公开(公告)号：US20030211761A1

公开(公告)日：2003-11-13

申请号：US10417544

申请日：2003-04-16

Applicant: Xerox Corporation

Inventor： David K. Fork ,  Ping Mei ,  Koenraad F. Van Schuylenbergh

IPC: H05K001/00 ,  H01R012/00

CPC classification number: H01L27/08 ,  H01F17/0033 ,  H01F41/041 ,  H01L21/4853 ,  H01L23/5227 ,  H01L24/11 ,  H01L2224/13099 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01042 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/30107 ,  H05K3/4092 ,  Y10T29/49147 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  H01L2924/00

Abstract: Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils are described. In one method the springs used to form out-of-plane structures are constrained via a tether to avoid bunching and entanglement. The high yield structure may be used in numerous electronic applications such as filter circuits.

公开(公告)号：US20030067037A1

公开(公告)日：2003-04-10

申请号：US10282265

申请日：2002-10-28

Applicant: Xerox Corporation

Inventor： Jeng Ping Lu ,  Ping Mei ,  James B. Boyce

IPC: H01L021/00 ,  H01L027/01 ,  H01L031/0392

CPC classification number: H01L29/66765 ,  H01L21/2254 ,  H01L29/78669

Abstract: An improved method and system for laser doping a semiconductor material is described. In the invention, phosphorous nitride is used as a dopant source. The phosphorous nitride is brought into close proximity with a region of the semiconductor to be doped. A pulse of laser light decomposes the phosphorous nitride and briefly melts the region of semiconductor to be doped to allow incorporation of dopant atoms from the phosphorous nitride into the semiconductor.

Abstract translation: 描述了用于激光掺杂半导体材料的改进的方法和系统。 在本发明中，使用氮化磷作为掺杂剂源。 使磷氮化物与要掺杂的半导体的区域紧密接近。 激光的脉冲分解氮化亚氮，并且短暂熔化要掺杂的半导体的区域，以允许将掺杂剂原子从氮化磷引入到半导体中。

公开(公告)号：US20030001222A1

公开(公告)日：2003-01-02

申请号：US09898321

申请日：2001-07-02

Applicant: Xerox Corporation

Inventor： Robert A. Street ,  Ping Mei ,  Jeffrey T. Rahn

IPC: H01L031/00 ,  H01L023/52

CPC classification number: H01L27/14658 ,  H01L23/5221 ,  H01L27/14643 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The signal-to-noise ratio of amorphous silicon (a-Si:H) image sensor arrays is limited by electronic noise, which is largely due to data line capacitance. To reduce data line capacitance, an air-gap (i.e., vacuum or gas-filled space) is produced at crossover points separating the data lines and gate lines. This air-gap crossover structure is formed by depositing a release material on the gate lines, forming the data lines on the release material, and then removing (etching) the release material such that the data lines form an arch extending over the gate lines. A dielectric material is then applied to strengthen the data line, and the sensor pixels are then formed.

Abstract translation: 非晶硅（a-Si：H）图像传感器阵列的信噪比受电子噪声限制，这主要是由于数据线电容。 为了减少数据线电容，在分隔数据线和栅极线的交叉点产生气隙（即，真空或气体填充的空间）。 这种气隙交叉结构通过在栅极线上沉积释放材料，在释放材料上形成数据线，然后去除（蚀刻）剥离材料，使得数据线形成在栅极线上延伸的拱形来形成。 然后施加电介质材料以加强数据线，然后形成传感器像素。

公开(公告)号：US20020110757A1

公开(公告)日：2002-08-15

申请号：US09780163

申请日：2001-02-09

Applicant: Xerox Corporation

Inventor： David K. Fork ,  Ping Mei ,  Koenraad F. Van Schuylenbergh

IPC: H01F005/00 ,  G03F007/00 ,  H01F027/28 ,  H01G002/00

CPC classification number: H01L27/08 ,  H01F17/0033 ,  H01F41/041 ,  H01L21/4853 ,  H01L23/5227 ,  H01L24/11 ,  H01L2224/13099 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01042 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/30107 ,  H05K3/4092 ,  Y10T29/49147 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  H01L2924/00

Abstract: Several methods and structures for improving the yield of out-of-plane micro-device structures including springs and coils are described. In one method the springs used to form out-of-plane structures are constrained via a tether to avoid bunching and entanglement. The high yield structure may be used in numerous electronic applications such as filter circuits.

Abstract translation: 描述了用于提高包括弹簧和线圈在内的平面外微结构结构的产量的几种方法和结构。 在一种方法中，用于形成平面外结构的弹簧通过绳索受到约束，以避免聚束和缠结。 高产量结构可用于许多电子应用中，例如滤波电路。