-
1.发明授权Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography 失效用于在极紫外光中产生光并用于用于极紫外光刻的光源的装置公开(公告)号：US07399981B2
公开(公告)日：2008-07-15
申请号：US11151696
申请日：2005-06-13
申请人： Guy Cheymol , Philippe Cormont , Pierre-Yves Thro , Olivier Sublemontier , Martin Schmidt , Benoit Barthod
发明人： Guy Cheymol , Philippe Cormont , Pierre-Yves Thro , Olivier Sublemontier , Martin Schmidt , Benoit Barthod
IPC分类号： H05G2/00
CPC分类号： G03F7/70166 , B82Y10/00 , G03F7/70033 , H05G2/003 , H05G2/008
摘要： The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4). The collector device (110) is disposed symmetrically about the mean collection axis (6) in the half-space containing the laser beams (1) focused on the target (4) and inside a conical space (8) centered on the mean collection axis (6) with a vertex situated at the target (4) and a half-angle at the vertex that is less than the angle of inclination of the focused laser beams (1) relative to the mean collection axis (6). The device is suitable for use as a source for EUV radiation in lithography for fabricating integrated circuits.
摘要翻译： 该装置包括用于在激光束（1）被聚焦的抽空空间中产生基本上线性的目标（4）的装置（2），所述目标适合于与聚焦的激光束（1）相互作用以发射等离子体发射辐射 在极紫外线。 接收机装置（3）在与聚焦激光束（1）相互作用后接收目标（4），并且收集装置（110）收集目标（4）发射的EUV辐射。 用于将激光束聚焦在靶（4）上的聚焦元件（11）以这样一种方式被布置，使得激光束（1）横向聚焦在靶（4）上，相对于 目标（4）并相对于垂直于目标（4）的平均收集轴线（6）以确定的角度倾斜在约60°至约90°的范围内。 收集器装置（110）围绕包含聚焦在目标（4）上的激光束（1）的半空间中的平均收集轴线（6）对称地设置在以平均收集轴线为中心的锥形空间（8）内部 （6）具有位于目标（4）处的顶点，并且在顶点处的半角小于聚焦激光束（1）相对于平均收集轴线（6）的倾斜角度。 该器件适合用作光刻用于制造集成电路的EUV辐射源。
-
2.发明授权Process for dissolving plutonium dioxide by means of OH.sub.- radicals produced by the radiolysis of water usable for the treatment of dissolving fines and plutoniferous waste 失效通过可用于处理溶解细粉和铅质废物的水的放射分解产生的OH-自由基来溶解二氧化钚的方法
公开(公告)号：US5422084A
公开(公告)日：1995-06-06
申请号：US26869
申请日：1993-03-05
申请人： Charles Madic
发明人： Charles Madic
CPC分类号： C22B60/04 , C22B3/065 , Y02P10/234
摘要： The invention relates to a process for dissolving plutonium dioxide by means of OH.sup.- radicals produced by radiolysis of water and usable for the treatment of dissolving fines and plutoniferous waste.To this end, contacting takes place in a reactor (1) of solid products containing PuO.sub.2 coming from the hopper (5) with an aqueous nitric solution (3) irradiated by radiation or charged particles for producing OH.sup.- radicals by radiolysis of said solution, in the presence of a reagent such as N.sub.2 O, able to trap the solvated electrons and the H.sup.- radicals produced in simultaneous manner and optionally a redox mediator such as silver.Irradiation can take place by an alpha or beta emitter present in the solution or by an external source such as an irradiator or an electron accelerator.
摘要翻译： 本发明涉及一种通过水分散产生的OH-自由基来溶解二氧化钚的方法，可用于处理溶解细粉和有毒废物。 为此，在含有来自料斗（5）的PuO的固体产物的反应器（1）中，用辐射或带电粒子照射的硝酸水溶液（3）进行接触，从而通过所述溶液的辐射分解来产生OH-基， 在诸如N 2 O的试剂存在下，能够捕获溶剂化的电子和以同时方式产生的任选的氧化还原介体如银。 照射可以通过溶液中存在的α或β发射体或外部来源（例如辐照器或电子加速器）进行。
-
公开(公告)号：US3918012A
公开(公告)日：1975-11-04
申请号：US49285674
申请日：1974-07-29
发明人： PEUZIN JEAN CLAUDE
CPC分类号： H03H9/38
摘要： This invention relates to a method and device for providing a variable delay line. The delay is adjusted by the movement of a wall separating two adjacent portions having different electromechanical properties which are thereby discontinuous. An acoustic wave is produced in one end portion having a carrier frequency which is modulated by the signal to be delayed, the acoustic wave propagating inside the bar in a direction which is perpendicular to the discontinuity surface. The electric signal produced by the surface is connected to a receiver circuit and the delay is obtained by electromechanical means varying the position of the wall along the direction perpendicular to the discontinuous surface.
摘要翻译： 本发明涉及提供可变延迟线的方法和装置。 通过分隔具有不同机电特性的两个相邻部分的壁的移动来调节延迟，由此是不连续的。 在具有由要延迟的信号调制的载波频率的一个端部产生声波，声波在垂直于不连续表面的方向上在该条内传播。 由表面产生的电信号连接到接收器电路，并且延迟通过机电装置获得，该机电装置沿垂直于不连续表面的方向改变壁的位置。
-
公开(公告)号：US3913407A
公开(公告)日：1975-10-21
申请号：US27287972
申请日：1972-07-18
发明人： HANFF MICHEL , LIONS NOEL , PERONNET JEAN
IPC分类号： G21C17/025 , G21C17/10 , G01H3/00
CPC分类号： G21C17/025 , G21C17/10
摘要： The device comprises a first acoustic conductor placed vertically within the coolant liquid contained in a nuclear reactor vessel and a second coaxial acoustic conductor extending to the exterior of the reactor vessel. The device essentially comprises an accelerometer assembly for detecting signals delivered by the second conductor and an amplifier which applies the detected signals to measuring instruments located outside the reactor vessel. The accelerometer comprises an amplifying pressure needle carried by the upper end of the second conductor, a piezoelectric ceramic element, a block fitted with a spring for applying the ceramic element against the needle and a preamplifier connected in series with the amplifier.
摘要翻译： 该装置包括垂直放置在容纳在核反应堆容器中的冷却剂液体中的第一声导体和延伸到反应器容器外部的第二同轴声导体。 该装置基本上包括用于检测由第二导体传送的信号的加速度计组件和将检测到的信号施加到位于反应堆容器外部的测量仪器的放大器。 加速度计包括由第二导体的上端承载的放大压力针，压电陶瓷元件，装配有用于将陶瓷元件施加到针上的弹簧的块和与放大器串联连接的前置放大器。
-
5.发明授权Device for cumulating the useful sections of a signal appearing in the form of a series of pulses each having a useful section 失效用于累积以各自具有有用部分的一系列脉冲的形式出现的信号的有用部分的装置
公开(公告)号：US3911329A
公开(公告)日：1975-10-07
申请号：US47410374
申请日：1974-05-28
IPC分类号： A61B5/00 , A61B5/0496 , G06G7/28 , G06G7/30 , H03K5/003 , H03K6/00 , A61B5/10 , G06G7/18 , H03K5/00
CPC分类号： A61B5/4863 , A61B5/0496 , A61B5/7242 , G06G7/28 , G06G7/30 , H03K5/003 , H03K6/00
摘要： A voltage which is proportional to the mean slope of the slow phase of the nth pulse of the signal is produced and then integrated during the time interval of the fast return of the nth pulse so as to produce the signal In. The low-gradient section of the nth pulse is added to the cumulated signal corresponding to the n - 1 first pulses so as to produce a signal Pn and the signals Pn and In are added so as to produce the cumulated signal Sn corresponding to the n first pulses.
摘要翻译： 产生与信号的第n个脉冲的慢相的平均斜率成比例的电压，然后在第n个脉冲的快速返回的时间间隔内积分，以产生信号In。 第n个脉冲的低梯度部分被加到对应于n-1个第一脉冲的累积信号上，以便产生信号Pn，并加上信号Pn和In，以便产生与n相对应的累积信号Sn 第一脉冲。
-
公开(公告)号：US3904256A
公开(公告)日：1975-09-09
申请号：US37223873
申请日：1973-06-21
发明人： PFEIFER HANS
摘要： A step-bearing pivot having a spherical lower end is secured to the centrifuge bowl and a spherical step-bearing cup formed at the bottom of a lifting-oil chamber rests on elastic damping means which essentially comprise a hollow elastic shaft surrounded by and attached to a hollow damping support of slightly conical shape, a leak-tight cylindrical-conical outer casing which forms a closed space containing the shaft-support assembly and filled with damping oil which has low variation of viscosity, an inner tube and axial deflector for ensuring laminar flow of a cooling fluid within the central portion of the hollow elastic shaft.
摘要翻译： 具有球形下端的步进轴承固定到离心机碗，并且形成在提升油室底部的球形步进承载杯搁置在弹性阻尼装置上，弹性阻尼装置基本上包括由中空弹性轴包围并连接到 一个略微圆锥形的空心阻尼支架，一个密封的圆锥形外壳，它形成一个封闭的空间，它包含轴支撑组件，并填充了粘度变化小的阻尼油，用于确保层流的内管和轴向偏转器 在中空弹性轴的中心部分内的冷却流体的流动。
-
7.发明授权Defect detection system using an AND gate to distinguish specific flaw parameters 失效缺陷检测系统使用与门来区分特定的缺陷参数
公开(公告)号：US3895290A
公开(公告)日：1975-07-15
申请号：US38205273
申请日：1973-07-23
发明人： AUDENARD BERNARD , PIGEON MICHEL , STACH CLAUDE
CPC分类号： G01N27/9046 , H02H3/265
摘要： The device has a high-speed phase meter which responds in one period of the defect signal to generate an analog signal which is proportional to the phase of the defect signal. A high-speed phase comparator delivers a phase logic signal when the phase analog signal is in a range between first and second threshold levels, a circuit for detecting the direction of the first phase unbalance delivers a direction logic signal when the first variation in the phase analog signal is in the direction of the range between the first and second threshold levels. A circuit generates a peak to peak amplitude analog signal whose amplitude is proportional to the defect signal. A high-speed peak amplitude comparator delivers a peak amplitude signal when the amplitude of the input analog signal is higher than a third threshold, at least one positioning cell is used which supplies positioning logic information and an AND-gate delivers a logical signal alarm signal when the aforementioned logical items are present.
摘要翻译： 该装置具有高速相位计，其在缺陷信号的一个周期中进行响应，以产生与缺陷信号的相位成比例的模拟信号。 当相位模拟信号在第一和第二阈值电平之间的范围内时，高速相位比较器提供相位逻辑信号，用于检测第一相位不平衡的方向的电路在相位的第一变化时传送方向逻辑信号 模拟信号在第一和第二阈值电平之间的范围的方向上。 电路产生幅度与缺陷信号成比例的峰 - 峰振幅模拟信号。 当输入模拟信号的幅度高于第三阈值时，高速峰值振幅比较器输出峰值振幅信号，使用提供定位逻辑信息的至少一个定位单元，并且与门传递逻辑信号报警信号 当存在上述逻辑项目时。
-
公开(公告)号：US3882585A
公开(公告)日：1975-05-13
申请号：US44013774
申请日：1974-02-05
发明人： COSTES DIDIER , PICAUT JACK
CPC分类号： F16J12/00 , B23P11/00 , F17C1/02 , F17C2201/0104 , F17C2201/032 , F17C2201/052 , F17C2201/054 , F17C2203/012 , F17C2203/0619 , F17C2203/0639 , F17C2203/0678 , F17C2209/2154 , F17C2209/221 , F17C2223/035 , F17C2260/013 , F17C2270/05 , Y10T29/49616 , Y10T29/49874 , Y10T29/53526
摘要： In a method of positioning hoops of steel wire or strip for the application of circular prestress to pressure vessels provided at uniform intervals with peripheral support saddles, a winding core is placed between the saddles and the prestressing hoops and is displaced in rotational motion so as to wind the hoops. The device for carrying out the method comprises radial rollers and adjacent axial rollers so arranged as to form a roller track corresponding to the internal diameter of the winding core, at least one pressure roller for displacing the core and the hoop and at least one stationary drum for feeding steel strip.
摘要翻译： 在将钢丝或钢带的环箍定位用于将环形预应力定位到具有周边支撑座的均匀间隔的压力容器中的方法中，绕组芯放置在鞍座和预应力环之间，并以旋转运动方式移位，以便 吹环
-
公开(公告)号：US3876949A
公开(公告)日：1975-04-08
申请号：US29293372
申请日：1972-09-28
发明人： ENCELLAZ ROBERT , BONNEFOY-CLAUDET JEAN-PAUL , JEDLITSCHKA HANS , MARTIN MICHEL , TOURNIER EDMOND
CPC分类号： H03K5/1504 , H03K7/08
摘要： The phase-shift cell comprises in combination a programmable generator which produces constant currents, a bistable threshold circuit connected through an integrator to the output of the generator, and a feedback loop connected between the output of the threshold circuit and the input of the generator. Reversals of the threshold circuit to a first state are initiated by synchronizing signals to be phase-shifted, reversals to a second state being initiated by the output signal of the integrator when the signal attains the threshold level of the bistable circuit. The phase shift of the output signal of said bistable circuit with respect to the input signal is determined by the instant T.sub.1 of reversal to the second state. An additional current generator connected between the aforementioned generator and the integrator modifies the output signal of this latter in order to vary the instant of reversal of the bistable threshold circuit to the second state.
-
公开(公告)号：US3872402A
公开(公告)日：1975-03-18
申请号：US39926573
申请日：1973-09-20
发明人： SANCHEZ FRANCIS
CPC分类号： H01S3/106 , H01S3/08059 , H01S3/105
摘要： The laser generator comprises a suitably excited active medium placed within a resonator. The resonator is constituted by a mirror having a high coefficient of reflection and by a selective reflector assembly comprising a plurality of plates having parallel faces cut in a birefringent material in a direction parallel to the optical axis. The plates as well as their neutral lines are parallel to each other, each plate being preceded by a polarizer in which the direction of polarization makes an angle of 45* with the neutral lines.
摘要翻译： 激光发生器包括置于谐振器内的适当激励的有源介质。 谐振器由具有高反射系数的反射镜和选择性反射器组件构成，该反射器组件包括在平行于光轴的方向上具有以双折射材料切割的平行面的多个板。 板和它们的中性线彼此平行，每个板之前是偏振器，其中偏振方向与中性线成45°的角度。
-
-
-
-
-
-
-
-
-
搜索结果
984 条记录 (耗时 0.018 秒)
