Encoder that optically detects positional information of a scale
    1.
    发明授权
    Encoder that optically detects positional information of a scale 失效
    光学地检测刻度尺的位置信息的编码器

    公开(公告)号:US07601947B2

    公开(公告)日:2009-10-13

    申请号:US11798255

    申请日:2007-05-11

    IPC分类号: G01B9/02

    CPC分类号: G01D5/38

    摘要: When an incident light is obliquely incident on an index scale, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference occurs, which causes a phase difference in both of the diffracted lights incident on a photodetection element. According to the phase difference, intensity of a photoelectric detection signal output from the photodetection element changes. That is, due to a periodic change in the incident angle of the incident light, the phase difference between light A and light B is modulated, and the interference signal becomes greatly modulated.

    摘要翻译: 当入射光倾斜地入射到指数刻度上时,光A的光程长度比光B的光路长度长,并且产生光程长度差,导致两个衍射光入射的相位差 光电检测元件。 根据相位差,从光检测元件输出的光电检测信号的强度变化。 也就是说,由于入射光的入射角度的周期性变化,光A和光B之间的相位差被调制,并且干扰信号变得很大地被调制。

    Encoder that detects positional information of a moving body generating interference fringes that move in opposite directions
    2.
    发明授权
    Encoder that detects positional information of a moving body generating interference fringes that move in opposite directions 有权
    检测移动体的位置信息的编码器,产生沿相反方向移动的干涉条纹

    公开(公告)号:US08710426B2

    公开(公告)日:2014-04-29

    申请号:US13186015

    申请日:2011-07-19

    IPC分类号: G01D5/34

    CPC分类号: G01D5/38 G01D5/34746

    摘要: An encoder includes: a light modulation section which modulates at least a portion of light that is emitted from a light source; a moving member which has an incidence plane, on which a plurality of light beams of the light incident, and is relatively movable in at least one direction; and at least two light receiving sections which respectively receive interference fringes that are generated in at least two regions on the moving member, wherein the light enters into the moving member such that at least two interference fringes move in opposite directions on the moving member in accordance with a modulation by the light modulation section.

    摘要翻译: 编码器包括:光调制部,其对从光源发出的光的至少一部分进行调制; 具有入射面的移动构件,多个入射光束,并且能够在至少一个方向上相对移动; 以及至少两个光接收部分,其分别接收在所述移动构件上的至少两个区域中产生的干涉条纹,其中所述光进入所述移动构件,使得至少两个干涉条纹沿着所述移动构件沿相反方向在所述移动构件上移动 通过光调制部的调制。

    Encoder
    3.
    发明申请
    Encoder 审中-公开
    编码器

    公开(公告)号:US20080185506A1

    公开(公告)日:2008-08-07

    申请号:US12007676

    申请日:2008-01-14

    IPC分类号: G01D5/34

    CPC分类号: G01D5/34715 G01D5/38

    摘要: An illumination light to be used for position measurement of a movable scale is spatially (or physically) split into a first illumination light and a second illumination light using a triangle prism, and the first and second illumination lights are made to be incident on the same position on the movable scale, so that positional information of the movable scale is detected by utilizing interference of the first and second illumination lights. The spatially split first and second illumination lights interfere with each other even when they are made to be incident on the same position of the movable scale and are completely overlapped with each other, which is different, for example, from the case of the ±1st order diffracted lights that are generated by an illumination light being ±1st order diffracted by a diffraction grating. Therefore, wasted illumination lights that do not contribute to the interference can be minimized and the use efficiency of illumination lights can be improved.

    摘要翻译: 用于可移动刻度的位置测量的照明光在空间上(或物理地)被分割为第一照明光和使用三角形棱镜的第二照明光,并且使第一和第二照明光入射在其上 位置,从而通过利用第一和第二照明光的干涉来检测可动标尺的位置信息。 空间分离的第一和第二照明光即使当它们被入射到可移动标尺的相同位置并且彼此完全重叠时也彼此干涉,例如与±1的情况不同 由衍射光栅衍射的被照明光产生的±1级级衍射光。 因此,可以使对干扰无影响的浪费的照明灯最小化,能够提高照明光的使用效率。

    Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element
    4.
    发明授权
    Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element 有权
    通过光学元件的周期性振荡改变路径长度来光学地检测可移动体的位置信息的编码器

    公开(公告)号:US08222594B2

    公开(公告)日:2012-07-17

    申请号:US12731725

    申请日:2010-03-25

    IPC分类号: G01D5/34

    CPC分类号: G01D5/38 G02B26/0808

    摘要: A reflection mirror that causes an illumination light to be incident on a movable scale is oscillated in an X-axis direction based on a modulation signal. Accordingly, the optical path of the illumination light, of the illumination light and another illumination light generated at an index scale, periodically changes, and as a consequence, the illumination light is periodically modulated. Accordingly, an extra scanner that scans the illumination light or another illumination light with respect to the movable scale does not have to be arranged, which allows an apparatus to be reduced in size and cost.

    摘要翻译: 使照明光入射到可动标尺上的反射镜基于调制信号在X轴方向上振荡。 因此,照明光的照明光的光路和在指标处产生的其他照明光周期性地变化,结果周期性地调制照明光。 因此,不需要布置扫描照明光或相对于可动标尺的另一照明光的额外的扫描器,这允许设备的尺寸和成本降低。

    Positional information detecting device
    5.
    发明授权
    Positional information detecting device 有权
    位置信息检测装置

    公开(公告)号:US07723671B2

    公开(公告)日:2010-05-25

    申请号:US12144936

    申请日:2008-06-24

    IPC分类号: G01D5/34 G06M7/00

    CPC分类号: G01D5/38 G01D5/34784

    摘要: A light via first and second index scales is split by a beam splitter, and one of the split lights is received by a first light-receiving element via a movable scale and also the other of the split lights is received by a second light-receiving element via a reference scale, and therefore by computing positional information of the movable scale using an output of the first light-receiving element (a first output) and an output of the second light-receiving element (a second output), movement information of the movable scale can be measured with high precision without being affected by drift of the modulation center (the oscillation center) of the beam.

    摘要翻译: 通过第一和第二索引刻度的光被分束器分开,并且其中一个分光灯通过可移动刻度被第一光接收元件接收,另一个分光灯由第二光接收 并且因此通过使用第一受光元件(第一输出)的输出和第二光接收元件的输出(第二输出)来计算可移动刻度的位置信息,以及 可以高精度地测量可移动刻度,而不受波束的调制中心(振荡中心)的漂移的影响。

    Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method
    6.
    发明授权
    Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method 有权
    移动体装置,曝光装置,曝光方法以及装置的制造方法

    公开(公告)号:US08390780B2

    公开(公告)日:2013-03-05

    申请号:US12330119

    申请日:2008-12-08

    IPC分类号: G03B27/42

    摘要: A moving grating is arranged on a side of a wafer stage, a light source irradiates a light to the moving grating, diffracted lights generated from the moving grating are interfered by fixed scales and an index scale of which positional relation with the light source is fixed, and a detection instrument detects the interfered light. In this case, since the moving grating is arranged on a side of the wafer stage, upsizing of the entire wafer stage can be suppressed. Further, since interference occurs between a plurality of diffracted lights (e.g., the ±1st-order diffracted light) passing extremely close optical paths, influence caused by a fluctuation of ambient atmosphere becomes less in comparison to conventional interferometers, and thus, a high-precision measurement of positional information of the movable body is possible.

    摘要翻译: 移动光栅布置在晶片台的一侧,光源将光照射到移动光栅,由移动光栅产生的衍射光被固定的刻度干扰,并且与光源的位置关系固定的折射率 并且检测仪器检测被干扰的光。 在这种情况下,由于移动光栅布置在晶片台的一侧,因此可以抑制整个晶片台的大型化。 此外,由于在通过非常接近的光路的多个衍射光(例如±1级衍射光)之间发生干涉,所以与常规干涉仪相比,由环境大气的波动引起的影响变小, 移动体的位置信息的精度测量是可能的。

    Encoder
    7.
    发明申请
    Encoder 失效
    编码器

    公开(公告)号:US20070267571A1

    公开(公告)日:2007-11-22

    申请号:US11798255

    申请日:2007-05-11

    IPC分类号: G01D5/34

    CPC分类号: G01D5/38

    摘要: When an incident light is obliquely incident on an index scale, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference occurs, which causes a phase difference in both of the diffracted lights incident on a photodetection element. According to the phase difference, intensity of a photoelectric detection signal output from the photodetection element changes. That is, due to a periodic change in the incident angle of the incident light, the phase difference between light A and light B is modulated, and the interference signal becomes greatly modulated.

    摘要翻译: 当入射光倾斜地入射到指数刻度上时,光A的光程长度比光B的光路长度长,并且产生光程长度差,导致入射到的两个衍射光的相位差 光电检测元件。 根据相位差,从光检测元件输出的光电检测信号的强度变化。 也就是说,由于入射光的入射角度的周期性变化,光A和光B之间的相位差被调制,并且干扰信号变得很大地被调制。

    Coaxial connector for board-to-board connection

    公开(公告)号:US07118383B2

    公开(公告)日:2006-10-10

    申请号:US11189706

    申请日:2005-07-27

    IPC分类号: H01R1/00

    摘要: In the invention providing a board-to-board coaxial connector, a contact portion 17 is formed in an internal conductor housing portion 12 of a plug body 9 into which a receptacle center conductor 7 is to be inserted. The contact portion has: a stationary contact piece portion 10b which is perpendicularly bent from a solder connecting portion 10a of a plug internal conductor 10 to extend in the axial direction of the connector; and movable contact piece portions 10c which are continuous to the stationary contact piece portion, which are juxtaposed in a circumferential direction of the connector, and which extend in the axial direction of the connector.

    Coaxial connector integrated connector for board connection
    9.
    发明申请
    Coaxial connector integrated connector for board connection 失效
    同轴连接器集成连接器用于板连接

    公开(公告)号:US20060141811A1

    公开(公告)日:2006-06-29

    申请号:US11313530

    申请日:2005-12-20

    IPC分类号: H05K1/00

    摘要: By forming a coaxial receptacle and a coaxial plug, for which the characteristic impedances have been adjusted, at the respective end portions of a receptacle-side insulating housing and a plug-side body constituting a multi-connector being a parallel connector part, a transmission line has been made possible in which a multi-connector is mated and the signals passing through the coaxial connector at the same time exhibit little reflection and radiation.

    摘要翻译: 通过在构成作为并联连接器部件的多连接器的插座侧绝缘壳体和插头侧体的各个端部形成同轴插座和具有阻抗特性的同轴插头, 线路已经成为可能,其中多连接器配合,并且同时穿过同轴连接器的信号表现出很小的反射和辐射。