• 专利标题: Pressure sensor with tapered stem
  • 申请号: US17437736
    申请日: 2020-03-06
  • 公开(公告)号: US12018992B2
    公开(公告)日: 2024-06-25
  • 发明人: Masanori KobayashiKen Unno
  • 申请人: TDK CORPORATION
  • 申请人地址: JP Tokyo
  • 专利权人: TDK CORPORATION
  • 当前专利权人: TDK CORPORATION
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Oliff PLC
  • 优先权: JP 19043798 2019.03.11
  • 国际申请: PCT/JP2020/009673 2020.03.06
  • 国际公布: WO2020/184434A 2020.09.17
  • 进入国家日期: 2021-09-09
  • 主分类号: G01L9/00
  • IPC分类号: G01L9/00 G01L19/14
Pressure sensor with tapered stem
摘要:
A pressure sensor configured to prevent tearing or cracking of an insulating film for insulating between a stem and a detection circuit from occurring. A stem having a planar outer bottom surface, an outer side surface intersecting the outer bottom surface, and a pressure receiving inner surface that is the opposite surface to the outer bottom surface and receives pressure from a fluid to be measured; and a detection circuit provided to the outer bottom surface with an insulating film interposed therebetween. The stem has a foot part that: is formed to surround the outer bottom surface; consists of a surface which, when observed parallel to the outer bottom surface, faces a direction different from the direction of the outer bottom surface and the outer side surface; and connects between the outer bottom surface and the outer side surface. The insulating film covers a portion of the foot part.
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