公开(公告)号：US09658526B2

公开(公告)日：2017-05-23

申请号：US14754902

申请日：2015-06-30

申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

发明人： Kuan-Wen Lin ,  Sheng-Chi Chin ,  Ting-Hao Hsu ,  Tzu-Ting Chou ,  Shu-Hsien Wu

IPC分类号： G03F1/62 ,  G03F1/64 ,  G03B27/62

CPC分类号： G03F1/64 ,  G03B27/62 ,  G03B27/6242 ,  G03B27/625 ,  G03F1/62

摘要： A pellicle mask assembly includes a mask, a pellicle frame, and a pellicle membrane. The pellicle frame has a bottom side attached to the mask, and a top side covered by the pellicle membrane. The pellicle frame includes a coating on its inner surface and the coating is configured to monitor a change of environment inside the pellicle mask assembly. In embodiments, the change of environment includes increased humidity and/or increased chemical ion density inside the pellicle mask assembly. Methods of making and using the pellicle mask assembly are also disclosed.

公开(公告)号：US20110235016A1

公开(公告)日：2011-09-29

申请号：US13052624

申请日：2011-03-21

申请人： Toru SHIRASAKI

发明人： Toru SHIRASAKI

IPC分类号： G03B27/62

CPC分类号： G03B27/6242

摘要： A pellicle is provided that includes a pellicle film, a pellicle frame having the pellicle film stretched over one end face thereof and having the other end face open, and a pressure-sensitive adhesion layer for adhering the pellicle frame to a mask, the pressure-sensitive adhesion layer being provided on an inner peripheral face of the pellicle frame, and the pressure-sensitive adhesion layer being capable of adhering to a side face of a mask having a mask image on a front face. There are also provided a method of mounting a pellicle that includes fixing to a side face of a mask an inner peripheral face of a pellicle frame of a pellicle that includes a pellicle film and a pellicle frame having the pellicle film stretched over one end face thereof and having the other end face open, a method of mounting a pellicle that includes adhering the pellicle to a side face of the mask that is inclined in going from the reverse face of the mask toward the front face where the mask image is provided, thus adhering the side face of the mask to the pellicle frame inner peripheral face, a pellicle-equipped mask that includes the pellicle adhered to a mask, and a mask that includes a side face that is inclined in going toward the front face where a mask image is provided.

摘要翻译： 提供防护薄膜组件，其包括防护薄膜，防护薄膜组件框架，其防护薄膜在其一个端面上延伸并且另一端面打开;以及压敏粘合层，用于将防护薄膜组件框架粘附到面罩上， 敏感性粘合层设置在防护薄膜组件框架的内周面上，并且压敏粘合层能够粘附到具有掩模图像的掩模的侧面上。 还提供了一种安装防护薄膜组件的方法，该防护薄膜组件包括将防护薄膜组件的防护薄膜组件的防护薄膜组件框架的内周面固定到掩模的侧面，所述防护薄膜组件包括防护薄膜和防护薄膜组件，所述防护薄膜组件具有在其一个端面上延伸的防护薄膜组件 并且另一端面打开的方法，一种安装防护薄膜的方法，该防护薄膜组件包括将防护薄膜组件粘附到掩模的从面罩的背面倾斜的侧面朝向设置掩模图像的前表面的侧面，因此 将掩模的侧面粘附到防护膜框架内周面，具有附着在掩模上的防护薄膜组件的防护薄膜组件掩模和包括朝向前表面倾斜的侧面的掩模，掩模图像 被提供。

公开(公告)号：US5973769A

公开(公告)日：1999-10-26

申请号：US31147

申请日：1998-02-26

申请人： Asai Reiko

发明人： Asai Reiko

IPC分类号： G03B27/62 ,  G03G15/00 ,  G03B27/52

CPC分类号： G03G15/605 ,  G03B27/6242

摘要： An unfolded book, placed upon a copy machine, can have its two exposed pages reproduced without a shadow between the two pages using this invention. A bar formed in the shape of a "T" is placed, with the "T" upside down, and with the shaft of the "T" resting along the crease of the book between the two pages. Slidable stop plates at each end of the bar can be used to snuggle the book with the bar. Variations in the shape of the arms of the "T" and in the shape of the terminations of the arms are presented.

摘要翻译： 放置在复印机上的展开的书籍可以使用本发明在其两页之间使用两张曝光的页面进行再现，而不会在两页之间产生阴影。 以“T”的形状形成的条放置在“T”上下颠倒的位置，“T”的轴沿两页之间的书的折痕放置。 酒吧两端的可滑动止挡板可以用来与酒吧偎依书。 提出了“T”的臂的形状和臂的终端形状的变化。

公开(公告)号：US5729330A

公开(公告)日：1998-03-17

申请号：US589004

申请日：1996-01-19

申请人： Kouji Nishi ,  Mitsuhiko Itojima

发明人： Kouji Nishi ,  Mitsuhiko Itojima

IPC分类号： G03B27/58 ,  G03B27/32 ,  G03B27/62

CPC分类号： G03B27/6242

摘要： A magnet is provided on either a negative film mask or a negative film mask table of a negative film mask apparatus, and a magnetic material is provided on the other of these. When the negative film mask in which a negative film has been loaded is placed on the negative film mask table, the negative film mask is held in place by a magnetic force. The negative film mask apparatus is provided with a stopper. The stopper is adapted to press a closely-contacting member against a sliding surface of the negative film mask table when necessary, thereby preventing the negative film mask from sliding. The closely-contacting member is made of a material such as rubber so that it can closely contact a sliding surface of the negative film mask table. Further, a magnetic member is included in the stopper. The stopper generates a large frictional force utilizing pressing force and magnetic force. Therefore, the negative film mask can be stably held in place in a state in which the negative film mask and the negative film mask table are inclined. Also, the large frictional force makes it possible to stably hold the negative film mask in place against a magnetic force which acts on the negative film mask in a horizontal direction.

摘要翻译： 在负片掩模装置的负片掩模或负片掩模台上设置磁体，并且在另一个上提供磁性材料。 当将负片上的负片掩模放置在负片掩模台上时，通过磁力将负片掩模保持就位。 负片掩模装置设置有止动件。 必要时，止动件适于将紧密接触的构件压靠在负片掩模台的滑动面上，从而防止负片掩模滑动。 紧密接触的构件由诸如橡胶的材料制成，使得其可以紧密接触负片掩模台的滑动表面。 此外，止动件中包括磁性部件。 塞子利用按压力和磁力产生大的摩擦力。 因此，负片掩模可以在负片掩模和负片掩模台倾斜的状态下稳定地保持就位。 此外，大的摩擦力使得能够将负片掩模稳定地保持在与水平方向作用在负片掩模上的磁力相反的位置上。

公开(公告)号：US4897689A

公开(公告)日：1990-01-30

申请号：US642884

申请日：1984-08-21

申请人： Francis J. De Keyzer ,  Jean P. Moelants

发明人： Francis J. De Keyzer ,  Jean P. Moelants

IPC分类号： G03F9/00 ,  G03B27/18 ,  G03B27/58 ,  G03B27/62

CPC分类号： G03B27/6242 ,  G03B27/582

摘要： A photographic exposure apparatus comprising a support serving as a carrier for sheet material which is an original, or a photographic material, or is an original together with a photographic matrial; and a translucent positioning sheet for covering at least partially said support and which is adapted to engage a corner of said sheet material, characterized in that said translucent positioning sheet is provided with a pair of locating means spaced apart from each other so as to engage two neighbouring corners of said sheet material, whereby said sheet material may be located in a predetermined position, the said positioning sheet being attached to the said support.

摘要翻译： 一种照相曝光装置，其特征在于，包括作为原稿或照相材料的片材的载体的支撑体，或与摄影材料一起为原件的照相曝光装置; 以及半透明定位片，用于至少部分地覆盖所述支撑件并且适于接合所述片材的角部，其特征在于，所述半透明定位片设置有彼此间隔开的一对定位装置，以便接合两个 所述片材的相邻角部，由此所述片材可以位于预定位置，所述定位片附接到所述支撑件。

公开(公告)号：US4234251A

公开(公告)日：1980-11-18

申请号：US24975

申请日：1979-03-29

申请人： Fumihiko Nishida ,  Hiroshi Ijiri

发明人： Fumihiko Nishida ,  Hiroshi Ijiri

IPC分类号： G03B27/32 ,  G03B27/62 ,  G03F7/22 ,  G03B27/58

CPC分类号： G03B27/6242

摘要： An automatic masking device for use in a composer, wherein an original picture is held against a transparent plate, which comprises a plurality of opaque maskingsheets which are adapted to move inwards along the surface of the transparent plate from its edges, driven by drive means which is controlled by detectors which are mounted on the inside edges of at least some of the masking sheets.

摘要翻译： 一种在作曲家中使用的自动掩蔽装置，其中原始图像被保持抵靠透明板，该透明板包括多个不透明掩模板，其适于沿着透明板的表面从其边缘向内移动，由驱动装置驱动 由安装在至少一些遮蔽片的内边缘上的检测器控制。

公开(公告)号：US3669536A

公开(公告)日：1972-06-13

申请号：US3669536D

申请日：1970-12-18

申请人： SCOTT KENNETH N

发明人： SCOTT KENNETH N

IPC分类号： G03B27/62

CPC分类号： G03B27/6242

摘要： A MACHINE FOR COPYING DATA TO BE INCORPORATED IN TAX STATEMENTS, OR THE LIKE. THE DATA IS THE FORM OF INFORMATION CARRIED ON SETS F STRIPS SLIDABLY-MOUNTED ON A SUPPORTING FEEDER PLATE. THE MACHINE HAS A SEAT TO RECEIVE THE LOADED FEEDER PLATE. THE SEAT IS ALIGNED WITH A FIXED-POSITIONING PLATE LOCATED OVER THE EXPOSURE AREA OF A PHOTO-COPYING MACHINE. ANOTHER SEAT ON THE OPPOSITE SIDE OF THE POSITIONING PLATE CONTAINS A REMOVABLE ALIGNED RECEIVING PLATE ON WHICH THE STRIPS ARE SLIDABLY-RECEIVED AFTER THEY HAVE BEEN COPIED. THE STRIPS HAVE END LUGS ENGAGEABLE BY ELECRICALLY-CONTROLLED DRIVE PAWLS CARRIED ON CARRIAGES CONNECTED TO SETS OF ENDLESS SPROKET CHAINS MOUNTED ON THE CHASSIS OF THE MACHINE. THE STRIPS HAVE END MARKERS SENSED BY PHOTOELECTRIC SENSING ELEMENTS MOUNTED ON THE CARRIAGES CONNECTED TO ONE SET OF ENDLESS SPROCKET CHAINS. A PROGRAMMING ELECTRICAL CIRCUIT OPERATES THE SPROCKET CHAIN MOTORS AND DRIVE ELEMENTS TO SEQUENTIALLY MOVE SETS OF RELATED SRIPS TO SPECIFIC COPYING POSITIONS ON THE POSITIONING PLATE, AND THENCE TO THE RECEIVING PLATE. LIMIT SWITCHES CONTROL THE CYCLE OF OPERATIONS SO THAT THE MACHINE STOPS WHEN ALL THE INFORMATION STRIPS HAVE BEEN COPIED AND DELIVERED TO THE RECEIVING PLATE.

公开(公告)号：US3470797A

公开(公告)日：1969-10-07

申请号：US3470797D

申请日：1966-08-25

申请人： XEROX CORP

发明人： SHACKMAN JACOB D

IPC分类号： G03B27/62 ,  G03G15/00 ,  G03B17/24

CPC分类号： G03G15/605 ,  G03B27/6207 ,  G03B27/6242

公开(公告)号：US20070231709A1

公开(公告)日：2007-10-04

申请号：US11391682

申请日：2006-03-29

申请人： Uwe Mickan ,  Antonius Johannes Dijsseldonk

发明人： Uwe Mickan ,  Antonius Johannes Dijsseldonk

IPC分类号： G03B27/42 ,  G03F1/00

CPC分类号： G03B27/6242 ,  G03B27/42 ,  G03F1/70 ,  G03F7/70433 ,  G03F7/70941

摘要： A mask for a lithographic apparatus is disclosed, the mask having a patterned region bearing a pattern to be transferred onto a substrate and a border surrounding the patterned region, wherein at least part of the border has a plurality of elements, the dimensions of the elements being such that, during use, they would not be resolved at the substrate. Also, a lithographic apparatus is disclosed, the apparatus having a projection system, a substrate table arranged to hold a substrate, and a patterning device having a patterned region which bears a pattern to be transferred using a radiation beam via the projection system onto the substrate, at least part of a border surrounding the patterned region comprising a plurality of elements arranged to direct radiation onto the substrate, the dimensions of the elements such that, during use, they are not resolved at the substrate.

摘要翻译： 公开了一种用于光刻设备的掩模，该掩模具有带有要转印到基底上的图案的图案化区域和围绕图案化区域的边界，其中边界的至少一部分具有多个元件，元件的尺寸 使其在使用过程中不会在底物上被解决。 此外，公开了一种光刻设备，该设备具有投影系统，布置成保持基板的基板台，以及具有图案化区域的图案形成装置，该图案化区域具有通过投影系统使用辐射束传输的图案到基板上 围绕所述图案化区域的边界的至少一部分包括被布置成将辐射引导到所述基板上的多个元件，所述元件的尺寸使得在使用期间它们在所述基板处未分辨。

公开(公告)号：US4975735A

公开(公告)日：1990-12-04

申请号：US462507

申请日：1990-01-08

申请人： James E. Bright ,  Heather T. Bouchier

发明人： James E. Bright ,  Heather T. Bouchier

IPC分类号： G03B27/62

CPC分类号： G03B27/6242

摘要： The feeding of documents through optical equipment (such as OCR scanners, microfilming equipment, etc.) is facilitated by providing pocketed document carriers. Each document carrier has a transparent plastic film first part and a white paper second part, with adhesive along some of the edges between the parts defining a pocket, with at least one of the edges open to allow the insertion of one or more documents into the pockets. The carriers, containing the documents, are intermixed in a desired sequence with documents that are full size (e.g., having a size substantially the same as the document carriers) for automatic or hand feeding through the optical equipment. A number of different pocket configurations may be provided, including a duplex construction.

摘要翻译： 通过提供口袋文件载体，便利通过光学设备（如OCR扫描仪，缩微胶片设备等）馈送文件。 每个文件载体具有透明塑料膜第一部分和白纸第二部分，其中粘合剂沿着限定袋的部分之间的一些边缘，其中至少一个边缘打开以允许将一个或多个文件插入到 口袋 包含文件的载体以期望的顺序与具有全尺寸（例如，具有与文档载体大致相同的尺寸）的文档混合，用于通过光学设备的自动或手动馈送。 可以提供多种不同的口袋结构，包括双面结构。