公开(公告)号：US20160341656A1

公开(公告)日：2016-11-24

申请号：US14719991

申请日：2015-05-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Shao Liu ,  Emerson Cheng ,  Yi-Hsien Chang ,  Chun-Ren Cheng ,  Ching-Ray Chen ,  Alex Kalnitsky ,  Allen Timothy Chang

IPC: G01N21/03 ,  H01L27/146 ,  G01N21/64

CPC classification number: B01L3/50 ,  B01L3/502715 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0887 ,  B01L2300/168 ,  B01L2300/1827 ,  B01L2400/0424 ,  G01N21/6428 ,  G01N21/6454 ,  G01N21/648 ,  G01N27/414 ,  G01N2021/6482 ,  H01L27/1203 ,  H01L27/1211

Abstract: The present disclosure relates to an integrated chip having an integrated optical bio-sensor, and an associated method of fabrication. In some embodiments, the integrated optical bio-sensor has a sensing device arranged within a semiconductor substrate. An optical waveguide structure is located over a first side of the semiconductor substrate at a position over the sensing device. A dielectric structure is disposed onto the optical waveguide structure at a position that separates the optical waveguide structure from a sample retention area configured to receive a sample solution.

Abstract translation: 本公开涉及具有集成光学生物传感器的集成芯片以及相关联的制造方法。 在一些实施例中，集成光学生物传感器具有布置在半导体衬底内的感测装置。 光学波导结构位于半导体衬底的位于传感器件上方的位置的第一侧上。 在将光波导结构与被配置为接收样品溶液的样品保留区域分离的位置处设置在光波导结构上的电介质结构。

公开(公告)号：US09968927B2

公开(公告)日：2018-05-15

申请号：US14719991

申请日：2015-05-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Shao Liu ,  Emerson Cheng ,  Yi-Hsien Chang ,  Chun-Ren Cheng ,  Ching-Ray Chen ,  Alex Kalnitsky ,  Allen Timothy Chang

IPC: H01L27/12 ,  G01N27/414 ,  G01N21/64 ,  B01L3/00

CPC classification number: B01L3/50 ,  B01L3/502715 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0887 ,  B01L2300/168 ,  B01L2300/1827 ,  B01L2400/0424 ,  G01N21/6428 ,  G01N21/6454 ,  G01N21/648 ,  G01N27/414 ,  G01N2021/6482 ,  H01L27/1203 ,  H01L27/1211

Abstract: The present disclosure relates to an integrated chip having an integrated optical bio-sensor, and an associated method of fabrication. In some embodiments, the integrated optical bio-sensor has a sensing device arranged within a semiconductor substrate. An optical waveguide structure is located over a first side of the semiconductor substrate at a position over the sensing device. A dielectric structure is disposed onto the optical waveguide structure at a position that separates the optical waveguide structure from a sample retention area configured to receive a sample solution.