公开(公告)号：US07793541B2

公开(公告)日：2010-09-14

申请号：US11757395

申请日：2007-06-04

Applicant: A. Dorian Challoner

Inventor： A. Dorian Challoner

IPC: G01P9/04 ,  G01P1/02

CPC classification number: G01C19/5684 ,  Y10T74/1275

Abstract: Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. A gyroscope die may be attached to its package substrate on a central disc area that is inboard of its embedded electrodes. This configuration eliminates contact of the die with the package substrate beneath the embedded electrodes allowing the internal electrode support structure to expand or contract freely without stress as its temperature changes. The central attachment can also be used diminish the package temperature gradients on the periphery of the die, if the thermal conductivity of the central disc attachment material is higher than the package substrate. Temperature gradients across the resonator also lead to thermoelastic damping asymmetry and rate drift. In addition, the electrical connections to the die may be formed by vertical vias within the central disc attachment area or by thin wirebonds to peripheral I/O pads on the gyro chip.

Abstract translation: 公开了平面谐振器陀螺仪的包装技术，例如盘式谐振器陀螺仪（DRG）。 陀螺仪芯片可以在其封装衬底上附着在其嵌入电极内侧的中心盘区域上。 这种配置消除了裸片与嵌入电极下面的封装衬底的接触，允许内部电极支撑结构随着其温度变化而自由地膨胀或收缩而不受应力。 如果中心盘附件材料的导热率高于封装衬底，也可以使用中心附件来减小管芯周围的封装温度梯度。 谐振器的温度梯度也导致热弹性阻尼不对称和速率漂移。 此外，与芯片的电连接可以由中心盘附接区域内的垂直通孔形成，也可以通过与陀螺仪芯片上的周边I / O焊盘的薄引线键合而形成。

公开(公告)号：US20090031831A1

公开(公告)日：2009-02-05

申请号：US11888163

申请日：2007-07-31

Applicant: Robert E. Stewart

Inventor： Robert E. Stewart

IPC: G01P3/44 ,  H01L21/98 ,  G01C19/28

CPC classification number: G01C19/5691 ,  G01C25/00 ,  Y10T74/1275

Abstract: One embodiment is a micro hemispheric resonator gyro having: a plurality of pickoff and forcer electrodes; a hemispheric resonator; a guard ring having first and second opposed sides, the guard ring containing the plurality of pickoff and forcer electrodes, and the hemispheric resonator; a top cover operatively coupled to the first side of the guard ring; and a bottom cover operatively coupled to the second side of the guard ring; wherein the plurality of pickoff and forcer electrodes, the hemispheric resonator, the guard ring, the top cover and the bottom cover form a micro hemispheric resonator gyro.

Abstract translation: 一个实施例是一种微半球谐振器陀螺仪，具有：多个拾取和锻造电极; 半球谐振器; 保护环具有第一和第二相对侧，保护环包含多个拾取和锻造电极以及半球谐振器; 顶盖，可操作地联接到防护环的第一侧; 以及底盖，其可操作地联接到所述保护环的第二侧; 其中所述多个拾取和锻造电极，半球谐振器，保护环，顶盖和底盖形成微半球谐振器陀螺仪。

公开(公告)号：US20050193579A1

公开(公告)日：2005-09-08

申请号：US11069882

申请日：2005-02-28

Applicant: Shoichi Kogure

Inventor： Shoichi Kogure

IPC: G01C19/20 ,  G01C19/38

CPC classification number: G01C19/38 ,  Y10T74/1275

Abstract: A gyrocompass has a gyrosphere which incorporates a rotor and floats in a liquid tank filled with an electrolyte, and a plurality of electrodes which are disposed in the gyrosphere and the liquid tank, and are respectively opposed through the electrolyte, wherein at least one circuit which supplies electric power to the rotor involves the electrodes, and the plurality of the electrodes includes a first belt-shaped electrode disposed in an equatorial portion of the gyrosphere, the first belt-shaped electrode is formed of a metal which is corrosion-resistant and is a good conductor, and an insulating film is formed on a portion of a surface of the first belt-shaped electrode.

Abstract translation: 陀螺罗盘具有陀螺仪，其包括转子并漂浮在填充有电解质的液体槽中，并且多个电极设置在陀螺仪和液体槽中，并且分别与电解液相对，其中至少一个电路 向转子供给电力涉及电极，多个电极包括设置在陀螺仪的赤道部的第一带状电极，第一带状电极由耐腐蚀性的金属形成， 良好的导体，并且在第一带状电极的表面的一部分上形成绝缘膜。

公开(公告)号：US20050016270A1

公开(公告)日：2005-01-27

申请号：US10699869

申请日：2003-11-04

Applicant: Yi-Ru Chen ,  Kai-Cheng Chang ,  Guang-Chyeng Fang ,  Ming-Hsiu Hsu ,  Pei-Fang Liang

Inventor： Yi-Ru Chen ,  Kai-Cheng Chang ,  Guang-Chyeng Fang ,  Ming-Hsiu Hsu ,  Pei-Fang Liang

IPC: G01C19/56 ,  G01P9/04

CPC classification number: G01C19/56 ,  Y10T74/1275

Abstract: The invention is to provide a vibratory double-axially sensing micro-gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended outwardly with equal altitude and in radial direction from the supporting hub and, at the outside end of the suspending arm, a platform is formed, and a capacitance sensing electrode or a static-electricity driving electrode is plated respectively at each side of the platform top, below which a static-electricity driving electrode or a capacitance sensing electrode is arranged; take a preferred embodiment of the present invention for example, if the capacitance sensing electrode is arranged at top of the platform and the static-electricity driving electrode is arranged below the platform, then the suspending arm and the platform will vibrate vertically by the attraction of the static-electricity when applying driving voltage, and the vibratory phase difference between two adjacent suspending arms and the platform is 180 degrees; when the gyroscope is rotated horizontally, the suspending arm and the platform will generate horizontal displacement caused by Coriolis force and, by measuring the change of capacitance value, the magnitude of the angular velocity of vibration is obtained; since its structure has symmetrical property, so it has sensing ability in both X or Y axes and, because it has superior stability and is able to resist environment noise and vibration, its sensing capability is enhanced and, since its machining method is simple, so it is adapted for mass production for having lower manufacturing cost.

公开(公告)号：US06845669B2

公开(公告)日：2005-01-25

申请号：US10474839

申请日：2002-05-02

Applicant: Cenk Acar ,  Andrei M. Shkel

Inventor： Cenk Acar ,  Andrei M. Shkel

IPC: B81B3/00 ,  G01C19/56 ,  G01P9/04 ,  G01C19/00

CPC classification number: G01C19/5719 ,  B81B3/0062 ,  Y10T74/1275

Abstract: A micromachined design and method with inherent disturbance-rejection capabilities is based on increasing the degrees-of-freedom (DOF) of the oscillatory system by the use of two independently oscillating proof masses. Utilizing dynamical amplification in the 4-degrees-of-freedom system, inherent disturbance rejection is achieved, providing reduced sensitivity to structural and thermal parameter fluctuations and damping changes over the operating time of the device. In the proposed system, the first mass is forced to oscillate in the drive direction, and the response of the second mass in the orthogonal direction is sensed. The response has two resonant peaks and a flat region between peaks. Operation is in the flat region, where the gain is insensitive to frequency fluctuations. An over 15 times increase in the bandwidth of the system is achieved due to the use of the proposed architecture. In addition, the gain in the operation region has low sensitivity to damping changes. Consequently, by utilizing the disturbance-rejection capability of the dynamical system, improved robustness is achieved, which can relax tight fabrication tolerances and packaging requirements and thus result in reducing production cost of micromachined methods.

Abstract translation: 具有固有干扰抑制能力的微机械加工设计和方法是基于通过使用两个独立振荡的防爆质量来提高振荡系统的自由度（DOF）。 利用4自由度系统的动态放大，可以实现固有的干扰抑制，从而降低对结构和热参数波动的敏感性以及器件工作时间的阻尼变化。 在所提出的系统中，第一质量块被迫在驱动方向上振荡，并且感测到第二质量块在正交方向上的响应。 响应具有两个共振峰和峰之间的平坦区域。 操作在平坦区域，其中增益对频率波动不敏感。 由于使用了所提出的架构，系统的带宽增加了15倍以上。 此外，操作区域的增益对阻尼变化具有低灵敏度。 因此，通过利用动力系统的抗干扰能力，实现了改进的鲁棒性，可以减轻制造公差和包装要求，从而降低微加工方法的生产成本。

公开(公告)号：US06823734B1

公开(公告)日：2004-11-30

申请号：US10423456

申请日：2003-04-25

Applicant: Ken J. Hayworth ,  Kirill V. Shcheglov ,  Todd E. Humphreys ,  A. Dorian Challoner

Inventor： Ken J. Hayworth ,  Kirill V. Shcheglov ,  Todd E. Humphreys ,  A. Dorian Challoner

IPC: G01P904

CPC classification number: B81B3/0062 ,  B81B2201/0242 ,  G01C19/56 ,  Y10T74/1275

Abstract: The present invention discloses an isolated electrostatic biased resonator gyroscope. The gyroscope includes an isolated resonator having a first and a second differential vibration mode, a baseplate supporting the isolated resonator, a plurality of excitation affixed to the baseplate for exciting the first differential vibration mode, a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode and a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate with the bias electrodes disposed on the baseplate below.

Abstract translation: 本发明公开了一种隔离静电偏置谐振器陀螺仪。 陀螺仪包括具有第一和第二差分振动模式的隔离谐振器，支撑隔离谐振器的基板，固定到基板上用于激励第一差分振动模式的多个激励，固定到基板的多个感测电极，用于感测 陀螺仪通过第二差分振动模式的移动和固定到基板上的多个偏置电极，用于微调谐振器的隔离并基本上最小化第一和第二差动振动模式之间的频率分配。 通常，隔离谐振器包括校验块和平衡板，其中偏置电极设置在下面的底板上。

公开(公告)号：US20040007065A1

公开(公告)日：2004-01-15

申请号：US10454587

申请日：2003-06-04

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Katsumi Fujimoto ,  Hironari Yamamoto

IPC: H02N002/00 ,  G01C019/56

CPC classification number: G01C19/5607 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49574 ,  Y10T29/49792 ,  Y10T29/49798 ,  Y10T74/1275

Abstract: A tuning fork vibrator includes a long plate-shaped vibration unit having a first principal surface and a second principal surface, a base disposed at one end of the second principal surface of the vibration unit in the longitudinal direction, and a slit for dividing the vibration unit into two legs defining a tuning fork along the longitudinal direction symmetrically in the width direction of the vibration unit. The slit is formed so as to include a portion of the base in the vicinity to the vibration unit.

公开(公告)号：US5561246A

公开(公告)日：1996-10-01

申请号：US339226

申请日：1994-11-10

Applicant: Ernest Gruber ,  Hendrik Becker

Inventor： Ernest Gruber ,  Hendrik Becker

IPC: G01C19/18 ,  G01C19/28 ,  G01C19/42 ,  G01C19/22

CPC classification number: G01C19/28 ,  G01C19/42 ,  Y10T74/1275

Abstract: A two-axis rate gyro has two articulation elements arranged sequentially. The first articulation element is connected with a drive shaft of the rate gyro and the second articulation element is connected with a gyro rotor. The two articulation elements are connected together by two narrow ribs located laterally with respect to a central bore and perpendicularly or radially with respect to the central axis of the articulation elements. Spring elements are provided in one of the articulation elements which act on pretensioned force-measuring elements and are tensioned with respect to one another. The spring elements deform elastically and symmetrically around the ribs under the influence of a sinusoidally alternating torque, so that the force-measuring elements are loaded and unloaded alternately and generate measurement signals proportional to the forces acting on them.

Abstract translation: 双轴速率陀螺仪具有顺序布置的两个关节元件。 第一铰接元件与速率陀螺仪的​​驱动轴连接，第二铰接元件与陀螺仪转子连接。 两个关节元件通过相对于中心孔横向相对于关节元件的中心轴线垂直或径向地定位的两个窄肋连接在一起。 弹簧元件设置在作用于预张紧力测量元件上并且相对于彼此张紧的一个铰接元件中。 弹簧元件在正弦交替扭矩的影响下，围绕肋弹性和对称地变形，使得力测量元件交替地加载和卸载，并产生与作用在它们上的力成比例的测量信号。

公开(公告)号：US5156056A

公开(公告)日：1992-10-20

申请号：US719513

申请日：1991-06-24

Applicant: Roland Pittman ,  Michael A. Napolitano

Inventor： Roland Pittman ,  Michael A. Napolitano

IPC: G01C19/22

CPC classification number: G01C19/22 ,  Y10T74/1275 ,  Y10T74/1293

Abstract: A gyroscope which comprises a gyroscopic element mounted to a base which is mounted coaxially to a spin motor. Preferably at least one hinge is between the gyroscopic element and the base. There is at least one piezoelectric crystal, preferably a bender element, having a base end, an outer end. A bender element provides an electrical signal as a function of bending. The base end of the crystal can be connected to the base and the crystal extends from the base with the crystal having a major plane transverse to the spin axis. The outer end of the crystal is connected to the gyroscopic element via a crystal restraint having a degree of freedom of movement parallel to the spin axis. Preferably, the crystal restraint is a wire connected on one end to the crystal and on the opposite end to the gyroscopic element. The restraint wire is preferably parallel to the spin axis.

Abstract translation: 一种陀螺仪，其包括安装到与旋转马达同轴安装的基座的陀螺仪元件。 优选地，至少一个铰链在陀螺仪元件和基座之间。 存在至少一个压电晶体，优选弯曲元件，具有基端，外端。 弯曲元件提供作为弯曲的函数的电信号。 晶体的基端可以连接到基底，并且晶体从基底延伸，晶体具有横跨旋转轴的主平面。 晶体的外端通过具有平行于旋转轴的移动自由度的晶体约束件连接到陀螺仪元件。 优选地，晶体约束是在一端连接到晶体并且在陀螺仪元件的相对端上连接的线。 约束线优选地平行于旋转轴线。

公开(公告)号：US4908558A

公开(公告)日：1990-03-13

申请号：US184818

申请日：1988-04-22

Applicant: Robert E. Lordo ,  Lloyd W. McSparran

Inventor： Robert E. Lordo ,  Lloyd W. McSparran

IPC: B64G7/00 ,  G01C25/00 ,  G09B9/12 ,  H02K7/09 ,  H02K41/025

CPC classification number: G01C25/00 ,  B64G7/00 ,  G09B9/12 ,  H02K41/025 ,  H02K7/09 ,  B64G2007/005 ,  G05G2009/04766 ,  H02K2201/18 ,  Y10T74/12 ,  Y10T74/1275

Abstract: A flight motion simulator includes a unit under test supported on a stationary frame for angular and translational movement along pitch, roll, and yaw axes. A rotor element is secured to the unit under test and has a spherical configuration. Magnetic bearings supported by the stationary frame support the rotor element in three degrees of freedom of movement. A drag-cup induction motor is mounted on the frame and connected to the unit under test to generate three degrees of freedom of movement by generating a rotating magnetic flux in a stator assembly to induce a corresponding flow of currents in the rotor element to produce torque and motion in the unit under test in the same direction as the flux movement in the stator assembly.