INTERFACE-BASED THIN FILM METROLOGY USING SECOND HARMONIC GENERATION

    公开(公告)号:US20240176206A1

    公开(公告)日:2024-05-30

    申请号:US18116187

    申请日:2023-03-01

    申请人: KLA Corporation

    IPC分类号: G02F1/35 G01N21/63 G01N21/95

    摘要: A metrology system may include an illumination source to generate an illumination beam and an illumination sub-system to direct the illumination beam to a sample with an inversion-symmetric substrate and one or more films disposed on the inversion-symmetric substrate. The system may further include a filter configured to block a wavelength of the illumination beam and pass a wavelength associated with a second harmonic of the illumination beam and a detector to capture second harmonic generation (SHG) light. The system may further include a controller to receive metrology data from the detector associated with the SHG light from with an interface between the inversion-symmetric substrate and the one or more films and generate one or more metrology measurements associated with the one or more films based on the metrology data.

    SYSTEMS AND METHODS FOR DETECTING FOODBORNE PATHOGENS USING SPECTRAL ANALYSIS

    公开(公告)号:US20230266236A1

    公开(公告)日:2023-08-24

    申请号:US18173035

    申请日:2023-02-22

    IPC分类号: G01N21/31 G01N21/27

    摘要: An example system includes a light intensity measuring apparatus couplable to a food processing apparatus and a computing system. The light intensity measuring apparatus includes a chamber configured to receive a water sample from the food processing apparatus, a light source, a detector configured to detect light that has passed through the water sample and measure multiple times intensities of wavelengths of the light to obtain multiple sets of measured intensities of wavelengths, and a communication module configured to provide the multiple sets of measured intensities of wavelengths. The computing system may receive the multiple sets of measured intensities, process the multiple sets to obtain a set of values, apply a first set of decision trees to the set of values to obtain a first result indicating a positive or negative foodborne pathogen detection, generate a notification indicating either the positive of negative detection, and provide the notification.