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公开(公告)号:US11834331B2
公开(公告)日:2023-12-05
申请号:US17514282
申请日:2021-10-29
Applicant: Texas Instruments Incorporated
Inventor: Scott Robert Summerfelt , Adam Joseph Fruehling
CPC classification number: B81C1/00333 , B81B7/0077 , H01H45/02 , B81B2203/0315 , B81C2203/019 , B81C2203/0136 , H01H1/0036
Abstract: A micro-electromechanical system (MEMS) device includes a moveable element within a cavity. The MEMS device also includes a first layer over the cavity, the first layer having a first hole and a second hole. The first hole has a first diameter. The second hole has a second diameter. The second diameter is larger than the first diameter, and the second hole is farther from the moveable element than the first hole. The first hole is sealed with a first dielectric material. The second hole is sealed with a second dielectric material. The cavity filled with a gas at a pressure of at least approximately 10 torr.
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公开(公告)号:US20230333514A1
公开(公告)日:2023-10-19
申请号:US18332789
申请日:2023-06-12
Applicant: Texas Instruments Incorporated
Inventor: Juan Alejandro Herbsommer , Argyrios Dellis , Adam Joseph Fruehling
Abstract: In some examples, an apparatus comprises a substrate, an interposer mechanically coupled to the substrate, a gas cell on at least part of the interposer, and a plate on the gas cell and mechanically coupled to the interposer. Some examples of the apparatus are configured to be millimeter wave devices.
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公开(公告)号:US10589986B2
公开(公告)日:2020-03-17
申请号:US15696245
申请日:2017-09-06
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Adam Joseph Fruehling , Juan Alejandro Herbsommer , Simon Joshua Jacobs , Benjamin Stassen Cook , James F. Hallas , Randy Long
Abstract: An electronic device includes a package substrate, a circuit assembly, and a housing. The circuit assembly is mounted on the package substrate. The circuit assembly includes a first sealed cavity formed in a device substrate. The housing is mounted on the package substrate to form a second sealed cavity about the circuit assembly.
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公开(公告)号:US20190204788A1
公开(公告)日:2019-07-04
申请号:US16234499
申请日:2018-12-27
Applicant: Texas Instruments Incorporated
Inventor: Argyrios Dellis , Juan Alejandro Herbsommer , Adam Joseph Fruehling
Abstract: A clock apparatus with a gas cell. The gas cell includes: (i) a first chamber including a sealed interior for providing a signal waveguide; and (ii) a second chamber, in fluid communication with the first chamber, and comprising apparatus for directing atoms having a selected velocity vector into the first chamber.
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公开(公告)号:US20190179134A1
公开(公告)日:2019-06-13
申请号:US15836521
申请日:2017-12-08
Applicant: Texas Instruments Incorporated
Inventor: Adam Joseph Fruehling , James Norman Hall
CPC classification number: G02B26/06 , B81B2201/04 , G02B26/0833 , G02B26/0841 , G09G3/3466
Abstract: In methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator, an example apparatus includes: an electrode with spring legs; a base electrode; a mirror displacement determiner to determine a periodic signal corresponding to a displacement distance of the electrode beyond an instability point of the electrode; and a voltage source to output a periodic voltage to the base electrode in response to the periodic signal. The periodic voltage causes the spring legs to vary displacement of the electrode with respect to the base electrode according to the periodic voltage. The displacement includes distances beyond the instability point.
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公开(公告)号:US12140751B2
公开(公告)日:2024-11-12
申请号:US17114369
申请日:2020-12-07
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Adam Joseph Fruehling , James Norman Hall
Abstract: A phase light modulator includes a base plate, a mirror, a perforated hinge plate, and first second support posts. The perforated hinge plate supports the mirror. The perforated hinge plate has first and second flexural arms. The perforated hinge plate is configured to move toward or away from the base plate based on application of a potential difference between the base plate and the perforated hinge plate. The first flexural arm is connected to the first support posts, and the second flexural arm is connected to the second support post.
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公开(公告)号:US20240045381A1
公开(公告)日:2024-02-08
申请号:US18491304
申请日:2023-10-20
Applicant: Texas Instruments Incorporated
Inventor: Juan Alejandro Herbsommer , Argyrios Dellis , Adam Joseph Fruehling
Abstract: In an example, an apparatus comprises a sealed container containing a dipolar gas. The apparatus also comprises a first transmit antenna, a second transmit antenna, and a receive antenna each communicatively coupled to the sealed container. The apparatus also comprises a control circuit including a transceiver, the control circuit having a first transmit output, a second transmit output, and a receive input, the first transmit output coupled to the first transmit antenna, the second transmit output coupled to the second transmit antenna, and the receive input coupled to the receive antenna.
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公开(公告)号:US11258154B2
公开(公告)日:2022-02-22
申请号:US16700476
申请日:2019-12-02
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Adam Joseph Fruehling , Benjamin Stassen Cook , Juan Alejandro Herbsommer , Swaminathan Sankaran
Abstract: An apparatus includes a substrate containing a cavity and a dielectric structure covering at least a portion of the cavity. The cavity is hermetically sealed. The apparatus also may include a launch structure formed on the dielectric structure and outside the hermetically sealed cavity. The launch structure is configured to cause radio frequency (RF) energy flowing in a first direction to enter the hermetically sealed cavity through the dielectric structure in a direction orthogonal to the first direction.
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公开(公告)号:US20210354977A1
公开(公告)日:2021-11-18
申请号:US17320188
申请日:2021-05-13
Applicant: Texas Instruments Incorporated
Inventor: Scott Robert Summerfelt , Adam Joseph Fruehling , Kelly Jay Taylor
IPC: B81B3/00
Abstract: In described examples, a microelectromechanical system (MEMS) is located on a substrate. A silicon nitride (SiN) layer on a portion of the substrate. A mechanical structure has first and second ends. The first end is embedded in the SiN layer, and the second end is cantilevered from the SiN layer.
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公开(公告)号:US11119038B1
公开(公告)日:2021-09-14
申请号:US16845962
申请日:2020-04-10
Applicant: Texas Instruments Incorporated
Inventor: Argyrios Dellis , Adam Joseph Fruehling , Bichoy Bahr , Juan Herbsommer
IPC: G01N21/3581 , G01J3/447 , G01J3/42 , G01J3/10
Abstract: A millimeter wave molecular sensor system is provided. The system includes a physics cell configured to contain a sample, a directional coupler configured to receive input millimeter waves, partition the input millimeter waves into a pump signal and a probe signal for transfer to the physics cell, a receiver configured to receive millimeter waves exiting the physics cell, a Faraday rotator coupled between a pump transmitter and the physics cell, and a coupling iris coupled between the Faraday rotator and the physics cell, configured to pass millimeter waves having a first polarization into the physics cell. The Faraday rotator includes a Faraday material, and an electronic device configured to apply a magnetic field to the Faraday material parallel to a propagation direction of the millimeter waves such that when the electronic device is activated, the Faraday material rotates a polarization of the millimeter waves passing through the Faraday rotator.
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