公开(公告)号：US12072256B2

公开(公告)日：2024-08-27

申请号：US17639167

申请日：2020-08-28

申请人： TDK CORPORATION

发明人： Masanori Kobayashi ,  Ken Unno ,  Tetsuya Sasahara ,  Kohei Nawaoka

IPC分类号： G01L19/14 ,  G01L9/00 ,  G01L9/04

CPC分类号： G01L19/147 ,  G01L9/04 ,  G01L9/0047 ,  G01L9/0048 ,  G01L9/0055 ,  G01L19/143

摘要： A sensor element suitable for miniaturization. This pressure sensor element has: a metal plate; an insulating film provided on a first surface, which is one surface of the metal plate, so as to form a covered region in which the first plate is covered and an exposed region in which the first surface is exposed; and a pressure detection circuit formed on the insulating film so as to be insulated from the first surface by means of the insulating film.

公开(公告)号：US12018992B2

公开(公告)日：2024-06-25

申请号：US17437736

申请日：2020-03-06

申请人： TDK CORPORATION

发明人： Masanori Kobayashi ,  Ken Unno

IPC分类号： G01L9/00 ,  G01L19/14

CPC分类号： G01L9/0052 ,  G01L19/145

摘要： A pressure sensor configured to prevent tearing or cracking of an insulating film for insulating between a stem and a detection circuit from occurring. A stem having a planar outer bottom surface, an outer side surface intersecting the outer bottom surface, and a pressure receiving inner surface that is the opposite surface to the outer bottom surface and receives pressure from a fluid to be measured; and a detection circuit provided to the outer bottom surface with an insulating film interposed therebetween. The stem has a foot part that: is formed to surround the outer bottom surface; consists of a surface which, when observed parallel to the outer bottom surface, faces a direction different from the direction of the outer bottom surface and the outer side surface; and connects between the outer bottom surface and the outer side surface. The insulating film covers a portion of the foot part.

公开(公告)号：US20240264013A1

公开(公告)日：2024-08-08

申请号：US18613244

申请日：2024-03-22

申请人： TDK CORPORATION

发明人： Kohei Nawaoka ,  Ken Unno ,  Masanori Kobayashi ,  Tetsuya Sasahara

IPC分类号： G01L1/22 ,  G01K7/22 ,  G01L9/04

CPC分类号： G01L1/22 ,  G01K7/22 ,  G01L9/04

摘要： A temperature-sensitive and strain-sensitive composite sensor includes a strain-sensitive resistive film and a temperature-sensitive resistive film. The strain-sensitive resistive film is represented by a formula of Cr(100-x-y)AlxNy, and 5