Thermo-compression bonding apparatus

    公开(公告)号:US3083595A

    公开(公告)日:1963-04-02

    申请号:US6096460

    申请日:1960-10-06

    Abstract: 995,853. Welding by pressure. WESTERN ELECTRIC CO. Inc. Sept. 27, 1961 [Oct. 6, 1960], No. 34662/61. Heading B3R. [Also in Division H1] An apparatus for bonding a wire-like element between two regions of an article such as a transistor has a tool which both feeds the element from a supply and acts as a bonding tool, the apparatus having means for positioning the tool in its bonding position over the first region of the article and for subsequently moving it through a predetermined distance to its bonding position over the second region. The manually-operated apparatus described has two units 10 and 11 for bonding wires respectively from terminals 13 1 and 13 on the header 15 of a semi-conductor device to the corresponding alloyed metal strips 14 1 and 14 on the semi-conductive wafer. Several headers are placed in a jig 20 sliding on the heater 17 used for the thermo-compression bonding, the jig being indexed so that the header to be worked on is centred under the lens 19 of a comparator 24. The heater is itself mounted on a table 18 which is movable in any direction in the horizontal plane so that the header may be correctly orientated, using the comparator, for bonding operations. Operation of the similar bonding units 10, 11 is identical, but one unit, e.g. unit 10, is put completely through its cycle before the other. Unit 10 consists of a hollow bonding tool 40 mounted with a wire supply reel 36 at the end of a weighted arm whose pivot point is mounted on a sliding block 26. Initially, the unit is retracted, as shown in Fig. 1, but after desired orientation of the header the unit 10 is pushed forward until its set screw 28 meets the flat face of a cam 50 (set at 180 degrees from the position shown in Fig. 3) which is mounted on the base of the apparatus. The bonding tool is now directly over the terminal 13 1 on the header (Fig. 6). A single movement of the cam lever 46 between its stops 49 1 and 49 first allows the weighted arm 33 to drop, bringing the bonding tool into contact with the terminal post on the heated header and then, a bond having been formed, returns the arm to its raised position. Rotation of cam 50 (to the position shown in Fig. 3) now retracts the bonding unit through the predetermined distance necessary to bring the bonding tool over the alloyed strips on the wafer. Cam lever 46 is rotated back to its stop 49 1 again causing the tool to descend, bond, and rise, so that the wire 12 1 is now joined between the terminal and the alloy stripe. Next, the unit 10 is fully retracted. During this stage a lever 60 attached to the unit is depressed against the supply reel 36, preventing the reel from rotating and so breaking the wire at its weakest point, adjacent the bond on the alloyed stripe (Fig. 12). The broken end of the wire issuing from the tool is reformed about the cylinder 43 on the tip of the tool by contact with a cross-piece 64, and is ready for subsequent bonding operations. The other unit, 11, is now operated to connect terminal 13 to stripe 14, and the process repeated on the other headers. It is pointed out that although a manually-operated apparatus is described the apparatus readily lends itself to complete mechanization.

    Method for scrubbing thin, fragile slices of material
    8.
    发明授权
    Method for scrubbing thin, fragile slices of material 失效
    用于稀释薄膜的方法,材料的易碎材料

    公开(公告)号:US3664872A

    公开(公告)日:1972-05-23

    申请号:US3664872D

    申请日:1970-09-18

    CPC classification number: B08B11/02 B08B1/02 H01L21/67028

    Abstract: Simultaneously, both sides of a thin, fragile slice of brittle material, such as single-crystal silicon, are scrubbed. The slices are loaded, one at a time, into a rotatable disc having pockets formed in the periphery thereof. The disc conveys the slices between two opposed counter-rotatable brushes within a detergent spray. After passing the rotatable brushes, the slices drop from the disc and float through the detergent bath to a container positioned below the disc.

    Abstract translation: 同时,对脆性材料(例如单晶硅)的薄的易碎片材的两面进行擦洗。 将切片一次一个地装载到具有形成在其周边中的凹穴的可旋转盘中。 盘片在洗涤剂喷雾器内的两个相对的可反转的刷子之间传送切片。 通过可旋转的刷子之后,切片从盘下落并通过洗涤剂浴漂浮到位于盘下方的容器。

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