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    TUNABLE Q RESONATOR
    2.
    发明申请
    TUNABLE Q RESONATOR 审中-公开
    TUNABLE Q谐振器

    公开(公告)号：US20160268999A1

    公开(公告)日：2016-09-15

    申请号：US15073383

    申请日：2016-03-17

    申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

    发明人： Clark T.-C. Nguyen ,  Robert A. Schneider

    IPC分类号： H03H9/54 ,  H03H9/17

    CPC分类号： H03H9/467 ,  H03H9/02259 ,  H03H9/02409 ,  H03H9/02425 ,  H03H9/17 ,  H03H9/2436 ,  H03H9/505 ,  H03H9/54 ,  H03H9/58 ,  H03H2009/02503

    摘要： A tunable Q resonator using a capacitive-piezoelectric transducer provides a flexible top electrode above an AlN resonator. The top electrode can be pulled electrostatically towards the resonator and substrate, forming a frictional contact with either the resonator or the combined resonator-electrode structure to the substrate, allowing for electrical tuning the Q of the resonator. With a sufficient electrostatic bias voltage Vb, the resonator may be completely turned OFF, allowing for an integrated switchable AlN resonator. Such switchable resonator may be integrated into a radio frequency (RF) front end as a digitally selectable band pass filter element, obviating the need for ancillary micromechanical switches in the signal path. The device has been demonstrated with a Q approaching 9,000, together with ON/OFF switchability and electromechanical coupling up to 0.63%. Flexible positioning of the top electrode allows for actively controlling the series resonant frequency of the resonator through changes in capacitive coupling.

    摘要翻译： 使用电容 - 压电换能器的可调Q谐振器在AlN谐振器之上提供柔性顶电极。 顶部电极可以静电拉向谐振器和基板，与谐振器或组合的谐振器 - 电极结构与基板形成摩擦接触，允许对谐振器的Q进行电调谐。 具有足够的静电偏置电压Vb，谐振器可以完全关断，从而允许集成的可切换的AlN谐振器。 这种可切换谐振器可以作为数字可选带通滤波器元件集成到射频（RF）前端，从而避免了对信号路径中的辅助微机械开关的需要。 该器件已经展示了Q接近9,000，以及ON / OFF可切换性和机电耦合高达0.63％。 顶部电极的灵活定位允许通过电容耦合的变化主动地控制谐振器的串联谐振频率。

    Filter for electric signals
    3.
    发明申请
    Filter for electric signals 失效
    过滤电信号

    公开(公告)号：US20010022546A1

    公开(公告)日：2001-09-20

    申请号：US09805830

    申请日：2001-03-14

    发明人： Wilhelm Frey ,  Karsten Funk

    IPC分类号： H03H009/48

    CPC分类号： H03H9/02425 ,  H03H9/462 ,  H03H2009/02456 ,  H03H2009/02511

    摘要： A filter for electric signals has a substrate, a vibrating body capable of vibrating with at least two antipodes deflected in phase opposition relative to the substrate and has electrodes connected to a signal input and a signal output for electric excitation and for detection of the vibration of the vibrating body. The electrodes for detecting the vibration, each assigned to antipodes deflected in phase opposition, are connected to two separate terminals of the signal output.

    摘要翻译： 用于电信号的滤波器具有基板，振动体，其能够相对于基板相对于偏转的至少两个对映体振动，并且具有连接到信号输入端的电极和用于电激励的信号输出和用于检测振动的信号 振动体。 用于检测振动的电极分别连接到信号输出的两个独立的端子上，每个分配给相位相反偏转的对映体。

    Tunable Q resonator
    6.
    发明授权
    Tunable Q resonator 有权

    公开(公告)号：US10050602B2

    公开(公告)日：2018-08-14

    申请号：US15073383

    申请日：2016-03-17

    申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

    发明人： Clark T.-C. Nguyen ,  Robert A. Schneider

    IPC分类号： H03H9/15 ,  H03H9/24 ,  H03H9/46 ,  H03H9/54 ,  H03H9/02 ,  H03H9/17 ,  H03H9/50 ,  H03H9/58

    CPC分类号： H03H9/467 ,  H03H9/02259 ,  H03H9/02409 ,  H03H9/02425 ,  H03H9/17 ,  H03H9/2436 ,  H03H9/505 ,  H03H9/54 ,  H03H9/58 ,  H03H2009/02503

    摘要： A tunable Q resonator using a capacitive-piezoelectric transducer provides a flexible top electrode above an AlN resonator. The top electrode can be pulled electrostatically towards the resonator and substrate, forming a frictional contact with either the resonator or the combined resonator-electrode structure to the substrate, allowing for electrical tuning the Q of the resonator. With a sufficient electrostatic bias voltage Vb, the resonator may be completely turned OFF, allowing for an integrated switchable AlN resonator. Such switchable resonator may be integrated into a radio frequency (RF) front end as a digitally selectable band pass filter element, obviating the need for ancillary micromechanical switches in the signal path. The device has been demonstrated with a Q approaching 9,000, together with ON/OFF switchability and electromechanical coupling up to 0.63%. Flexible positioning of the top electrode allows for actively controlling the series resonant frequency of the resonator through changes in capacitive coupling.

    Filter for electric signals
    7.
    发明授权
    Filter for electric signals 失效
    过滤电信号

    公开(公告)号：US06489864B2

    公开(公告)日：2002-12-03

    申请号：US09805830

    申请日：2001-03-14

    申请人： Wilhelm Frey ,  Karsten Funk

    发明人： Wilhelm Frey ,  Karsten Funk

    IPC分类号： H03H948

    CPC分类号： H03H9/02425 ,  H03H9/462 ,  H03H2009/02456 ,  H03H2009/02511

    摘要： A filter for electric signals has a substrate, a vibrating body capable of vibrating with at least two antipodes deflected in phase opposition relative to the substrate and has electrodes connected to a signal input and a signal output for electric excitation and for detection of the vibration of the vibrating body. The electrodes for detecting the vibration, each assigned to antipodes deflected in phase opposition, are connected to two separate terminals of the signal output.

    摘要翻译： 用于电信号的滤波器具有基板，振动体，其能够相对于基板相对于偏转的至少两个对映体振动，并且具有连接到信号输入端的电极和用于电激励的信号输出和用于检测振动的信号 振动体。 用于检测振动的电极分别连接到信号输出的两个独立的端子上，每个分配给相位相反偏转的对映体。

    Capacitance based tunable micromechanical resonators
    8.
    发明授权
    Capacitance based tunable micromechanical resonators 失效
    基于电容的可调谐微机械谐振器

    公开(公告)号：US5640133A

    公开(公告)日：1997-06-17

    申请号：US494024

    申请日：1995-06-23

    申请人： Noel C. MacDonald ,  Fred M. Bertsch ,  Kevin A. Shaw ,  Scott G. Adams

    发明人： Noel C. MacDonald ,  Fred M. Bertsch ,  Kevin A. Shaw ,  Scott G. Adams

    IPC分类号： H03H9/125 ,  H02N1/00 ,  H03H9/02 ,  H03H9/205 ,  H03H9/24 ,  H03H9/46

    CPC分类号： H03H9/02425 ,  H02N1/008 ,  H03H9/02417 ,  H03H9/46 ,  H03H2009/02496

    摘要： A tunable electromicromechanical resonator structure incorporates an electrostatic actuator which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base on substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure.

    摘要翻译： 可调电动机械谐振器结构包括静电致动器，其允许减小或增强结构的谐振频率。 致动器由两组相对的电极指组成，每组具有多个间隔开的平行指状物。 一组安装在谐振器结构的可移动部分上，一组安装在基板上的相邻的固定基座上，指状物处于相对关系，并且其相邻端部间隔开间隙。 两组电极之间的可调偏压调节可移动结构的谐振频率。