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公开(公告)号:US20050087093A1
公开(公告)日:2005-04-28
申请号:US10933325
申请日:2004-09-03
申请人: Takazumi Ishizu , Hideo Takaki , Michio Sebata
发明人: Takazumi Ishizu , Hideo Takaki , Michio Sebata
CPC分类号: B61F5/20
摘要: The invention provides a railway car body that causes less noise and that can be manufactured easily. The railway car comprises a subframe 40 disposed below a floor of the car body with a clearance therebetween, and a bogie 30 disposed below the subframe 40 with a clearance therebetween, wherein car body 10 and subframe 40 are connected via a center pin 50 protruding downward from car body 10, and subframe 40 and bogie 30 are connected via a second center pin 70 protruding upward from the bogie. The lower end of the second center pin 70 is connected to the bogie 30 via a coupling link 110.
摘要翻译: 本发明提供一种能够容易制造噪音小的铁路车体。 铁路车辆包括设置在车体底部之下的副车架40,其间具有间隙,以及设置在副车架40下方的间隙的转向架30,其中车体10和副车架40经由向下突出的中心销50连接 从车体10和副车架40以及转向架30经由从转向架向上突出的第二中心销70连接。 第二中心销70的下端经由连结连杆110与转向架30连接。
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公开(公告)号:US4746343A
公开(公告)日:1988-05-24
申请号:US924771
申请日:1986-10-30
CPC分类号: F25J3/04393 , F25J3/04284 , F25J3/0429 , F25J3/04303 , F25J3/044 , F25J3/04412 , F25J3/04787 , F25J2200/72 , F25J2245/40 , F25J2290/12 , Y10S62/939
摘要: The invention discloses a method of gas separation which pressurizes part of a raw gas issuing from the outlet of an adsorbing tower by employing a compressor portion of an expander compressor, cools the pressurized gas by means of a main heat exchanger, and expands the cooled gas by means of an expansion turbine of the expander compressor, thereby efficiently carrying out gas separation with a simple arrangement.
摘要翻译: 本发明公开了一种气体分离方法,其通过使用膨胀机压缩机的压缩机部分对从吸附塔的出口排出的原料气体的一部分进行加压,通过主热交换器冷却加压气体,并使冷却气体 通过膨胀机压缩机的膨胀涡轮机,由此以简单的方式有效地进行气体分离。
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公开(公告)号:US06482747B1
公开(公告)日:2002-11-19
申请号:US09218038
申请日:1998-12-22
申请人: Kazue Takahashi , Saburo Kanai , Yoshiaki Satou , Takazumi Ishizu
发明人: Kazue Takahashi , Saburo Kanai , Yoshiaki Satou , Takazumi Ishizu
IPC分类号: H01L213065
CPC分类号: C23F4/00 , H01J37/3244 , H01J37/32834 , H01J2237/3322 , H01L21/32136 , H01L21/6875
摘要: Plasma treatment apparatus and method in which an influence on the treatment characteristics of reaction products in plasma treatment such as etching is offset, thereby enabling uniform treatment characteristics to be obtained in the plane of a substrate are provided. In a plasma treatment method of treating a substrate to be processed by using a gas plasma via a mask in a treatment chamber, plasma treatment is performed while optimizing an amount of deposition of a side wall protection layer, equalizing the optimized deposition amount in the center of the substrate and that in a peripheral part, and maintaining the uniformity in the plane of the side wall protection layer.
摘要翻译: 提供了等离子体处理装置和方法,其中对诸如蚀刻的等离子体处理中的反应产物的处理特性的影响被偏移,从而能够在基板的平面中获得均匀的处理特性。 在处理室中经由掩模使用气体等离子体处理待处理基板的等离子体处理方法中,在优化侧壁保护层的沉积量的同时进行等离子体处理,使中心的最佳沉积量均匀化 并且保持在侧壁保护层的平面中的均匀性。
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公开(公告)号:US6156663A
公开(公告)日:2000-12-05
申请号:US721732
申请日:1996-09-27
申请人: Katsuya Watanabe , Saburo Kanai , Ryoji Hamasaki , Tsuyoshi Yoshida , Yutaka Omoto , Masayuki Kojima , Syunji Sasabe , Tadamitsu Kanekiyo , Takazumi Ishizu
发明人: Katsuya Watanabe , Saburo Kanai , Ryoji Hamasaki , Tsuyoshi Yoshida , Yutaka Omoto , Masayuki Kojima , Syunji Sasabe , Tadamitsu Kanekiyo , Takazumi Ishizu
IPC分类号: H01J37/32 , H01L21/3213 , H01L21/00
CPC分类号: H01J37/32477 , C23F4/00 , H01J37/32192 , H01L21/32136
摘要: Provided is a method of processing a sample by generating plasma by an electromagnetic wave, wherein a material containing carbon, such as silicon carbide (Sic), is disposed in a vacuum container serving as a discharge region. The inside of an etching chamber is cleaned by O.sub.2 cleaning treatment by using a sheet type dry etching apparatus, and after an inner wall temperature of the etching chamber is set and controlled, a sample is conveyed into the etching chamber, and a TiN cap layer, an Al--Cu alloy layer and a TiN barrier layer are plasma-etched in order by using BCl.sub.3 /Cl.sub.2 /CH.sub.4 /Ar gases with the pattern of a resist film as a mask.
摘要翻译: 提供了一种通过电磁波产生等离子体来处理样品的方法,其中在用作放电区域的真空容器中设置含有碳的材料,例如碳化硅(Sic)。 通过使用片式干蚀刻装置通过O 2清洗处理来清洁蚀刻室的内部,并且在设置和控制蚀刻室的内壁温度之后,将样品输送到蚀刻室中,并且将TiN盖层 ,通过使用具有抗蚀剂膜的图案的BCl 3 / Cl 2 / CH 4 / Ar气体作为掩模,依次等离子体蚀刻Al-Cu合金层和TiN阻挡层。
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公开(公告)号:US5122175A
公开(公告)日:1992-06-16
申请号:US531249
申请日:1990-05-31
申请人: Shozi Koyama , Takazumi Ishizu , Junichi Hosokawa , Masahiro Yamazaki , Shinjiroo Ueda , Kanji Fujimori
发明人: Shozi Koyama , Takazumi Ishizu , Junichi Hosokawa , Masahiro Yamazaki , Shinjiroo Ueda , Kanji Fujimori
CPC分类号: F25J3/044 , F25J3/04218 , F25J3/04284 , F25J3/04818 , F25J3/08 , F25J2200/02 , F25J2200/72 , F25J2205/40 , F25J2205/60 , F25J2205/84 , F25J2215/44 , F25J2220/42 , F25J2220/44 , F25J2250/20
摘要: The present invention consists in that a nitrogen gas line and a liquid nitrogen line are subjected to hot-blast baking with clean nitrogen gas and a gas containing oxygen, whereby outgasses such as moisture to develop from heat exchangers, valves and piping can be excluded. Moreover, in order to obtain nitrogen gas of very high purity, liquid nitrogen of low contents of high-boiling components as subjected to rectifying separation is derived and gasified, and the liquid nitrogen is introduced into co-adsorbers so as to absorb and remove carbon monoxide difficult of separation by the rectifying separation, whereupon the liquid nitrogen and the nitrogen gas are obtained as products.
摘要翻译: 本发明的目的在于,将氮气管线和液氮管线用干净的氮气和含氧的气体进行热风烘烤,从而可以排除由热交换器,阀门和管道形成的诸如水分的气体。 此外,为了得到非常高纯度的氮气,得到低浓度高沸点组分的经过精馏分离的液氮并气化,将液氮引入共吸附剂中以吸收和除去碳 通过精馏分离难以分离的一氧化碳,由此获得液氮和氮气作为产物。
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公开(公告)号:US20060060300A1
公开(公告)日:2006-03-23
申请号:US11274321
申请日:2005-11-16
申请人: Kazue Takahashi , Saburo Kanai , Yoshiaki Satou , Takazumi Ishizu
发明人: Kazue Takahashi , Saburo Kanai , Yoshiaki Satou , Takazumi Ishizu
IPC分类号: H01L21/306
CPC分类号: C23F4/00 , H01J37/3244 , H01J37/32834 , H01J2237/3322 , H01L21/32136 , H01L21/6875
摘要: A plasma treatment method of etching a substrate to be processed by using a gas plasma in a treatment chamber. The method includes exhausting reaction products obtained by etching and released into a vapor phase as a gas from the treatment chamber, wherein the reaction products on an outer periphery of the substrate are more efficiently exhausted and setting a deposition probability of the reaction products in a central part of a plane of the substrate to be low and setting a deposition probability of the reaction products in a peripheral part of a plane of the substrate to be high. The setting of the deposition probability is effected by setting a temperature in the central part of the substrate higher than a temperature in the peripheral part of the substrate.
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公开(公告)号:US4746332A
公开(公告)日:1988-05-24
申请号:US911451
申请日:1986-09-25
CPC分类号: C01B21/0466 , B01D53/04 , C01B21/045 , F25J3/04636 , B01D2253/108 , B01D2256/10 , B01D2257/104 , B01D2259/40088 , B01D2259/402 , B01D53/0423 , C01B2210/0042 , C01B2210/0045 , F25J2200/04 , F25J2205/40 , F25J2205/60 , F25J2215/44
摘要: Nitrogen having purity of 99.9999% or more can be produced continuously by contacting a starting gas mixture comprising 90% by volume or more of nitrogen and 10% by volume or less of oxygen with A-type zeolite package in an adsorption column at an adsorption temperature of -100.degree. to -196.degree. C. to remove oxygen from the starting gas mixture and regenerating A-type zeolite by heating it at a temperature higher than the adsorption temperature.
摘要翻译: 通过在吸附塔中以吸附温度使吸附塔中的含有90体积%以上的氮和10体积%以下的氧的原料气体混合物与A型沸石组合物接触,可以连续制造纯度为99.9999%以上的氮 -100℃至-196℃,以从原料气体混合物中除去氧气,并通过在高于吸附温度的温度下加热来再生A型沸石。
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公开(公告)号:US4704139A
公开(公告)日:1987-11-03
申请号:US904112
申请日:1986-09-04
申请人: Akio Yamamoto , Takazumi Ishizu , Kiyoshi Ichihara
发明人: Akio Yamamoto , Takazumi Ishizu , Kiyoshi Ichihara
摘要: A method of separating gases which includes: a step which introduces into a separating cell a mixture gas that contains paramagnetic gases and nonparamagnetic gases, and which separates the paramagnetic gases and the nonparamagnetic gases from the mixture gas via a permeable membrane in the separating cell; and a step which applies a magnetic field to a gas stream of the mixture gas nearly at right angles therewith to form a high gradient magnetic field region, so that the paramagnetic gases and the nonparamagnetic gases are separated from the mixture gas by the high gradient magnetic field. An apparatus for separating gases which includes: a separating cell having a permeable membrane arranged inside thereof; and a magnetic field generating device which applies a magnetic field nearly at right angles to a gas stream of a mixture gas that passes through the permeable membrane in the separating cell and that contains paramagnetic gases and nonparamagnetic gases, so that a high gradient magnetic field region is formed near a magnetic support member that corresponds to the permeable membrane. By utilizing the separation by membrane and the separation by a high gradient magnetic field in combination, the paramagnetic gases and nonparamagnetic gases are separated from the mixture gas efficiently and in large amounts.
摘要翻译: 一种分离气体的方法,包括:将分离池中含有顺磁性气体和非顺磁性气体的混合气体引入分离池的步骤,其通过分离池中的可渗透膜将顺磁性气体和非顺磁性气体与混合气体分离; 以及将混合气体的气流几乎与其成直角地施加磁场以形成高梯度磁场区域的步骤,使得顺磁性气体和非顺磁性气体通过高梯度磁铁与混合气体分离 领域。 一种用于分离气体的装置,包括:具有布置在其内的可渗透膜的分离单元; 以及磁场产生装置,该磁场产生装置与通过分离电池中的可渗透膜并且包含顺磁性气体和非顺磁性气体的混合气体的气流几乎成直角地施加磁场,使得高梯度磁场区域 形成在对应于可渗透膜的磁性支撑构件附近。 通过利用膜的分离和通过高梯度磁场的组合分离,顺磁性气体和非顺磁性气体有效地和大量地从混合气体中分离出来。
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