摘要:
When an incident light is obliquely incident on an index scale, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference occurs, which causes a phase difference in both of the diffracted lights incident on a photodetection element. According to the phase difference, intensity of a photoelectric detection signal output from the photodetection element changes. That is, due to a periodic change in the incident angle of the incident light, the phase difference between light A and light B is modulated, and the interference signal becomes greatly modulated.
摘要:
An encoder includes: a light modulation section which modulates at least a portion of light that is emitted from a light source; a moving member which has an incidence plane, on which a plurality of light beams of the light incident, and is relatively movable in at least one direction; and at least two light receiving sections which respectively receive interference fringes that are generated in at least two regions on the moving member, wherein the light enters into the moving member such that at least two interference fringes move in opposite directions on the moving member in accordance with a modulation by the light modulation section.
摘要:
An illumination light to be used for position measurement of a movable scale is spatially (or physically) split into a first illumination light and a second illumination light using a triangle prism, and the first and second illumination lights are made to be incident on the same position on the movable scale, so that positional information of the movable scale is detected by utilizing interference of the first and second illumination lights. The spatially split first and second illumination lights interfere with each other even when they are made to be incident on the same position of the movable scale and are completely overlapped with each other, which is different, for example, from the case of the ±1st order diffracted lights that are generated by an illumination light being ±1st order diffracted by a diffraction grating. Therefore, wasted illumination lights that do not contribute to the interference can be minimized and the use efficiency of illumination lights can be improved.
摘要:
A reflection mirror that causes an illumination light to be incident on a movable scale is oscillated in an X-axis direction based on a modulation signal. Accordingly, the optical path of the illumination light, of the illumination light and another illumination light generated at an index scale, periodically changes, and as a consequence, the illumination light is periodically modulated. Accordingly, an extra scanner that scans the illumination light or another illumination light with respect to the movable scale does not have to be arranged, which allows an apparatus to be reduced in size and cost.
摘要:
A light via first and second index scales is split by a beam splitter, and one of the split lights is received by a first light-receiving element via a movable scale and also the other of the split lights is received by a second light-receiving element via a reference scale, and therefore by computing positional information of the movable scale using an output of the first light-receiving element (a first output) and an output of the second light-receiving element (a second output), movement information of the movable scale can be measured with high precision without being affected by drift of the modulation center (the oscillation center) of the beam.
摘要:
A moving grating is arranged on a side of a wafer stage, a light source irradiates a light to the moving grating, diffracted lights generated from the moving grating are interfered by fixed scales and an index scale of which positional relation with the light source is fixed, and a detection instrument detects the interfered light. In this case, since the moving grating is arranged on a side of the wafer stage, upsizing of the entire wafer stage can be suppressed. Further, since interference occurs between a plurality of diffracted lights (e.g., the ±1st-order diffracted light) passing extremely close optical paths, influence caused by a fluctuation of ambient atmosphere becomes less in comparison to conventional interferometers, and thus, a high-precision measurement of positional information of the movable body is possible.
摘要:
When an incident light is obliquely incident on an index scale, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference occurs, which causes a phase difference in both of the diffracted lights incident on a photodetection element. According to the phase difference, intensity of a photoelectric detection signal output from the photodetection element changes. That is, due to a periodic change in the incident angle of the incident light, the phase difference between light A and light B is modulated, and the interference signal becomes greatly modulated.
摘要:
In the invention providing a board-to-board coaxial connector, a contact portion 17 is formed in an internal conductor housing portion 12 of a plug body 9 into which a receptacle center conductor 7 is to be inserted. The contact portion has: a stationary contact piece portion 10b which is perpendicularly bent from a solder connecting portion 10a of a plug internal conductor 10 to extend in the axial direction of the connector; and movable contact piece portions 10c which are continuous to the stationary contact piece portion, which are juxtaposed in a circumferential direction of the connector, and which extend in the axial direction of the connector.
摘要:
By forming a coaxial receptacle and a coaxial plug, for which the characteristic impedances have been adjusted, at the respective end portions of a receptacle-side insulating housing and a plug-side body constituting a multi-connector being a parallel connector part, a transmission line has been made possible in which a multi-connector is mated and the signals passing through the coaxial connector at the same time exhibit little reflection and radiation.
摘要:
A heat plate for fixation comprising: a metallic base plate; and a heating resistor arranged on a reverse face of the metallic base plate, the heating resistor being formed by laminating, at least, an electric insulating layer and heating resistor layer in this order on the metallic base plate, wherein the heat plate is capable of raising the temperature of the metallic base plate to a fixing temperature when the heating resistor layer is energized and heated. A semicircular heating member for fixation comprises the heat plate which is curved so that the metallic base plate has a convex surface, a belt type fixing device is provided with the semicircular heating member, and an electrophotographic image forming apparatus is provided with the belt type fixing device comprising the semicircular heating member.