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1.发明授权Method for recovery and recycling hydrogen and silicon halides from silicon deposition reactor exhaust 失效从硅沉积反应器废气中回收和回收氢和硅卤化物的方法
公开(公告)号：US3091517A
公开(公告)日：1963-05-28
申请号：US85532759
申请日：1959-11-25
Applicant: TEXAS INSTRUMENTS INC
Inventor： SHORT JOHN P , FISCHER JAMES L
IPC: C01B33/02
CPC classification number: C01B33/02
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公开(公告)号：US3093456A
公开(公告)日：1963-06-11
申请号：US75837958
申请日：1958-09-02
Applicant: TEXAS INSTRUMENTS INC
Inventor： RUNYAN WALTER R , ROSS JOHN W , FISCHER JAMES L
IPC: C01B33/037 , C30B13/14 , C30B15/10 , C30B35/00
CPC classification number: C01B33/037 , C30B13/14 , C30B15/10 , C30B35/002 , Y10S117/90 , Y10T117/1032
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