公开(公告)号：US20190186658A1

公开(公告)日：2019-06-20

申请号：US15844959

申请日：2017-12-18

申请人： Chevron U.S.A. Inc.

发明人： Robert Ernest Rettew ,  Samuel J. Mishael

IPC分类号： F16L13/10 ,  F16L13/11 ,  F16L9/12 ,  G01B15/08 ,  G01N23/083 ,  C09J175/04 ,  C09J163/00 ,  C09J133/08 ,  C09J11/04 ,  C08K3/08 ,  C08K3/16 ,  C08K3/22 ,  C08K3/28 ,  C08K3/30

CPC分类号： F16L13/103 ,  C08K3/08 ,  C08K3/16 ,  C08K3/22 ,  C08K3/28 ,  C08K3/30 ,  C08K2003/0856 ,  C08K2003/2265 ,  C08K2003/3009 ,  C08K2003/3045 ,  C09J11/04 ,  C09J133/08 ,  C09J163/00 ,  C09J175/04 ,  F16L9/12 ,  F16L13/11 ,  G01B15/08 ,  G01N23/083

摘要： Disclosed are joints and methods for forming joints of nonmetallic components such as piping components made from a nonmetallic composite material. The components are joined by an adhesive containing an x-ray absorbing additive for providing a contrasting signal in x-ray inspection of the joint. The joints can be nondestructively tested by positioning the joints relative to an x-ray source and an x-ray detector. The joints and the adhesive therein are then exposed to x-ray radiation from the source of x-ray radiation. The x-ray radiation, having passed from the x-ray source to the x-ray detector, is detected over an area and an x-ray image of the x-ray radiation detected is created. The x-ray image is then read to identify defects in the joint.

公开(公告)号：US08878717B2

公开(公告)日：2014-11-04

申请号：US13126061

申请日：2010-09-15

申请人： Masahiro Yamamoto ,  Mitsutoshi Kenmochi ,  Toshihiro Sasaki

发明人： Masahiro Yamamoto ,  Mitsutoshi Kenmochi ,  Toshihiro Sasaki

IPC分类号： G01S13/00 ,  G01B15/08 ,  G01S13/04

CPC分类号： G01B15/08 ,  G01S13/04

摘要： A projection detecting apparatus according to the present invention is that for detecting a projection on a surface of a running metal object, and includes a transmission antenna for radiating electromagnetic waves; a reception antenna for receiving reflected electromagnetic waves; and a transmission and reception signal processing section for processing a transmission signal and a reception signal. The transmission antenna and the reception antenna have unidirectionality and the transmission antenna and the reception antenna are installed in such a way that the reception antenna does not catch electromagnetic waves which have been radiated by the transmission antenna and reflected on the surface of the metal object and the reception antenna catches electromagnetic waves alone which have been radiated by the transmission antenna and reflected on the projection.

摘要翻译： 根据本发明的投影检测装置是用于检测行进的金属物体的表面上的突起，并且包括用于辐射电磁波的发射天线; 用于接收反射电磁波的接收天线; 以及发送和接收信号处理部分，用于处理发送信号和接收信号。 发送天线和接收天线具有单方向性，发送天线和接收天线的安装方式使得接收天线不会捕获被发送天线辐射并在金属物体的表面上反射的电磁波， 接收天线捕获由发射天线辐射并在投影上反射的单独的电磁波。

公开(公告)号：US20140264016A1

公开(公告)日：2014-09-18

申请号：US13886631

申请日：2013-05-03

申请人： MACRONIX INTERNATIONAL CO., LTD.

发明人： YU-CHUNG CHEN ,  SHIN-CHANG TSAI ,  TA-HUNG YANG

IPC分类号： H01J37/26

CPC分类号： H01J37/26 ,  G01B15/08 ,  G01B2210/56 ,  H01J37/28 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01L22/12

摘要： Measurements of line roughness are separated into groups depending upon pre-layers. Image data collected from similar pre-layer types are considered together in order to separate effects of line roughness from distortion of measurements caused by the pre-layers. The resulting line roughness measurements are used to estimate an aspect of line quality.

摘要翻译： 线粗糙度的测量根据预层分为几组。 从相似的预先图层类型收集的图像数据被一起考虑，以便分离线粗糙度与由预层引起的测量失真的影响。 所得线粗糙度测量用于估计线质量的一个方面。

公开(公告)号：US20130245997A1

公开(公告)日：2013-09-19

申请号：US13772437

申请日：2013-02-21

申请人： FUJITSU LIMITED

发明人： Kouichirou KASAMA

IPC分类号： G01B21/20

CPC分类号： G01B21/20 ,  G01B15/08

摘要： An undulation detection device includes a two-dimensional sensor configured to emit a sensing wave for distance measurement in a plurality of directions forming different lateral and vertical angles and to measure respective distances to objects from which the sensing wave is reflected, and a processor performs detecting an undulation of the measurement surface or an obstacle placed on the measurement surface from which the sensing wave is reflected, on the basis of a difference among the distances in the different directions, the difference being measured by the two-dimensional sensor, and outputting an undulation detection report, when an in-plane size of the undulation of the measurement surface or the obstacle placed on the measurement surface is equal to or more than a threshold.

摘要翻译： 波动检测装置包括：二维传感器，被配置为在形成不同的横向和垂直角度的多个方向上发射用于距离测量的感测波，并且测量与感测波反射的物体的距离，并且处理器执行检测 基于不同方向上的距离之间的差异，测量表面的波动或放置在测量表面上的障碍物，其中感测波反射的距离是由二维传感器测量的差异，并输出 当测量表面的波动的平面尺寸或放置在测量表面上的障碍物的面内尺寸等于或大于阈值时，起伏检测报告。

公开(公告)号：US20120305764A1

公开(公告)日：2012-12-06

申请号：US13570931

申请日：2012-08-09

申请人： Yoshihiro Kimura ,  Osamu Komuro ,  Fumihiro Sasajima

发明人： Yoshihiro Kimura ,  Osamu Komuro ,  Fumihiro Sasajima

IPC分类号： G01N23/225

CPC分类号： G01B15/08 ,  H01J37/28 ,  H01J2237/2814 ,  H01J2237/2817

摘要： A method and apparatus suitable for determining the concavity and convexity of line and space patterns formed on a sample. A profile is formed based on a charged-particle beam scan, the profile having a peak. When one foot portion of the peak converges more gradually than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a convex portion. Alternatively, when one foot portion of the peak converges more steeply than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a concave portion.

摘要翻译： 适用于确定在样品上形成的线和空间图案的凹凸的方法和装置。 基于带电粒子束扫描形成轮廓，轮廓具有峰值。 当峰的一个脚部比另一个脚部更加逐渐收敛时，与一个脚部相对应的部分样本被确定为凸部。 或者，当峰的一个脚部比另一个脚部收敛得更陡峭时，与一个脚部对应的样本的一部分被确定为凹部。

公开(公告)号：US20100123168A1

公开(公告)日：2010-05-20

申请号：US12635490

申请日：2009-12-10

申请人： Keiji ISHIBASHI ,  Tokiko KAJI ,  Seiji NAKAHATA ,  Takayuki NISHIURA

发明人： Keiji ISHIBASHI ,  Tokiko KAJI ,  Seiji NAKAHATA ,  Takayuki NISHIURA

IPC分类号： H01L33/00 ,  H01L29/20

CPC分类号： G01N23/207 ,  C30B25/186 ,  C30B25/20 ,  C30B29/38 ,  C30B29/403 ,  C30B29/406 ,  C30B33/00 ,  C30B33/10 ,  G01B15/08 ,  G01N2223/602 ,  G01N2223/634 ,  H01L21/02389 ,  H01L21/02433 ,  H01L21/0254 ,  H01L22/12 ,  H01L29/04 ,  H01L29/045 ,  H01L29/2003 ,  Y10T428/2978

摘要： A nitride crystal is characterized in that, in connection with plane spacing of arbitrary specific parallel crystal lattice planes of the nitride crystal obtained from X-ray diffraction measurement performed with variation of X-ray penetration depth from a surface of the crystal while X-ray diffraction conditions of the specific parallel crystal lattice planes are satisfied, a uniform distortion at a surface layer of the crystal represented by a value of |d1−d2|/d2 obtained from the plane spacing d1 at the X-ray penetration depth of 0.3 μm and the plane spacing d2 at the X-ray penetration depth of 5 μm is equal to or lower than 2.1×10−3. The above configuration provides the nitride crystal having a crystal surface layer that is evaluated directly and reliably without breaking the crystal so that it can be used in a preferred fashion as a substrate for a semiconductor device as well as the nitride crystal substrate, an epilayer-containing nitride crystal substrate, a semiconductor device and a method of manufacturing the same.

摘要翻译： 氮化物晶体的特征在于，结合由X射线衍射测量得到的氮化物晶体的任意特定平行晶格面的平面间隔，与X射线的X射线 满足特定平行晶格面的衍射条件，在由X射线穿透深度为0.3μm的平面间距d1获得的由| d1-d2 | / d2值表示的晶体的表面层处的均匀畸变 并且在X射线穿透深度为5μm的平面间距d2等于或低于2.1×10-3。 上述结构提供了具有晶体表面层的氮化物晶体，其直接可靠地评估而不破坏晶体，使得其可以以优选的方式用作半导体器件的衬底以及氮化物晶体衬底， 含氮化物晶体基板，半导体装置及其制造方法。

公开(公告)号：US07719694B1

公开(公告)日：2010-05-18

申请号：US12144073

申请日：2008-06-23

申请人： Daniel J. Gregoire

发明人： Daniel J. Gregoire

IPC分类号： G01B11/30

CPC分类号： G01B15/08 ,  B64D15/20

摘要： A system and a method are provided for detecting a surface characteristic of a surface. A plurality of transponders are located on the surface for transmitting electromagnetic surface waves and for receiving the electromagnetic surface waves upon being reflected, diffracted, refracted, scattered, or otherwise altered by ice on the surface. A controller is coupled to the plurality of transponders. The controller is adapted to coordinate the plurality of transponders for imaging the surface characteristic of the surface.

摘要翻译： 提供了用于检测表面的表面特性的系统和方法。 多个转发器位于表面上用于传输电磁表面波，并且用于在由表面上的冰反射，衍射，折射，散射或以其它方式改变时接收电磁表面波。 控制器耦合到多个转发器。 控制器适于协调多个应答器，以对表面的表面特性进行成像。

公开(公告)号：US20070057666A1

公开(公告)日：2007-03-15

申请号：US11492964

申请日：2006-07-26

申请人： Tomokazu Shimakura ,  Teruo Kohashi ,  Yoshio Takahashi

发明人： Tomokazu Shimakura ,  Teruo Kohashi ,  Yoshio Takahashi

IPC分类号： G01R33/12

CPC分类号： G01R33/1207 ,  G01B15/08 ,  G11B5/00 ,  G11B5/012 ,  G11B5/74 ,  G11B5/82 ,  G11B7/00375 ,  G11B11/10582 ,  G11B2005/001

摘要： This invention provides a recording media defect inspection technique that makes possible high-speed and high-resolution defect inspection using an electron beam. A spindle motor rotates a recording media while an electron beam is being irradiated on a surface of a recording media, and detectors detect secondary electrons produced from the recording media, whereby unevenness information of the recording media surface is obtained. The obtained unevenness information on the recording media surface is Fourier transformed and a defect is detected. Further, by introducing deposition gas onto the recording media surface by gas introduction means while irradiating the electron beam on the recording media, a component of the deposition gas is deposited in a detected defect position on the recording media surface to form a mark.

摘要翻译： 本发明提供一种记录介质缺陷检查技术，其使得能够使用电子束进行高速和高分辨率的缺陷检查。 当电子束被照射在记录介质的表面上时，主轴电动机旋转记录介质，并且检测器检测从记录介质产生的二次电子，从而获得记录介质表面的不均匀性信息。 在记录介质表面上获得的不均匀性信息被傅里叶变换并且检测到缺陷。 此外，通过在将记录介质上的电子束照射的同时通过气体引入装置将沉积气体引入到记录介质表面上，沉积气体的一部分沉积在记录介质表面上的检测到的缺陷位置以形成标记。

公开(公告)号：US20040164243A1

公开(公告)日：2004-08-26

申请号：US10782030

申请日：2004-02-19

申请人： Hitachi High Technologies Corporation

发明人： Masato Kazui ,  Mitsuji Ikeda ,  Atsushi Takane

IPC分类号： G01N023/00

CPC分类号： G01B15/08 ,  G01N23/2251 ,  H01J2237/2817

摘要： An electron beam applied from an electron gun 1 and reflected off a surface of a specimen 7 placed on a stage 2 that is tilted at a tilt angle nullnull0 is detected, and a signal intensity thereof is measured by an electron detector 3. Based upon the measurement, an image processing unit 6 calculates a slope angle null of the surface of the specimen, and determines candidates for cross-sectional shape of the specimen. Signal intensity of the electromagnetic wave that would be reflected from a surface having a cross-sectional shape of each of the candidates if the tilt angle null were changed into nullnullnull0 are estimated, and compared with a signal intensity actually measured by the electron detector 3 with the tilt angle null being changed into nullnullnull0. Consequently, cross sectional shape and three-dimensional shape can be determined based upon a result of comparison, without utilizing a matching process of feature points.

摘要翻译： 检测从电子枪1施加并从放置在倾斜角度为phi = 0的台2上的试样7的表面反射的电子束，并且通过电子检测器3测量其信号强度。基于 在测量时，图像处理单元6计算样本表面的倾斜角θ，并确定样本的横截面形状的候选。 如果将倾斜角度phi改变为phi = phi0，则从具有每个候选的横截面形状的表面反射的电磁波的信号强度被估计，并且与由电子检测器实际测量的信号强度进行比较 3，倾斜角度phi变为phi = phi0。 因此，可以基于比较的结果来确定截面形状和三维形状，而不利用特征点的匹配处理。

公开(公告)号：US09759540B2

公开(公告)日：2017-09-12

申请号：US14733006

申请日：2015-06-08

申请人： Hexagon Metrology, Inc.

发明人： Paul Ferrari ,  Hyun Kwon Jung ,  James F. McKnight

IPC分类号： G01B5/012 ,  G01B7/012 ,  G01B11/30 ,  G01B15/08 ,  G01B17/08 ,  G01D5/34 ,  G01B21/04 ,  G01B11/00 ,  G01N29/22

CPC分类号： G01B5/012 ,  G01B7/012 ,  G01B11/007 ,  G01B15/08 ,  G01B17/08 ,  G01B21/047 ,  G01D5/34 ,  G01N29/225

摘要： An articulating probe for use with a coordinate measuring machine comprises an attachment portion, a measuring portion, and at least one articulating joint. The attachment portion can be configured for attachment to a coordinate measuring machine. The measuring portion can be configured to contact an object to be measured by the coordinate measuring machine. The at least one articulating joint can be configured to allow rotation between the attachment portion and the measuring portion. Further, the articulating joint can comprise an angular sensor configured to measure an angle of the joint.