公开(公告)号：US08710425B2

公开(公告)日：2014-04-29

申请号：US13090659

申请日：2011-04-20

申请人： Susumu Makinouchi ,  Akihiro Watanabe

发明人： Susumu Makinouchi ,  Akihiro Watanabe

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/34746

摘要： An encoder emits modulated light from a light source section and lets a first light and a second light separated from the modulated light interfere with each other in a moving grating. In the encoder, the light emitted from the light source section is electrically modulated, and the first light and the second light have different light path lengths.

摘要翻译： 编码器发射来自光源部分的调制光，并使得与调制光分离的第一光和第二光在移动光栅中相互干扰。 在编码器中，从光源部发射的光被电调制，第一光和第二光具有不同的光路长度。

公开(公告)号：US07601947B2

公开(公告)日：2009-10-13

申请号：US11798255

申请日：2007-05-11

申请人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

发明人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

IPC分类号： G01B9/02

CPC分类号： G01D5/38

摘要： When an incident light is obliquely incident on an index scale, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference occurs, which causes a phase difference in both of the diffracted lights incident on a photodetection element. According to the phase difference, intensity of a photoelectric detection signal output from the photodetection element changes. That is, due to a periodic change in the incident angle of the incident light, the phase difference between light A and light B is modulated, and the interference signal becomes greatly modulated.

摘要翻译： 当入射光倾斜地入射到指数刻度上时，光A的光程长度比光B的光路长度长，并且产生光程长度差，导致两个衍射光入射的相位差 光电检测元件。 根据相位差，从光检测元件输出的光电检测信号的强度变化。 也就是说，由于入射光的入射角度的周期性变化，光A和光B之间的相位差被调制，并且干扰信号变得很大地被调制。

公开(公告)号：US08222594B2

公开(公告)日：2012-07-17

申请号：US12731725

申请日：2010-03-25

申请人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

发明人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G02B26/0808

摘要： A reflection mirror that causes an illumination light to be incident on a movable scale is oscillated in an X-axis direction based on a modulation signal. Accordingly, the optical path of the illumination light, of the illumination light and another illumination light generated at an index scale, periodically changes, and as a consequence, the illumination light is periodically modulated. Accordingly, an extra scanner that scans the illumination light or another illumination light with respect to the movable scale does not have to be arranged, which allows an apparatus to be reduced in size and cost.

摘要翻译： 使照明光入射到可动标尺上的反射镜基于调制信号在X轴方向上振荡。 因此，照明光的照明光的光路和在指标处产生的其他照明光周期性地变化，结果周期性地调制照明光。 因此，不需要布置扫描照明光或相对于可动标尺的另一照明光的额外的扫描器，这允许设备的尺寸和成本降低。

公开(公告)号：US07723671B2

公开(公告)日：2010-05-25

申请号：US12144936

申请日：2008-06-24

申请人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

发明人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

IPC分类号： G01D5/34 ,  G06M7/00

CPC分类号： G01D5/38 ,  G01D5/34784

摘要： A light via first and second index scales is split by a beam splitter, and one of the split lights is received by a first light-receiving element via a movable scale and also the other of the split lights is received by a second light-receiving element via a reference scale, and therefore by computing positional information of the movable scale using an output of the first light-receiving element (a first output) and an output of the second light-receiving element (a second output), movement information of the movable scale can be measured with high precision without being affected by drift of the modulation center (the oscillation center) of the beam.

摘要翻译： 通过第一和第二索引刻度的光被分束器分开，并且其中一个分光灯通过可移动刻度被第一光接收元件接收，另一个分光灯由第二光接收 并且因此通过使用第一受光元件（第一输出）的输出和第二光接收元件的输出（第二输出）来计算可移动刻度的位置信息，以及 可以高精度地测量可移动刻度，而不受波束的调制中心（振荡中心）的漂移的影响。

公开(公告)号：US08390780B2

公开(公告)日：2013-03-05

申请号：US12330119

申请日：2008-12-08

申请人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

发明人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

IPC分类号： G03B27/42

CPC分类号： G01D5/38 ,  G01D5/266 ,  G03F7/70716 ,  G03F7/70775

摘要： A moving grating is arranged on a side of a wafer stage, a light source irradiates a light to the moving grating, diffracted lights generated from the moving grating are interfered by fixed scales and an index scale of which positional relation with the light source is fixed, and a detection instrument detects the interfered light. In this case, since the moving grating is arranged on a side of the wafer stage, upsizing of the entire wafer stage can be suppressed. Further, since interference occurs between a plurality of diffracted lights (e.g., the ±1st-order diffracted light) passing extremely close optical paths, influence caused by a fluctuation of ambient atmosphere becomes less in comparison to conventional interferometers, and thus, a high-precision measurement of positional information of the movable body is possible.

摘要翻译： 移动光栅布置在晶片台的一侧，光源将光照射到移动光栅，由移动光栅产生的衍射光被固定的刻度干扰，并且与光源的位置关系固定的折射率 并且检测仪器检测被干扰的光。 在这种情况下，由于移动光栅布置在晶片台的一侧，因此可以抑制整个晶片台的大型化。 此外，由于在通过非常接近的光路的多个衍射光（例如±1级衍射光）之间发生干涉，所以与常规干涉仪相比，由环境大气的波动引起的影响变小， 移动体的位置信息的精度测量是可能的。

公开(公告)号：US20070267571A1

公开(公告)日：2007-11-22

申请号：US11798255

申请日：2007-05-11

申请人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

发明人： Susumu Makinouchi ,  Toru Imai ,  Akihiro Watanabe

IPC分类号： G01D5/34

CPC分类号： G01D5/38

摘要： When an incident light is obliquely incident on an index scale, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference occurs, which causes a phase difference in both of the diffracted lights incident on a photodetection element. According to the phase difference, intensity of a photoelectric detection signal output from the photodetection element changes. That is, due to a periodic change in the incident angle of the incident light, the phase difference between light A and light B is modulated, and the interference signal becomes greatly modulated.

摘要翻译： 当入射光倾斜地入射到指数刻度上时，光A的光程长度比光B的光路长度长，并且产生光程长度差，导致入射到的两个衍射光的相位差 光电检测元件。 根据相位差，从光检测元件输出的光电检测信号的强度变化。 也就是说，由于入射光的入射角度的周期性变化，光A和光B之间的相位差被调制，并且干扰信号变得很大地被调制。

公开(公告)号：US08710426B2

公开(公告)日：2014-04-29

申请号：US13186015

申请日：2011-07-19

申请人： Susumu Makinouchi ,  Akihiro Watanabe ,  Toru Imai

发明人： Susumu Makinouchi ,  Akihiro Watanabe ,  Toru Imai

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/34746

摘要： An encoder includes: a light modulation section which modulates at least a portion of light that is emitted from a light source; a moving member which has an incidence plane, on which a plurality of light beams of the light incident, and is relatively movable in at least one direction; and at least two light receiving sections which respectively receive interference fringes that are generated in at least two regions on the moving member, wherein the light enters into the moving member such that at least two interference fringes move in opposite directions on the moving member in accordance with a modulation by the light modulation section.

摘要翻译： 编码器包括：光调制部，其对从光源发出的光的至少一部分进行调制; 具有入射面的移动构件，多个入射光束，并且能够在至少一个方向上相对移动; 以及至少两个光接收部分，其分别接收在所述移动构件上的至少两个区域中产生的干涉条纹，其中所述光进入所述移动构件，使得至少两个干涉条纹沿着所述移动构件沿相反方向在所述移动构件上移动 通过光调制部的调制。

公开(公告)号：US20080185506A1

公开(公告)日：2008-08-07

申请号：US12007676

申请日：2008-01-14

申请人： Susumu Makinouchi ,  Akihiro Watanabe ,  Toru Imai

发明人： Susumu Makinouchi ,  Akihiro Watanabe ,  Toru Imai

IPC分类号： G01D5/34

CPC分类号： G01D5/34715 ,  G01D5/38

摘要： An illumination light to be used for position measurement of a movable scale is spatially (or physically) split into a first illumination light and a second illumination light using a triangle prism, and the first and second illumination lights are made to be incident on the same position on the movable scale, so that positional information of the movable scale is detected by utilizing interference of the first and second illumination lights. The spatially split first and second illumination lights interfere with each other even when they are made to be incident on the same position of the movable scale and are completely overlapped with each other, which is different, for example, from the case of the ±1st order diffracted lights that are generated by an illumination light being ±1st order diffracted by a diffraction grating. Therefore, wasted illumination lights that do not contribute to the interference can be minimized and the use efficiency of illumination lights can be improved.

摘要翻译： 用于可移动刻度的位置测量的照明光在空间上（或物理地）被分割为第一照明光和使用三角形棱镜的第二照明光，并且使第一和第二照明光入射在其上 位置，从而通过利用第一和第二照明光的干涉来检测可动标尺的位置信息。 空间分离的第一和第二照明光即使当它们被入射到可移动标尺的相同位置并且彼此完全重叠时也彼此干涉，例如与±1的情况不同 由衍射光栅衍射的被照明光产生的±1级级衍射光。 因此，可以使对干扰无影响的浪费的照明灯最小化，能够提高照明光的使用效率。

公开(公告)号：US08649708B2

公开(公告)日：2014-02-11

申请号：US13343812

申请日：2012-01-05

申请人： Akihiro Watanabe ,  Norio Kubo ,  Yukihiro Mori

发明人： Akihiro Watanabe ,  Norio Kubo ,  Yukihiro Mori

IPC分类号： G03G15/08

CPC分类号： G03G15/0189 ,  G03G15/0893 ,  G03G2215/0132 ,  G03G2215/0897

摘要： A developing apparatus according to the present disclosure is partitioned into a plurality of convey chambers which include a first convey chamber and a second convey chamber which are disposed substantially in parallel with each other, the second convey chamber has a U shape in section, a sensor disposition portion, where a toner concentration sensor is disposed on a bottom surface, is formed in an upstream with respect to a restriction portion in a developer convey direction, across a predetermined width in the developer convey direction including a detection surface of the toner concentration sensor, a distance between curved surface portions on both sides of a U-shaped inner wall surface and the second stir member is wider than another portion of the second stir chamber.

摘要翻译： 根据本公开的显影装置被分隔成多个输送室，其包括基本上彼此平行设置的第一输送室和第二输送室，第二输送室具有U形截面，传感器 其中调色剂浓度传感器设置在底表面上，在显影剂输送方向上相对于限制部分的上游形成在包括调色剂浓度传感器的检测表面的显影剂输送方向上的预定宽度 U形内壁表面两侧的曲面部分与第二搅拌件之间的距离比第二搅拌室的另一部分宽。

公开(公告)号：US20130177211A1

公开(公告)日：2013-07-11

申请号：US13820030

申请日：2011-09-26

申请人： Akihiro Watanabe ,  Takahiro Kojo ,  Theerawat Limpibunterng ,  Yoshiaki Tsuchiya

发明人： Akihiro Watanabe ,  Takahiro Kojo ,  Theerawat Limpibunterng ,  Yoshiaki Tsuchiya

IPC分类号： G06K9/32

CPC分类号： G06K9/3241 ,  G06K9/00798 ,  G06T7/73 ,  G06T7/77 ,  G06T2207/10016 ,  G06T2207/30244 ,  G06T2207/30256

摘要： A characteristic point extraction section acquires an image captured by an image capture device and extracts characteristic points from the captured image, a vehicle lane boundary point selection section selects vehicle lane boundary points that indicate vehicle lanes from the extracted characteristic points, a distribution determination section determines the distribution of the vehicle lane boundary points, a system noise setting section sets each system noise based on the distribution of vehicle lane boundary points, and a travel path parameter estimation section stably predicts travel path parameters based on the vehicle lane boundary points, past estimation results, and the system noise that has been set.

摘要翻译： 特征点提取部获取由图像拍摄装置拍摄的图像，并从拍摄图像中提取特征点，车道边界点选择部从所提取的特征点中选择表示车道的车道边界点，分配确定部确定 车道边界点的分布，系统噪声设定部根据车道边界点的分布设定各个系统噪声，行驶路径参数推定部基于车道边界点来稳定地预测行驶路径参数，过去的估计 结果，以及已经设置的系统噪声。