公开(公告)号：US09899212B2

公开(公告)日：2018-02-20

申请号：US15130208

申请日：2016-04-15

申请人： The University of Rochester

发明人： Alexander Shestopalov ,  James McGrath ,  Xunzhi Li

IPC分类号： H01L21/31 ,  H01L21/02 ,  C23C16/00 ,  C23C16/48

CPC分类号： H01L21/0228 ,  C23C16/00 ,  C23C16/482 ,  H01L21/02112

摘要： Methods and compositions for depositing a monolayer onto a surface of a substrate are described. The method can include contacting the surface with a vapor phase comprising a carbene source, and reacting a carbene group from the carbene source with a functional group on the surface, to obtain a covalently bound monolayer on the surface of the substrate. The carbene source can be a diazirine compound. The functional group on the surface can be a C—H containing group, a Si—H containing group, among others, or combinations thereof. The method can further involve removing physisorbed molecules from the surface of the substrate.

公开(公告)号：US20160307747A1

公开(公告)日：2016-10-20

申请号：US15130208

申请日：2016-04-15

申请人： The University of Rochester

发明人： Alexander Shestopalov ,  James McGrath ,  Xunzhi Li

IPC分类号： H01L21/02 ,  C23C16/455

CPC分类号： H01L21/0228 ,  C23C16/00 ,  C23C16/482 ,  H01L21/02112

摘要： Methods and compositions for depositing a monolayer onto a surface of a substrate are described. The method can include contacting the surface with a vapor phase comprising a carbene source, and reacting a carbene group from the carbene source with a functional group on the surface, to obtain a covalently bound monolayer on the surface of the substrate. The carbene source can be a diazirine compound. The functional group on the surface can be a C—H containing group, a Si—H containing group, among others, or combinations thereof. The method can further involve removing physisorbed molecules from the surface of the substrate.

摘要翻译： 描述了将单层沉积到基底表面上的方法和组合物。 该方法可以包括使表面与包含卡宾源的气相接触，并将来自卡宾源的卡宾基团与表面上的官能团反应，以在基材的表面上获得共价结合的单层。 卡宾源可以是二氮嗪化合物。 表面上的官能团可以是含C-H的基团，含Si-H的基团，或其组合。 该方法还可以包括从衬底的表面去除物理吸附分子。