B31/169

    摘要: A rotary chuck includes a housing for rotation about an axis, keyways in the housing which extend radially away from the axis, jaw assemblies slidably received in the keyways and an actuatuing mechanism as well as a speed ring for moving the jaw assemblies along the keyways in accordance with different gear ratios. Each jaw assembly includes an inner jaw keyed to the associated keyway adjacent to the bottom thereof and an outer jaw keyed to the associated keyway near a mouth thereof so that the jaws can slide independently along their respective keyways. Each jaw assembly also has a locking device for locking its jaws together when they are opposite one another to prevent their relative radial movement and means enabling release of the locking device from the outside to permit ready removal of the outer jaw from its keyway.

    摘要翻译: 旋转卡盘包括用于围绕轴线旋转的壳体,壳体中的键槽,其径向延伸远离轴线,卡爪组件可滑动地容纳在键槽中,以及致动机构以及用于沿着键槽移动钳口组件的速度环 根据不同的传动比。 每个钳口组件包括一个内键,该内钳口与相邻的键槽相邻,其相邻于其底部,以及一个外键,该外钳口与其相邻的键槽相接近,使得该钳口能够沿其相应的键槽独立地滑动。 每个钳口组件还具有锁定装置,用于当它们彼此相对的方式将其钳口锁定在一起时,以防止它们相对的径向移动,并且能够使锁定装置从外部释放以允许从其键槽准备移除外钳口。

    Chuck with internal geared tightening mechanism
    9.
    发明授权
    Chuck with internal geared tightening mechanism 失效
    卡盘采用内部齿轮紧固机构

    公开(公告)号:US07722300B1

    公开(公告)日:2010-05-25

    申请号:US11452661

    申请日:2006-06-13

    IPC分类号: B23B31/169

    摘要: An internally geared chuck that can generate sufficient torque to ensure adequate jaw gripping or jaw releasing force regardless of whether it is used in a keyless or key enabled chuck version. The key enabled version encompasses an internally housed, spring retracted chuck key that may be enabled to add additional torque to tighten or loosen the jaws when so required. The key enabled version may be operated with simple hand tightening in a keyless mode. The second embodiment has two levels of keyless operation. By drawing together elements of the chuck, a mechanical gearing advantage may be realized to add additional torque. In both embodiments all of the various sized and configured gears are housed within the chuck body.

    摘要翻译: 内部齿轮卡盘可以产生足够的扭矩,以确保足够的卡爪或卡爪释放力,而不管其是否用于无钥匙或钥匙卡盘版本。 钥匙启用版本包含一个内部容纳的弹簧缩回卡盘钥匙,可以在需要的时候增加额外的扭矩来拧紧或松开钳口。 钥匙启用版本可以在无钥匙模式下以简单的手紧固操作。 第二实施例具有两级无钥匙操作。 通过将卡盘的元件组合在一起,可以实现机械传动优点以增加额外的扭矩。 在两个实施例中,所有各种尺寸和构造的齿轮都被容纳在卡盘体内。

    Manually tightened drill chuck
    10.
    发明授权
    Manually tightened drill chuck 失效
    手动拧紧钻夹头

    公开(公告)号:US07000926B1

    公开(公告)日:2006-02-21

    申请号:US10975479

    申请日:2004-10-29

    申请人: Zhou Wenhua

    发明人: Zhou Wenhua

    IPC分类号: B23B31/169

    摘要: A manually tightened drill chuck includes a drill body, a nut, a front sleeve and a rear sleeve. The front sleeve is provided on the front end of the drill body with the nut being provided in the middle. A decorative sleeve is mounted on the front end of the drill body with an external peripheral surface of the nut being housed in an inner sleeve by shrink fit. At least one key groove is located in the inner wall of the front sleeve. A key cooperates with the key groove. At least one locating member is provided in the lower end of the key that includes a hole. The front sleeve further defines at least one protrusion that corresponds to the position of the hole for snapping into the hole. Accordingly, the stability of the front sleeve and the rear sleeve without radial vibration is achieved.

    摘要翻译: 手动紧固钻夹头包括钻体,螺母,前套筒和后套筒。 前套筒设置在钻头主体的前端,螺母设置在中间。 装饰套筒安装在钻头主体的前端,螺母的外周表面通过收缩配合容纳在内套筒中。 至少一个键槽位于前套筒的内壁中。 钥匙与钥匙槽配合。 至少一个定位构件设置在键的下端包括孔。 前套筒还限定至少一个对应于孔的位置的突起,用于卡入孔中。 因此,实现了前套筒和后套筒的无径向振动的稳定性。