公开(公告)号：US08400709B2

公开(公告)日：2013-03-19

申请号：US12929506

申请日：2011-01-28

申请人： Yuki Yoshida ,  Naoshi Aikawa

发明人： Yuki Yoshida ,  Naoshi Aikawa

IPC分类号： G02B21/00

CPC分类号： G02B21/0032 ,  G02B21/00 ,  G02B21/0024 ,  G02B21/0048 ,  G02B21/0076 ,  G02B21/16 ,  G02B26/105 ,  G02B27/0025 ,  G02B27/0081

摘要： Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror and comes into deflection system after light of unnecessary wavelength is removed by a filter. The deflection system is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.

摘要翻译： 从样品的检查表面上的照射点产生荧光，并且通过物镜收集荧光。 这里，由于物镜的倍率色差，从物镜出射的荧光沿着从照射光偏移的路径行进，并且通过电流扫描器基本上变成非扫描光。 荧光通过二向色镜并通过过滤器去除不需要的波长的光后进入偏转系统。 偏转系统通过计算机与电动扫描仪同步驱动，并校正由物镜的倍率色像差产生的光轴的偏移和倾斜。 然后，通过使用集体透镜，在针孔板的针孔上形成样品的检查表面的照射点的图像。

公开(公告)号：US20090231692A1

公开(公告)日：2009-09-17

申请号：US12453825

申请日：2009-05-22

申请人： Yuki Yoshida ,  Naoshi Aikawa

发明人： Yuki Yoshida ,  Naoshi Aikawa

IPC分类号： G02B21/06 ,  G02B26/10

CPC分类号： G02B21/0032 ,  G02B21/00 ,  G02B21/0024 ,  G02B21/0048 ,  G02B21/0076 ,  G02B21/16 ,  G02B26/105 ,  G02B27/0025 ,  G02B27/0081

摘要： Fluorescence is generated from an irradiated point on an inspection surface of a sample (7) and the fluorescence is collected by an objective lens (6). Here, because of the magnification chromatic aberration of the objective lens 86, the fluorescence going out from the objective lens (6) travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner (5). The fluorescence passes through a dichroic mirror (4) and comes into deflection means (9) as 2-dimensional deflection means after light of unnecessary wavelength is removed by a filter (8). The deflection means (9) is driven in synchronization with the galvano-scanner (5) by a computer (10) and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens (6). After the shift and inclination of the optical axis are corrected, the fluorescence forms an image of the irradiation point of the inspection surface of the sample (7) on a pin hole of a pin hole plate (12) by using a collective lens (11). Thus, it is possible to provide a laser scan confocal microscope capable of correcting the peripheral light reduced by the magnification chromatic aberration by using an optical system even if the used objective lens has the magnification chromatic aberration.

摘要翻译： 从样品（7）的检查表面上的照射点产生荧光，并且通过物镜（6）收集荧光。 这里，由于物镜86的倍率色差，从物镜（6）出射的荧光沿着从照射光偏移的路径移动，并且通过电流扫描器（5）变化为非扫描光 ）。 荧光通过分色镜（4），并且在通过过滤器（8）去除不需要的波长的光之后作为二维偏转装置进入偏转装置（9）。 偏转装置（9）通过计算机（10）与电动扫描器（5）同步地驱动，并校正由物镜（6）的倍率色像差产生的光轴的偏移和倾斜。 在校正光轴的偏移和倾斜之后，荧光通过使用集体透镜（11）在针孔板（12）的针孔上形成样品（7）的检查表面的照射点的图像 ）。 因此，即使所使用的物镜具有倍率色差，也可以提供能够通过使用光学系统校正由倍率色像差减小的周边光的激光扫描共聚焦显微镜。

公开(公告)号：US20110141557A1

公开(公告)日：2011-06-16

申请号：US12929506

申请日：2011-01-28

申请人： Yuki Yoshida ,  Naoshi Aikawa

发明人： Yuki Yoshida ,  Naoshi Aikawa

IPC分类号： G02B21/06

CPC分类号： G02B21/0032 ,  G02B21/00 ,  G02B21/0024 ,  G02B21/0048 ,  G02B21/0076 ,  G02B21/16 ,  G02B26/105 ,  G02B27/0025 ,  G02B27/0081

摘要： Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens 86, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror and comes into deflection means as 2-dimensional deflection means after light of unnecessary wavelength is removed by a filter. The deflection means is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. After the shift and inclination of the optical axis are corrected, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens. Thus, it is possible to provide a laser scan confocal microscope capable of correcting the peripheral light reduced by the magnification chromatic aberration by using an optical system even if the used objective lens has the magnification chromatic aberration.

摘要翻译： 从样品的检查表面上的照射点产生荧光，并且通过物镜收集荧光。 这里，由于物镜86的倍率色像差，从物镜射出的荧光沿着从照射光偏移的路径行进，并且通过电流扫描器基本上变成非扫描光。 荧光通过二向色镜并在经过过滤器去除不需要的波长的光之后作为二维偏转装置进入偏转装置。 偏转装置通过计算机与电动扫描器同步地驱动，并且校正由物镜的倍率色像差产生的光轴的偏移和倾斜。 在校正光轴的偏移和倾斜之后，荧光通过使用集体透镜在针孔板的针孔上形成样品的检查表面的照射点的图像。 因此，即使所使用的物镜具有倍率色差，也可以提供能够通过使用光学系统校正由倍率色像差减小的周边光的激光扫描共聚焦显微镜。

公开(公告)号：US07903329B2

公开(公告)日：2011-03-08

申请号：US12453825

申请日：2009-05-22

申请人： Yuki Yoshida ,  Naoshi Aikawa

发明人： Yuki Yoshida ,  Naoshi Aikawa

IPC分类号： G02B21/00

CPC分类号： G02B21/0032 ,  G02B21/00 ,  G02B21/0024 ,  G02B21/0048 ,  G02B21/0076 ,  G02B21/16 ,  G02B26/105 ,  G02B27/0025 ,  G02B27/0081

摘要： Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a deflection system after light of unnecessary wavelength is removed by a filter. The deflection system is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.

摘要翻译： 从样品的检查表面上的照射点产生荧光，并且通过物镜收集荧光。 这里，由于物镜的倍率色差，从物镜出射的荧光沿着从照射光偏移的路径行进，并且通过电流扫描器基本上变成非扫描光。 通过过滤器除去不需要的波长的光后，荧光通过分色镜进入偏转系统。 偏转系统通过计算机与电动扫描仪同步驱动，并校正由物镜的倍率色像差产生的光轴的偏移和倾斜。 然后，通过使用集体透镜，在针孔板的针孔上形成试样的检查面的照射点的图像。

公开(公告)号：US08310754B2

公开(公告)日：2012-11-13

申请号：US12748031

申请日：2010-03-26

申请人： Hisashi Okugawa ,  Naoshi Aikawa ,  Masatoshi Sato

发明人： Hisashi Okugawa ,  Naoshi Aikawa ,  Masatoshi Sato

IPC分类号： G02B21/06 ,  G01J3/30

CPC分类号： G02B21/0076 ,  G02B5/0833 ,  G02B5/285

摘要： The present application has a proposition to provide a highly efficient laser excitation fluorescent microscope. Accordingly, a laser excitation fluorescent microscope of the present application includes a laser light source part radiating at least two types of excitation lights having different wavelengths; a light collecting part collecting the two types of excitation lights on a sample; a high-functional dichroic mirror, disposed between the laser light source part and the light collecting part, reflecting the two types of excitation lights to make the excitation lights incident on the light collecting part, and transmitting two types of fluorescence generated at the sample; and a detecting part detecting light transmitted through the high-functional dichroic mirror, in which an incident angle θ of the excitation lights and the fluorescence to the high-functional dichroic mirror satisfies a formula of 0°

摘要翻译： 本申请提出了一种提供高效激光荧光显微镜的命题。 因此，本申请的激光激发荧光显微镜包括：照射具有不同波长的至少两种激发光的激光光源部; 收集样品上的两种激发光的集光部分; 设置在激光光源部和集光部之间的高分辨率反射镜，反射这两种激发光，使激发光入射到聚光部上，并透射在样品上产生的两种荧光; 以及检测部，其检测透过所述高功能分色镜的光，其中入射角＆ 的激发光和对高功能二向色镜的荧光满足0°<＆amp; t; <45°的公式。

公开(公告)号：US08310753B2

公开(公告)日：2012-11-13

申请号：US12632007

申请日：2009-12-07

申请人： Fumio Suzuki ,  Naoshi Aikawa ,  Kotaro Yamaguchi

发明人： Fumio Suzuki ,  Naoshi Aikawa ,  Kotaro Yamaguchi

IPC分类号： G02B21/00 ,  G02B27/14

CPC分类号： G02B21/0036 ,  G02B21/0072 ,  G02B21/0076 ,  G02B26/105 ,  G02B27/0031

摘要： A confocal scanning microscope including: an objective system (second objective lens 23 and objective lens 24) illuminating a sample SA with illumination light; a scanning mechanism 31 scanning the sample SA to obtain an intensity signal; and a scanning optical system 32 provided between the scanning mechanism and the objective system. The scanning optical system composed of, in order from the scanning mechanism side, a first positive lens group G1, a second negative lens group G2, and a third positive lens group G3. The third lens group has two chromatic aberration correction portions each formed by a positive lens and a negative lens or negative lens and positive lens. Glass materials are selected such that one performs chromatization and the other performs achromatization, thereby providing a confocal scanning microscope capable of correcting lateral chromatic aberration generated in the objective system in the specific wavelength region by the scanning optical system.

摘要翻译： 一种共焦扫描显微镜，包括：用照明光照射样品SA的物镜系统（第二物镜23和物镜24） 扫描机构31扫描样本SA以获得强度信号; 以及设置在扫描机构和物镜系统之间的扫描光学系统32。 扫描光学系统按照扫描机构侧的顺序由第一正透镜组G1，第二负透镜组G2和第三正透镜组G3构成。 第三透镜组具有由正透镜和负透镜或负透镜和正透镜形成的两个色像差校正部。 选择玻璃材料，使得一个进行着色，另一个进行消色化，从而提供能够通过扫描光学系统校正在特定波长区域中的物镜系统中产生的横向色差的共焦扫描显微镜。

公开(公告)号：US07271953B2

公开(公告)日：2007-09-18

申请号：US11081731

申请日：2005-03-17

申请人： Hisashi Okugawa ,  Naoshi Aikawa

发明人： Hisashi Okugawa ,  Naoshi Aikawa

IPC分类号： G02B21/06 ,  G02B21/00

CPC分类号： G02B21/0076 ,  G02B21/0044 ,  G02B21/008

摘要： A confocal microscope includes a light source that emits illuminating light beam, an illuminating optical system that irradiates the illuminating light beam onto a specimen, a condensing optical system that condenses the light reflected off the specimen and a light detection unit. The light detection unit includes a mask member, a movable shutter and a light detector. The mask member includes a plurality of reflecting/transmitting surfaces each constituting a light separating surface, and only the central portion of the light flux entering the mask member from the condensing optical system exits through a pinhole. The movable shutter opens or closes off a plurality of pinholes individually, and the light detector detects the light flux having passed through the pinholes.

摘要翻译： 共焦显微镜包括发射照明光束的光源，将照射光束照射到样本上的照明光学系统，冷凝从样本反射的光的聚光光学系统和光检测单元。 光检测单元包括掩模构件，可移动遮板和光检测器。 掩模构件包括多个反射/透射表面，每个反射/透射表面均构成光分离表面，并且只有从聚光系统进入掩模构件的光束的中心部分通过针孔排出。 可移动快门单独地打开或关闭多个针孔，并且光检测器检测穿过针孔的光通量。

公开(公告)号：US07256890B2

公开(公告)日：2007-08-14

申请号：US11281536

申请日：2005-11-18

申请人： Hisao Osawa ,  Naoshi Aikawa ,  Akira Adachi

发明人： Hisao Osawa ,  Naoshi Aikawa ,  Akira Adachi

IPC分类号： G01J3/28 ,  G01J3/447

CPC分类号： G02B27/286 ,  G01B9/04 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0294 ,  G01J3/18 ,  G01N21/21

摘要： A spectroscope capable of suppressing the dimension and the cost with avoiding a problem caused by polarization dependency of the diffraction grating. The spectroscope includes a polarizing beam splitter plate 3 that divides the light from an input fiber 1 into a first and a second optical paths and polarizes each light of each optical path having different direction of polarization with each other, a Fresnel rhomb half wave plate 5 that arranges the direction of polarization of the light in the first optical path into that in the second optical path and a plane mirror 4 that deflects the second optical path such that at least a portion of an area where the light through the first optical path is incident on the diffraction grating 6 and an area where the light through the second optical path is incident on the diffraction grating overlap each other.

摘要翻译： 能够抑制衍射光栅的偏振依赖性引起的问题的能够抑制尺寸和成本的分光器。 分光镜包括：偏振分束板3，其将来自输入光纤1的光分成第一和第二光路，并且使具有不同偏振方向的每个光路的每个光彼此偏振;菲涅耳菱形半波片5 其将第一光路中的光的偏振方向排列成第二光路中的偏振方向，以及平面镜4，其使第二光路偏转，使得通过第一光路的光的至少一部分区域为 入射在衍射光栅6上的入射光和穿过第二光路的光入射到衍射光栅上的区域彼此重叠。

公开(公告)号：US20100079858A1

公开(公告)日：2010-04-01

申请号：US12632007

申请日：2009-12-07

申请人： Fumio SUZUKI ,  Naoshi Aikawa ,  Kotaro Yamaguchi

发明人： Fumio SUZUKI ,  Naoshi Aikawa ,  Kotaro Yamaguchi

IPC分类号： G02B21/06

CPC分类号： G02B21/0036 ,  G02B21/0072 ,  G02B21/0076 ,  G02B26/105 ,  G02B27/0031

摘要： A confocal scanning microscope including: an objective system (second objective lens 23 and objective lens 24) illuminating a sample SA with illumination light; a scanning mechanism 31 scanning the sample SA to obtain an intensity signal; and a scanning optical system 32 provided between the scanning mechanism and the objective system. The scanning optical system composed of, in order from the scanning mechanism side, a first positive lens group G1, a second negative lens group G2, and a third positive lens group G3. The third lens group has two chromatic aberration correction portions each formed by a positive lens and a negative lens or negative lens and positive lens. Glass materials are selected such that one performs chromatization and the other performs achromatization, thereby providing a confocal scanning microscope capable of correcting lateral chromatic aberration generated in the objective system in the specific wavelength region by the scanning optical system.

摘要翻译： 一种共焦扫描显微镜，包括：用照明光照射样品SA的物镜系统（第二物镜23和物镜24） 扫描机构31扫描样本SA以获得强度信号; 以及设置在扫描机构和物镜系统之间的扫描光学系统32。 扫描光学系统按照扫描机构侧的顺序由第一正透镜组G1，第二负透镜组G2和第三正透镜组G3构成。 第三透镜组具有由正透镜和负透镜或负透镜和正透镜形成的两个色像差校正部。 选择玻璃材料，使得一个进行着色，另一个进行消色化，从而提供能够通过扫描光学系统校正在特定波长区域中的物镜系统中产生的横向色差的共焦扫描显微镜。

公开(公告)号：US20050213206A1

公开(公告)日：2005-09-29

申请号：US11081731

申请日：2005-03-17

申请人： Hisashi Okugawa ,  Naoshi Aikawa

发明人： Hisashi Okugawa ,  Naoshi Aikawa

IPC分类号： G01B11/14 ,  G01B11/24 ,  G02B21/00 ,  G02B21/06

CPC分类号： G02B21/0076 ,  G02B21/0044 ,  G02B21/008

摘要： A confocal microscope includes a light source that emits illuminating light beam, an illuminating optical system that irradiates the illuminating light beam onto a specimen, a condensing optical system that condenses the light reflected off the specimen and a light detection unit. The light detection unit includes a mask member, a movable shutter and a light detector. The mask member includes a plurality of reflecting/transmitting surfaces each constituting a light separating surface, and only the central portion of the light flux entering the mask member from the condensing optical system exits through a pinhole. The movable shutter opens or closes off a plurality of pinholes individually, and the light detector detects the light flux having passed through the pinholes.

摘要翻译： 共焦显微镜包括发射照明光束的光源，将照射光束照射到样本上的照明光学系统，冷凝从样本反射的光的聚光光学系统和光检测单元。 光检测单元包括掩模构件，可移动遮板和光检测器。 掩模构件包括多个反射/透射表面，每个反射/透射表面均构成光分离表面，并且只有从聚光系统进入掩模构件的光束的中心部分通过针孔排出。 可移动快门单独地打开或关闭多个针孔，并且光检测器检测穿过针孔的光通量。