Process for forming schottky rectifier with PtNi silicide schottky barrier
    4.
    发明授权
    Process for forming schottky rectifier with PtNi silicide schottky barrier 有权
    用PtNi硅化物肖特基势垒形成肖特基整流器的工艺

    公开(公告)号:US08895424B2

    公开(公告)日:2014-11-25

    申请号:US12831098

    申请日:2010-07-06

    摘要: A process for forming a Schottky barrier to silicon to a barrier height selected at a value between 640 meV and 840 meV employs the deposition of a platinum or nickel film atop the silicon surface followed by the deposition of the other of a platinum or nickel film atop the first film. The two films are then exposed to anneal steps at suitable temperatures to cause their interdiffusion and an ultimate formation of Ni2Si and Pt2Si contacts to the silicon surface. The final silicide has a barrier height between that of the Pt and Ni, and will depend on the initial thicknesses of the Pt and Ni films and annealing temperature and time. Oxygen is injected into the system to form an SiO2 passivation layer to improve the self aligned process.

    摘要翻译: 将硅肖特基势垒形成至640meV至840meV之间的阻挡层高度的工艺是在硅表面上沉积铂或镍膜,然后将铂或镍膜中的另一个沉积在顶部 第一部电影 然后将这两个膜在合适的温度下暴露于退火步骤,以引起它们的相互扩散,并最终形成Ni2Si和Pt2Si与硅表面的接触。 最终的硅化物具有在Pt和Ni之间的势垒高度,并且将取决于Pt和Ni膜的初始厚度以及退火温度和时间。 将氧气注入系统以形成SiO 2钝化层以改善自对准过程。

    Method for forming a superjunction device with improved ruggedness
    8.
    发明授权
    Method for forming a superjunction device with improved ruggedness 有权
    用于形成具有改善的耐用性的超连接装置的方法

    公开(公告)号:US09478441B1

    公开(公告)日:2016-10-25

    申请号:US12849782

    申请日:2010-08-03

    申请人: Srikant Sridevan

    发明人: Srikant Sridevan

    IPC分类号: H01L21/425 H01L21/38

    摘要: An improved superjunction semiconductor device includes a charged balanced pylon in a body region, where a top of the pylon is large to create slight charge imbalance. A MOSgated structure is formed over the top of the pylon and designed to conduct current through the pylon. By increasing a dimension of the top of the pylon, the resulting device is less susceptible to variations in manufacturing tolerances to obtain a good breakdown voltage and improved device ruggedness.

    摘要翻译: 改进的超结半导体器件包括在体区中的带电平衡塔,其中塔的顶部较大以产生轻微的电荷不平衡。 在塔架的顶部形成一个MOS结构,设计用于通过塔架传导电流。 通过增加塔的顶部的尺寸,所得到的装置不太容易受到制造公差的变化的影响,以获得良好的击穿电压和改进的装置坚固性。

    Merged P-i-N Schottky structure
    10.
    发明授权
    Merged P-i-N Schottky structure 有权
    合并的P-i-N肖特基结构

    公开(公告)号:US07858456B2

    公开(公告)日:2010-12-28

    申请号:US11402039

    申请日:2006-04-11

    IPC分类号: H01L21/338

    摘要: Merged P-i-N Schottky device in which the oppositely doped diffusions extend to a depth and have been spaced apart such that the device is capable of absorbing a reverse avalanche energy comparable to a Fast Recovery Epitaxial Diode having a comparatively deeper oppositely doped diffusion region.

    摘要翻译: 合并的P-i-N肖特基器件,其中相反掺杂的扩散延伸到深度并且已经间隔开,使得该器件能够吸收与具有相对更深的相反掺杂扩散区域的快速恢复外延二极管相当的反向雪崩能量。