公开(公告)号：US09441791B2

公开(公告)日：2016-09-13

申请号：US13691125

申请日：2012-11-30

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kenetsu Mizusawa ,  Keiki Ito ,  Masahide Itoh

IPC: F17D1/04 ,  G05D11/13 ,  C23C16/455 ,  C23C16/52 ,  H01L21/67 ,  H01J37/32

CPC classification number: F17D1/04 ,  C23C16/45512 ,  C23C16/45561 ,  C23C16/52 ,  G05D11/132 ,  H01J37/3244 ,  H01J37/32449 ,  H01L21/67069 ,  H01L21/67253 ,  Y10T137/0329 ,  Y10T137/0335 ,  Y10T137/0352 ,  Y10T137/2496 ,  Y10T137/87346

Abstract: A gas supply unit, for supplying a gas into a processing chamber in which a substrate is processed, includes a plurality of gas supply sources, a mixing line for mixing a plurality of gases supplied from the gas supply sources to make a gaseous mixture, a multiplicity of branch lines for branching the gaseous mixture to be supplied to a multiplicity of places in the processing chamber, and an additional gas supply unit for supplying a specified additional gas to a gaseous mixture flowing in at least one branch line. The gas supply unit also includes pressure gauges and valves for adjusting gas flow rates in the branch lines, respectively, and a pressure ratio controller for controlling that gaseous mixtures branched into the branch lines to have a specified pressure ratio by adjusting opening degrees of the valves based on measurement results obtained by using the pressure gauges.

Abstract translation: 用于将气体供给到其中处理基板的处理室中的气体供给单元包括多个气体供给源，用于混合从气体供给源供给的多个气体以形成气体混合物的混合管线， 用于将要供应到处理室中的多个位置的气体混合物进行分支的分支管线的多个，以及用于向在至少一条分支管线中流动的气体混合物供应特定附加气体的附加气体供应单元。 气体供应单元还包括用于分别调节分支管线中的气体流量的压力计和阀，以及压力比控制器，用于通过调节阀的开度来控制分支成分支管路的气体混合物以具有规定的压力比 基于通过使用压力计获得的测量结果。

公开(公告)号：US20160038956A1

公开(公告)日：2016-02-11

申请号：US14419158

申请日：2013-11-18

Applicant: JIANGSU UNIVERSITY

Inventor： Xingye ZHU ,  Junping LIU ,  Shouqi YUAN ,  Hong LI ,  Jianyuan JIANG ,  Xingfa LIU

IPC: B05B7/04 ,  A01G25/00

CPC classification number: B05B7/0425 ,  A01G25/00 ,  B01F5/0498 ,  B01F5/064 ,  B05B3/06 ,  Y10T137/2562 ,  Y10T137/87265 ,  Y10T137/87346

Abstract: The present invention discloses an automatic control element with uniformly-distributed stepping frequency, comprising a sprinkler and a fluidic element connected to the sprinkler, an outlet cover plate being secured onto an outlet of the fluidic element. A water inlet and a first air supply pore are formed symmetrically on the fluidic element, and a second air supply pore is formed on the water inlet. A water distributor is formed on the sprinkler, a water tank is provided on the outer side of the sprinkler, and the water distributor is in communication with an inner cavity of the water tank. A signal nozzle is provided on the wall of the water tank, and the signal nozzle is connected to the water inlet via a conduit.

Abstract translation: 本发明公开了一种具有均匀分布的步进频率的自动控制元件，包括喷洒器和连接到喷洒器的流体元件，出口盖板固定在流体元件的出口上。 在流体元件上对称地形成进水口和第一供气孔，并且在进水口上形成第二供气孔。 在喷洒器上形成水分配器，在喷洒器的外侧设置有水箱，水分配器与水箱的内腔连通。 信号喷嘴设置在水箱的壁上，信号喷嘴通过导管连接到进水口。

公开(公告)号：US07584957B2

公开(公告)日：2009-09-08

申请号：US11344806

申请日：2006-02-01

Applicant: Holger Edinger

Inventor： Holger Edinger

IPC: B65H29/32

CPC classification number: B65H7/16 ,  B65H3/08 ,  B65H3/48 ,  B65H5/22 ,  B65H2406/00 ,  B65H2406/412 ,  B65H2406/42 ,  B65H2801/21 ,  Y10T137/87346

Abstract: A device for controlling blast and/or suction air in a sheet processing machine, especially a printing press, includes a rotary valve for making ready different positive and negative pressure levels during a work cycle. The rotary valve is connected as a bypass parallel to a supply line between a consumer or load and a positive and negative pressure source. The rotary valve is connected at an input side thereof with the ambient air.

Abstract translation: 用于在片材加工机械，特别是印刷机中控制鼓风和/或吸入空气的装置包括一个旋转阀，用于在工作循环期间使准备不同的正压和负压水平。 旋转阀作为旁路连接到消费者或负载与正负压源之间的供应管线。 旋转阀在其输入侧与环境空气连接。

公开(公告)号：US20090056812A1

公开(公告)日：2009-03-05

申请号：US11895805

申请日：2007-08-27

Applicant: Angelo L. Mazzei

Inventor： Angelo L. Mazzei

IPC: B01F5/20

CPC classification number: B01F3/04503 ,  B01F5/0256 ,  B01F5/0413 ,  B01F5/0428 ,  B01F5/0475 ,  B01F5/0478 ,  B01F5/0498 ,  B01F2003/04886 ,  B01F2215/0052 ,  Y10T137/0329 ,  Y10T137/0352 ,  Y10T137/87281 ,  Y10T137/87346 ,  Y10T137/8737 ,  Y10T137/87603 ,  Y10T137/87652

Abstract: Process and equipment for rapid and reliable infusion of treatment substances into a liquid mainstream. The equipment includes diversion of some of the liquid, boosting its pressure into an aspirating injector, which adds treatment substance and in turn discharges to a pair of opposed nozzles that inject the diversion stream with treatment substances back into the mainstream flow.

Abstract translation: 快速可靠地将处理物质输入液体主流的工艺和设备。 该设备包括一些液体的转移，将其压力增加到吸气注射器中，其增加了处理物质，并且进而排放到一对相对的喷嘴，其将处理物质注入到主流流中。

公开(公告)号：US07487795B2

公开(公告)日：2009-02-10

申请号：US11133044

申请日：2005-05-19

Applicant: William F. Sand

Inventor： William F. Sand

IPC: G05D11/03

CPC classification number: B01F3/0861 ,  B01F5/0421 ,  B01F5/043 ,  B01F2003/0896 ,  Y10T137/87346 ,  Y10T137/87595 ,  Y10T137/87603

Abstract: An improved chemical dispenser includes a plurality of eductors for drawing chemical into a diluent to produce an effluent, each eductor of the plurality selectively discharging via a baffle tube into a single common discharge tube. The effluent flow parameters are insufficient to cause effluent from a selected eductor to flow into a chemical source coupled to a non-selected eductor, and are insufficient to draw chemical from a non-selected eductor into the effluent from a selected eductor.

Abstract translation: 改进的化学分配器包括用于将化学品吸入稀释剂以产生流出物的多个喷射器，每个喷射器通过挡板管选择性地排放到单个公共放电管中。 流出物流量参数不足以导致来自选定喷射器的流出物流入与未选择的喷射器相连的化学源，并且不足以将化学品从未选择的喷射器吸入来自所选喷射器的流出物中。

公开(公告)号：US20080283134A1

公开(公告)日：2008-11-20

申请号：US11814423

申请日：2006-07-18

Applicant: Geoff C. Gerhardt ,  Christopher C. Charlton

Inventor： Geoff C. Gerhardt ,  Christopher C. Charlton

IPC: F04B49/00

CPC classification number: G01N30/34 ,  Y10T137/7737 ,  Y10T137/8597 ,  Y10T137/85986 ,  Y10T137/87346 ,  Y10T137/87539 ,  G01N30/6095

Abstract: A fluid controller apparatus controls fluid flow, such as a solvent gradient flow, in a chromatography system. An apparatus includes a fluid-gradient controller having a fluid reservoir for containing a pump fluid and a pumping device connected to the fluid reservoir for receiving the pump fluid. The pumping device is in fluid communication with parallel-configured first and second solvent lines. The first and second solvent lines each contain a restrictor element and a solvent reservoir. During operation, the pumping device causes the pump fluid to flow through the first and second solvent lines in relation to their respective restriction devices. The pump fluid displaces solvent within the solvent reservoirs. The displaced solvent is mixed to form a solvent gradient.

Abstract translation: 流体控制器装置在色谱系统中控制流体流，例如溶剂梯度流。 一种装置包括具有用于容纳泵流体的流体储存器和连接到用于接收泵流体的流体储存器的泵送装置的流体梯度控制器。 泵送装置与平行配置的第一和第二溶剂管线流体连通。 第一和第二溶剂管线各自包含限流元件和溶剂储存器。 在操作期间，泵送装置使泵流体相对于它们各自的限制装置流过第一和第二溶剂管线。 泵流体置换溶剂容器内的溶剂。 将置换的溶剂混合以形成溶剂梯度。

公开(公告)号：US20060260704A1

公开(公告)日：2006-11-23

申请号：US11133044

申请日：2005-05-19

Applicant: William Sand

Inventor： William Sand

IPC: F04F5/10

CPC classification number: B01F3/0861 ,  B01F5/0421 ,  B01F5/043 ,  B01F2003/0896 ,  Y10T137/87346 ,  Y10T137/87595 ,  Y10T137/87603

Abstract: An improved chemical dispenser includes a plurality of eductors for drawing chemical into a diluent to produce an effluent, each eductor of the plurality selectively discharging via a baffle tube into a single common discharge tube. The effluent flow parameters are insufficient to cause effluent from a selected eductor to flow into a chemical source coupled to a non-selected eductor, and are insufficient to draw chemical from a non-selected eductor into the effluent from a selected eductor.

公开(公告)号：US07125003B1

公开(公告)日：2006-10-24

申请号：US10785231

申请日：2004-02-25

Applicant: Kemp E Falkner

Inventor： Kemp E Falkner

IPC: B01F3/04

CPC classification number: B01F5/0413 ,  Y10S261/75 ,  Y10T137/87346

Abstract: A reagent injector and/or aerator for aqueous fluids can use a variety of different removable end caps to adapt a venturi to different types of water treatment systems. The invention is adjustable because the end caps can be removed and springs that activate poppet valves can be changed to accommodate changes in the pressure or flow requirements of the system in which it is used. In addition to, or instead of, atmospheric air, reagent chemical solutions or gasses can be entrained into a flowing water stream by the venturi.

Abstract translation: 用于含水流体的试剂注射器和/或曝气器可以使用各种不同的可移除端盖来使文丘里管适应不同类型的水处理系统。 本发明是可调节的，因为可以去除端盖，并且可以改变激活提升阀的弹簧以适应其使用的系统的压力或流量要求的变化。 除了或代替大气之外，试剂化学溶液或气体可以被文丘里管夹带在流动的水流中。

公开(公告)号：US20050172476A1

公开(公告)日：2005-08-11

申请号：US11024228

申请日：2004-12-28

Applicant: Howard Stone ,  Shelley Anna ,  Nathalie Bontoux ,  Darren Link ,  David Weitz ,  Irina Gitlin ,  Eugenia Kumacheva ,  Piotr Garstecki ,  Willow Diluzio ,  George Whitesides

Inventor： Howard Stone ,  Shelley Anna ,  Nathalie Bontoux ,  Darren Link ,  David Weitz ,  Irina Gitlin ,  Eugenia Kumacheva ,  Piotr Garstecki ,  Willow Diluzio ,  George Whitesides

IPC: B01F3/08 ,  B01F5/06 ,  B01F13/00 ,  B01L3/00 ,  B05B7/04 ,  B01D61/42

CPC classification number: B01L3/5027 ,  B01F3/0807 ,  B01F5/0682 ,  B01F5/0688 ,  B01F13/0062 ,  B01F2215/0431 ,  B01F2215/045 ,  B05B7/0408 ,  B05B7/0416 ,  B05B7/0441 ,  Y10S516/924 ,  Y10S516/927 ,  Y10T29/49002 ,  Y10T137/0324 ,  Y10T137/0329 ,  Y10T137/206 ,  Y10T137/87346 ,  Y10T436/2575

Abstract: A microfluidic method and device for focusing and/or forming discontinuous sections of similar or dissimilar size in a fluid is provided. The device can be fabricated simply from readily-available, inexpensive material using simple techniques.

Abstract translation: 提供了用于在流体中聚焦和/或形成类似或不同尺寸的不连续部分的微流体方法和装置。 该装置可以简单地使用简单的技术从容易获得的廉价材料制造。

公开(公告)号：US20040216785A1

公开(公告)日：2004-11-04

申请号：US10474733

申请日：2003-10-14

Inventor： Michael Joseph Bowe ,  John William Stairmand

IPC: F17D001/00

CPC classification number: F16K1/443 ,  Y10T137/2115 ,  Y10T137/87346

Abstract: A valve assembly (10) comprises a vortex chamber (14) with an axial outlet port (20), a main inlet port (16) for a fluid to be controlled, and a substantially tangential inlet port (25); the fluid enters through an inlet chamber (13) in which is a mechanical valve (26) movable so as to obstruct fluid flow into the vortex chamber (14). A duct (24) links the inlet chamber (13) to the tangential inlet port (25) of the vortex chamber. The position of the mechanical valve (26) affects the flow of fluid through the duct (24), so the vortex chamber (14) amplifies the effect of the mechanical valve. Further movement of the valve (26) closes off flow altogether (40). The assembly may include a weir (36) in the outlet, to separate gas and liquid phases.

Abstract translation: 阀组件（10）包括具有轴向出口（20），用于待控制流体的主入口（16）和基本切向的入口（25）的涡流室（14）。 流体通过入口室（13）进入，其中机械阀（26）可移动以阻止流体流入涡流室（14）。 管道（24）将入口室（13）连接到涡流室的切向入口（25）。 机械阀（26）的位置影响通过管道（24）的流体的流动，因此涡流室（14）放大机械阀的作用。 阀（26）的进一步运动完全关闭流（40）。 组件可以包括出口中的堰（36），以分离气相和液相。