公开(公告)号：US20230275553A1

公开(公告)日：2023-08-31

申请号：US17683086

申请日：2022-02-28

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Steffen Paul LINK ,  Ting-Ta YEN ,  Jeronimo SEGOVIA-FERNANDEZ

IPC: H03H9/02 ,  H03H3/04 ,  H03H9/17

CPC classification number: H03H9/02015 ,  H03H3/04 ,  H03H9/175 ,  H03H2003/0435

Abstract: In some examples, an apparatus includes a first metal layer having a thickness, a piezoelectric material layer having a first side and a second side that is opposite the first side, the piezoelectric material layer first side abutting the first metal layer, the piezoelectric material layer second side having recesses, and a second metal layer abutting the piezoelectric material layer second side, the second metal layer having extensions that fill the recesses to form a metal frame that is at least partially recessed into the piezoelectric material layer. The first metal layer, the piezoelectric material layer, and the second metal layer form a resonator body. The metal frame has a shape governing a resonant mode of the resonator body.