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公开(公告)号：US20220328331A1
公开(公告)日：2022-10-13
申请号：US17809582
申请日：2022-06-29
Inventor： FU-HSIEN LI , SHENG-KANG YU , CHI-FENG TUNG , HSIANG YIN SHEN , GUANCYUN LI
IPC: H01L21/67 , B66C17/26 , B66C15/00 , B66C13/16 , B66C13/18 , G05B19/19 , G05B19/4061 , H01L21/677 , G03F7/20
Abstract: A system for a semiconductor fabrication facility includes a maintenance tool, a control unit, a first track, a second track, a maintenance crane movably mounted on the first track, a plurality of first sensors disposed on the first track, an OHT vehicle movably mounted on the second track, and a second sensor on the OHT vehicle. The first sensors detect a location of the maintenance crane and generate a first location data to the control unit. The second sensor generates a second location data to the control unit.
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公开(公告)号：US20240222166A1
公开(公告)日：2024-07-04
申请号：US18443342
申请日：2024-02-16
Inventor： FU-HSIEN LI , CHI-FENG TUNG , HSIANG YIN SHEN
IPC: H01L21/67 , B65G49/07 , B66C7/08 , B66C13/18 , G05B19/418 , H01L21/677
CPC classification number: H01L21/67242 , B65G49/07 , B66C7/08 , B66C13/18 , G05B19/41815 , H01L21/67727 , G05B2219/45031 , H01L21/67005
Abstract: A conveying unit includes a housing; a collision prevention mechanism disposed on a sidewall of the housing; a gripping member configured to hold a carrier for carrying a semiconductor structure; a sensor disposed on the gripping member and configured to measure and collect data associated with vibration of the gripping member; and an unit controller disposed on the gripping member and configured to analyze the data from the sensor and control a movement of the conveying unit.
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公开(公告)号：US20210272831A1
公开(公告)日：2021-09-02
申请号：US17321184
申请日：2021-05-14
Inventor： FU-HSIEN LI , CHI-FENG TUNG , HSIANG YIN SHEN
IPC: H01L21/677
Abstract: A transport system, including: a sensor, a controller and a power panel. The sensor determines a zone and sends a quantity information in response to a quantity of vehicles in the zone. The controller is arranged to send an output signal in accordance with the quantity information. The power panel is arranged to output a current in accordance with the output signal for driving vehicles in the zone, wherein the current is outputted to a cable extending through the zone.
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公开(公告)号：US20240087934A1
公开(公告)日：2024-03-14
申请号：US18518461
申请日：2023-11-23
Inventor： YONG-JYU LIN , FU-HSIEN LI , CHEN-WEI LU , CHI-FENG TUNG , HSIANG YIN SHEN
CPC classification number: H01L21/67733 , B65G1/0457 , B66C13/23 , B66C13/48 , B66C19/00 , B66F9/183 , H01L21/67259 , H01L21/67724 , H01L21/6773 , H01L21/67736 , B61B3/00 , B65G2201/0297
Abstract: A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.
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公开(公告)号：US20240071799A1
公开(公告)日：2024-02-29
申请号：US18503133
申请日：2023-11-06
Inventor： CHUAN WEI LIN , FU-HSIEN LI , YONG-JYU LIN , RONG-SHEN CHEN , CHI-FENG TUNG , HSIANG YIN SHEN
IPC: H01L21/68 , H01L21/677
CPC classification number: H01L21/68 , H01L21/67724 , H01L21/67733
Abstract: A system for a semiconductor fabrication facility comprises a transporting tool configured to move a carrier, a first manufacturing tool configured to accept the carrier facing in a first direction, a second manufacturing tool configured to accept the carrier facing in the second direction, and an orientation tool. The carrier is moved to the orientation tool by the transporting tool prior to being moved to the first manufacturing tool or the second manufacturing tool by the transporting tool. The orientation tool rotates the carrier so that the carrier is accepted by the first manufacturing tool or the second manufacturing tool. The transporting tool, the first manufacturing tool, the second manufacturing tool and the orientation tool are physically separated from each other.
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Patent Agency Ranking
公开(公告)号：US20200075375A1
公开(公告)日：2020-03-05
申请号：US16114953
申请日：2018-08-28
Inventor： FU-HSIEN LI , CHI-FENG TUNG , HSIANG YIN SHEN
IPC: H01L21/677 , A47L9/28 , A47L7/00
Abstract: An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OHT rails in the cleaning zone. The top cleaning part is coupled to the vacuum generator. The vacuum generator is turned on to perform a vacuum cleaning operation when the sensors detect the OHT vehicle entering the cleaning zone.
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公开(公告)号：US20220384230A1
公开(公告)日：2022-12-01
申请号：US17818370
申请日：2022-08-09
Inventor： YONG-JYU LIN , FU-HSIEN LI , CHEN-WEI LU , CHI-FENG TUNG , HSIANG YIN SHEN
Abstract: A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.
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公开(公告)号：US20220076975A1
公开(公告)日：2022-03-10
申请号：US17530927
申请日：2021-11-19
Inventor： FU-HSIEN LI , CHI-FENG TUNG , HSIANG YIN SHEN
IPC: H01L21/677 , A47L9/28 , A47L7/00
Abstract: An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OHT rails in the cleaning zone. The top cleaning part is coupled to the vacuum generator. The vacuum generator is turned on to perform a vacuum cleaning operation when the sensors detect the OHT vehicle entering the cleaning zone.
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公开(公告)号：US20210384052A1
公开(公告)日：2021-12-09
申请号：US17406006
申请日：2021-08-18
Inventor： FU-HSIEN LI , CHI-FENG TUNG , HSIANG YIN SHEN
IPC: H01L21/67 , G05B19/418 , H01L21/677 , B66C13/18 , B65G49/07 , B66C7/08
Abstract: A conveying unit includes a housing; a collision prevention mechanism disposed on a sidewall of the housing; a gripping member configured to hold a carrier for carrying a semiconductor structure; a sensor disposed on the gripping member and configured to measure and collect data associated with vibration of the gripping member; and an unit controller disposed on the gripping member and configured to analyze the data from the sensor and control a movement of the conveying unit.
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公开(公告)号：US20210118709A1
公开(公告)日：2021-04-22
申请号：US17134211
申请日：2020-12-25
Inventor： FU-HSIEN LI , SHENG-KANG YU , CHI-FENG TUNG , HSIANG YIN SHEN , GUANCYUN LI
IPC: H01L21/67 , B66C13/18 , B66C15/00 , B66C17/26 , G03F7/20 , G05B19/19 , G05B19/4061 , H01L21/677 , B66C13/16
Abstract: A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance crane, a rectangular zone overlapping with the load port of the manufacturing tool, a plurality of first sensors at corners of the rectangular zone, an OHT vehicle, a second sensor on the OHT vehicle, a third sensor on the load port, and a control unit. The first sensors are configured to detect a location of the maintenance crane and to generate a first location data. The second sensor is configured to generate a second location data. The control unit is configured to receive the first location data of the maintenance crane and the second location data of the OHT vehicle. The control unit further sends signals to the second sensor and the third sensor or to cut off the signal to the second sensor.
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