公开(公告)号：US20180050904A1

公开(公告)日：2018-02-22

申请号：US15543150

申请日：2017-02-07

Applicant: The Curators of the University of Missouri

Inventor： Shubhra GANGOPADHYAY ,  Sangho BOK ,  Samiullah PATHAN ,  Cherian Joseph MATHAI ,  Sagnik BASURAY ,  Keshab GANGOPADHYAY ,  Biyan CHEN ,  Shelia GRANT ,  Aaron WOOD

IPC: B82B3/00 ,  C08J5/00 ,  C01G23/04

CPC classification number: H01L51/5275 ,  B82B3/0038 ,  B82B3/0047 ,  B82Y40/00 ,  C01G23/04 ,  C08J5/005 ,  G02B1/04 ,  G02B1/12 ,  G02B1/14 ,  G02B1/18 ,  G02B5/008 ,  G02B5/18 ,  G02B5/1809 ,  G02B5/1847 ,  G02B5/1852 ,  G02B5/1861 ,  G02B5/1866 ,  G02B5/203 ,  G02B5/3058 ,  G02B27/42 ,  G02B27/4244 ,  G02B27/44 ,  H01L21/02107 ,  H01L21/02109 ,  H01L21/02112 ,  H01L51/52 ,  H01L51/5209 ,  H01L51/5215 ,  H01L51/5218

Abstract: Provided are nanograting structures and methods of fabrication thereof that allow for stable, robust gratings and nanostructure embedded gratings that enhance electromagnetic field, fluorescence, and photothermal coupling through surface plasmon or, photonic resonance. The gratings produced exhibit long term stability of the grating structure and improved shelf life without degradation of the properties such as fluorescence enhancement. Embodiments of the invention build nanograting structures layer-by-layer to optimize structural and optical properties and to enhance durability.