公开(公告)号：US20240186102A1

公开(公告)日：2024-06-06

申请号：US18410075

申请日：2024-01-11

Applicant: TECHNION RESEARCH & DEVELOPMENT FOUNDATION LIMITED

Inventor： Raphael DAHAN ,  Ido KAMINER ,  Michael YANNAI ,  Tal FISHMAN

IPC: H01J37/147 ,  H01J37/28

CPC classification number: H01J37/147 ,  H01J37/28

Abstract: A charged particles beam column for inspecting a sample in a sample plane is presented. The charged particles beam column comprises: a charged particles source generating a charged particles beam propagating along a general propagation path towards the sample plane; and at least one charged particles beam shaping unit. The charged particles shaping unit comprises at least one high-frequency electromagnetic radiation generator located in a vicinity of said general propagation path of the charged particles beam and controllably operated to perform synchronized generation of said high-frequency electromagnetic radiation towards at least one interaction region in said general propagation path, to cause interaction between said radiation and the charged particles, thereby directly affecting energy properties of the charged particles passing through said at least one interaction region in the general propagation path and directly affecting spectral resolution of the charged particles beam at said sample plane.