Abstract:
A magnetic actuator includes: a plate having a main plane of extent and mounted rotatably about at least one first axis of rotation which is parallel to the main plane of extent, the plate having at least one conductor loop parallel to the main plane of extent; a magnetic bracket situated beneath the plate and having a U-shaped magnetic flux conducting rail and a hard magnet whose magnetization is perpendicular to the U-shaped opening, the magnetic bracket and the plate being aligned with one another in such a way that the opening in the magnetic bracket points toward the main plane of extent of the plate, the U-shaped magnetic flux conducting rail having a main direction of extent parallel to the first axis of rotation, and the plate being deflectable about the at least one axis of rotation by energizing the at least one conductor loop.
Abstract:
A magnetic actuator includes: a plate having a main plane of extent and mounted rotatably about at least one first axis of rotation which is parallel to the main plane of extent, the plate having at least one conductor loop parallel to the main plane of extent; a magnetic bracket situated beneath the plate and having a U-shaped magnetic flux conducting rail and a hard magnet whose magnetization is perpendicular to the U-shaped opening, the magnetic bracket and the plate being aligned with one another in such a way that the opening in the magnetic bracket points toward the main plane of extent of the plate, the U-shaped magnetic flux conducting rail having a main direction of extent parallel to the first axis of rotation, and the plate being deflectable about the at least one axis of rotation by energizing the at least one conductor loop.
Abstract:
A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.
Abstract:
A device for determining motion parameters includes a magnetic multipole that generates an alternating magnetic field, at least one magnetic sensor for measuring the magnetic field of the magnetic multipole, and an evaluation and control unit for evaluating the signals from the magnetic sensor. The magnetic sensor includes a magnetizable core, a drive coil, and a measuring coil. The evaluation and control unit charges the drive coil with a periodic drive signal so as to bring about a periodic magnetic reversal of the core and detects the points in time at which the magnetic reversals occur in the core. Based on the points in time at which the magnetic reversals occur, the evaluation and control unit determines a current value of the effective magnetic field of the magnetic multipole within a defined measuring range representing a range around a zero crossing of the magnetic field of the magnetic multipole.
Abstract:
A production process for a microneedle arrangement and a corresponding microneedle arrangement as well as a use for it is disclosed. The process has the following steps: forming an etching mask in grid form, with grid bars with corresponding grid crossing regions and grid openings in between on a substrate; carrying out an etching process to form the microneedle arrangement on the substrate using the etching mask and removing the etching mask. The etching mask in grid form has at least some of the grid crossing regions flat reinforcing regions, which extend beyond the grid bars.
Abstract:
A system for detecting a magnetic flux includes: a magnetic-flux-generating coil having a first and second excitation-track elements extending essentially parallel to a reference plane; a flux-conducting structure for guiding the produced magnetic flux; and a flux-detecting coil having a first detection-track element for measuring at least a portion of the produced magnetic flux, the first detection-track element extending in a first plane defined by the first and second excitation-track elements between the first and the second excitation-track elements. The projection of the excitation-track elements of the flux-generating coil onto a projection plane extending parallel to the reference plane essentially covers the projection of the flux-conducting structure onto the projection plane, at least in the region of the windings of the flux-generating coil.
Abstract:
Micromechanical component and a method for its production having vertically arranged layers made of metallic materials, with the layers adhering firmly to one another at least in part. The layers of the micromechanical component are attached to each other via intermediate layers, with the intermediate layers being at least one sputtered layer which can be applied in the form of a metallic start plating to the underlying layer, which includes metallic and nonmetallic areas, and to which an upper metallic electroplated layer can be applied. Upon their completion, the layers yield the micromechanical component with layers that adhere to one another or layers which can be partially detached from one another.
Abstract:
A sensor system includes: an at least partially magnetoelastic deformation element for measuring pressures, caused by a fluid, that are able to be applied to the magnetoelastic deformation element; and a magnetic circuit formed via a magnetic flux feedback and having a sensor unit and an evaluation unit. The sensor unit is positioned at the deformation element and the evaluation unit having an evaluation coil is structurally separated from, yet inductively coupled to, the sensor unit. The sensor unit has a sensor coil positioned on the deformation element and the evaluation unit has the evaluation coil that is inductively coupled to the sensor coil, the sensor coil forms a resonant circuit, using its own parasitic capacitance or using an additional capacitance, which is able to be energized by the evaluation coil in free resonance with strong or weak inductive coupling by a magnetic circuit enclosing the two coils.
Abstract:
A device for measuring the direction and/or strength of a magnetic field is described which includes a first sensor for detecting a first component of the magnetic field in a first spatial direction, a second sensor for detecting a second component of the magnetic field in a second spatial direction, and a third sensor for detecting a third component of the magnetic field in a third spatial direction, the first sensor containing at least one Hall sensor and the second and/or third sensors containing at least one fluxgate sensor.
Abstract:
A sensor system is provided having an at least partially magnetoelastic deformation element for measuring pressures, caused by a fluid, that are able to be applied to the magnetoelastic deformation element, having a magnetic circuit formed via a magnetic flux feedback and having a sensor unit and an evaluation unit. The sensor unit is positioned at the deformation element and the evaluation unit having an evaluation coil is structurally separated from, yet inductively coupled to the sensor unit. The sensor unit has a sensor coil positioned on the deformation element and the evaluation unit has the evaluation coil that is inductively coupled to the sensor coil, the sensor coil forms a resonant circuit, using its own parasitic capacitance or using an additional capacitance, which is able to be energized by the evaluation coil in free resonance with strong or weak inductive coupling by a magnetic circuit enclosing the two coils. Alternatively, the sensor unit and the evaluation unit may be coupled via a magnetic circuit having a flux feedback, and the evaluation coil may be wound around the fixed or mountable flux feedback, a permeability change effected by the application of pressure to the deformation element, and thus a change in the inductance of the evaluation coil being able to be determined.