公开(公告)号：US4546444A

公开(公告)日：1985-10-08

申请号：US475505

申请日：1983-03-15

申请人： David C. Bullis

发明人： David C. Bullis

IPC分类号： G01N21/89 ,  G06F5/16

CPC分类号： G06F5/16 ,  G01N21/89 ,  G01N2021/8912

摘要： A data compression interface is characterized by a memory system having an architecture configured from a first and a second serial memory connected in parallel. One memory serves during alternate frames as a data collection memory while the other serves during that same frame as an output memory.

摘要翻译： 数据压缩接口的特征在于具有由并联连接的第一和第二串行存储器配置的架构的存储器系统。 一个存储器在替代帧期间用作数据采集存储器，而另一个存储器在作为输出存储器的同一帧期间提供。

公开(公告)号：US20150285745A1

公开(公告)日：2015-10-08

申请号：US14246953

申请日：2014-04-07

申请人： HSEB Dresden GmbH

发明人： Bernd Srocka

IPC分类号： G01N21/88 ,  G01N21/95

CPC分类号： G01N21/8851 ,  G01N21/8901 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8912 ,  G01N2201/062 ,  G01N2201/12

摘要： A method for inspecting wafers or other flat objects having an object surface, comprises the steps of providing a camera assembly with a camera for recording images of said object surface or portions of said object surface during an exposure time which is limited by a shutter; generating a continuous relative movement of said camera assembly and said object without interruption, whereby a movement blur of said image during said exposure time is caused; continuously illuminating said object with an illuminance which is controlled to remain at the same value; and recording one or more images of at least one of said portions of said object surface with said camera; defining a movement blur which is acceptable for an analysis of said image wherein said exposure time is smaller than a time causing said acceptable movement blur; and performing said analysis of said image.

摘要翻译： 一种用于检查具有物体表面的晶片或其他扁平物体的方法，包括以下步骤：在由快门限制的曝光时间期间，提供具有用于记录所述物体表面或所述物体表面的部分的图像的相机的照相机组件; 产生所述相机组件和所述物体的连续相对运动而不中断，由此在所述曝光时间期间引起所述图像的运动模糊; 用被控制为保持在相同值的照度连续照亮所述物体; 以及用所述照相机记录所述物体表面的至少一个所述部分的一个或多个图像; 定义对于所述图像的分析可接受的运动模糊，其中所述曝光时间小于导致所述可接受的运动模糊的时间; 以及对所述图像执行所述分析。

公开(公告)号：US4982105A

公开(公告)日：1991-01-01

申请号：US326502

申请日：1989-03-20

申请人： Ippei Takahashi

发明人： Ippei Takahashi

IPC分类号： G01N21/89 ,  G01N21/892

CPC分类号： G01N21/89 ,  B65H2557/62 ,  G01N2021/8912 ,  G01N2021/8927

摘要： An apparatus for inspecting the surface of a web material moving lengthwise at a constant speed by scanning the surface in the direction of the width of the surface with a light beam. The scanned beam modulated by the surface is received and converted into an electric signal which is divided into division signals representing lengthwise areas of the surface. At least one of the lengthwise areas or lanes into which the surface is divided is specified to be subjected to surface inspection. Surface signals of the specified lengthwise areas or lanes are separated from the other surface signals and evaluated for qualifying the surface of the web material.

摘要翻译： 一种用于通过用光束在表面的宽度方向上扫描表面来检查网状材料表面以恒定速度移动的表面的装置。 由表面调制的扫描光束被接收并转换为电信号，该信号被分成表示表面纵向区域的分割信号。 指定分割表面的至少一个纵向区域或通道进行表面检查。 指定长度方向区域或车道的表面信号与其他表面信号分离，并进行评估以确定幅材材料的表面。

公开(公告)号：US4868403A

公开(公告)日：1989-09-19

申请号：US147710

申请日：1988-01-25

申请人： Ippei Takahashi ,  Akihisa Iida

发明人： Ippei Takahashi ,  Akihisa Iida

IPC分类号： G01N21/89 ,  G01N21/892

CPC分类号： G01N21/89 ,  G01N2021/8912

摘要： An apparatus for inspecting the surface of web material moving lengthwise at a constant speed by scanning the surface in the direction of the width of the surface with a light beam. The scanned beam modulated by the surface is received and converted into an electric signal which is divided into division signals representing divisions of the width of the web. A first memory capability is provided for storing division signals added together by division every N transverse scans. The added division signals are transferred to a second memory capability by division, for evaluating the surface defect distribution of the scanned surface division by division.

摘要翻译： 一种用于通过用光束在表面的宽度方向上扫描表面来检查幅材材料表面以恒定速度移动的表面的装置。 由表面调制的扫描光束被接收并转换成电信号，该电信号被划分成表示幅材宽度分割的分割信号。 提供了第一存储器能力，用于存储通过N次横向扫描分割而加在一起的分频信号。 通过划分将相加的分割信号转移到第二存储器能力，用于通过划分来评估扫描表面划分的表面缺陷分布。

公开(公告)号：US09176070B2

公开(公告)日：2015-11-03

申请号：US14246953

申请日：2014-04-07

申请人： HSEB Dresden GmbH

发明人： Bernd Srocka

IPC分类号： G01N21/00 ,  G01N21/88 ,  G01N21/95

CPC分类号： G01N21/8851 ,  G01N21/8901 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8912 ,  G01N2201/062 ,  G01N2201/12

摘要： A method for inspecting wafers or other flat objects having an object surface, comprises the steps of: providing a camera assembly with a camera for recording images of said object surface or portions of said object surface during an exposure time which is limited by a shutter; generating a continuous relative movement of said camera assembly and said object without interruption, whereby a movement blur of said image during said exposure time is caused; continuously illuminating said object with an illuminance which is controlled to remain at the same value; and recording one or more images of at least one of said portions of said object surface with said camera; defining a movement blur which is acceptable for an analysis of said image wherein said exposure time is smaller than a time causing said acceptable movement blur; and performing said analysis of said image.

摘要翻译： 一种用于检查具有物体表面的晶片或其他扁平物体的方法，包括以下步骤：在由快门限制的曝光时间期间，提供具有用于记录所述物体表面或所述物体表面的图像的照相机的照相机组件; 产生所述相机组件和所述物体的连续相对运动而不中断，由此在所述曝光时间期间引起所述图像的运动模糊; 用被控制为保持在相同值的照度连续照亮所述物体; 以及用所述照相机记录所述物体表面的至少一个所述部分的一个或多个图像; 定义对于所述图像的分析可接受的运动模糊，其中所述曝光时间小于导致所述可接受的运动模糊的时间; 以及对所述图像执行所述分析。

公开(公告)号：US5118195A

公开(公告)日：1992-06-02

申请号：US579462

申请日：1990-09-10

申请人： William Dobbie

发明人： William Dobbie

IPC分类号： G01N21/892

CPC分类号： G01N21/8921 ,  G01N2021/8887 ,  G01N2021/8912 ,  G01N2201/102

摘要： The invention features a real time system for detecting streaks or scratches which occur substantially parallel to the direction of motion of a continuous web of material. The system can also be used to inspect sheets of material that may have been cut from such webs. An energy source such as an incandescent lamp or a bank of lamps generates electromagnetic energy that impinges upon the continuous web of material. CCD cameras receive reflected specular radiation from the web and generate video signals. The CCD cameras are disposed opposite the energy source and within 5.degree. of the plane perpendicular to the continuous web plane. Alternatively, the energy sources may transmit energy through the web material, which energy can be received by the CCD cameras. A processor is connected to the CCD cameras to process the video signals and to generate an enhanced signal-to-noise ratio signal that represents a streak or scratch on the web.

摘要翻译： 本发明的特征在于一种用于检测基本上平行于连续卷材的运动方向发生的条纹或划痕的实时系统。 该系统还可以用于检查可能已经从这种网上切割的材料的片材。 诸如白炽灯或一束灯的能量源产生撞击在连续的材料网上的电磁能。 CCD摄像机从网络接收反射的镜面辐射并产生视频信号。 CCD摄像机与能量源相对设置，垂直于连续卷筒纸平面的平面的5度内。 或者，能量源可以通过幅材材料传输能量，这些能量可由CCD照相机接收。 处理器连接到CCD摄像机以处理视频信号并产生增强的信噪比信号，其表示网上的条纹或划痕。

公开(公告)号：US4982600A

公开(公告)日：1991-01-08

申请号：US405215

申请日：1989-09-11

申请人： Takeshi Kiso ,  Takanori Masuda

发明人： Takeshi Kiso ,  Takanori Masuda

IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/892

CPC分类号： G01N21/8922 ,  G01N2021/8858 ,  G01N2021/8912

摘要： To measure the period with which a surface defect recurs in a surface of a web-like material moving in its lengthwise direction, surface defects distributed over the surface are detected in that lengthwise direction. Positional data and distance data as to the detected surface defects relative to one another are collected for a predetermined length of the web-like material. The web-like material is determined to have a periodic surface defect appearing with a period between predetermined maximum and minimum periods when the distance data include a distance equivalent to an elemental period that is a whole-number multiple of a fundamental period.

公开(公告)号：US4791304A

公开(公告)日：1988-12-13

申请号：US061954

申请日：1987-06-15

申请人： Akihisa Iida

发明人： Akihisa Iida

IPC分类号： G01B11/00 ,  G01B11/24 ,  G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/892 ,  G01N21/93 ,  G02B26/10 ,  H01J3/14

CPC分类号： G01N21/8901 ,  G01N2021/8912

摘要： A method of scanning a web material and an apparatus for use in the method in which a web material is spatially divided into smaller divisions in a scanning direction while being scanned in the direction of a width thereof with a scanning beam moved by means of a polyhedral mirror with a constant speed of rotation. Clock pulses from a pulse generator are counted up by a counter to access division data in a storing means to provide division signals according to which the width of the web material is spatially divided in the scanning direction.

摘要翻译： 一种扫描网状材料的方法和用于该方法中的方法的方法，其中将幅材材料沿扫描方向在空间上划分成更小的部分，同时沿其宽度方向扫描，其中扫描光束通过多面体 镜子具有恒定的旋转速度。 来自脉冲发生器的时钟脉冲通过存储装置中的访问分割数据的计数器向上计数，以提供划分信号，根据该信号，幅材材料的宽度在扫描方向上被空间划分。