公开(公告)号：US20240404857A1

公开(公告)日：2024-12-05

申请号：US18412310

申请日：2024-01-12

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chen-Hao LIAO ,  Pei-Yu LEE ,  Chih-Tsung LEE ,  Cheng-Lung WU ,  Jiun-Rong PAI

IPC: H01L21/677 ,  H01L21/324 ,  H01L21/673

Abstract: Base plates of a substrate retainer transportation mechanism are provided with damping members to assist elastic members in damping and limiting movement of the substrate retainer transportation mechanism when the substrate transportation mechanism is subjected to unwanted external forces, e.g., seismic forces. By damping and limiting movement of the substrate retainer transportation mechanism, undesirable damage to substrates contained in a substrate retainer being carried by the substrate retainer transport mechanism can be minimized.

公开(公告)号：US20250114803A1

公开(公告)日：2025-04-10

申请号：US18484339

申请日：2023-10-10

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Cheng-Lung WU ,  Yang-Ann CHU ,  Hsu-Shui LIU ,  Jiun-Rong PAI

IPC: B05B1/00 ,  B05B13/02

Abstract: A plurality of purge nozzles of a purge load port include a nozzle gasket and a nozzle structure to inject a purging fluid into and through an internal chamber of a container (e.g., a FOUP) that is configured to, in operation, transport wafers or workpieces between various locations within a FAB. The nozzle gasket includes a deformable structure that abuts against a surface of a nozzle structure and a sealing structure opposite to the deformable structure that forms a seal between the container and the nozzle gasket. A nozzle hole of a nozzle of the nozzle structure includes a threaded region or portion that is configured to receive a threaded stopper structure to seal off the nozzle hole.