公开(公告)号：US20230336147A1

公开(公告)日：2023-10-19

申请号：US18299618

申请日：2023-04-12

Applicant: Skyworks Solutions, Inc.

Inventor： David Albert Feld ,  Michael David Hill ,  Benjamin Paul Abbott ,  Cedric Olivier Poirel ,  Rei Goto

IPC: H03H9/02

CPC classification number: H03H9/02834 ,  H03H9/02102

Abstract: Aspects of this disclosure relate to an acoustic wave device with a silicon oxycarbide layer over a trap rich layer. The acoustic wave device can include a piezoelectric layer over the silicon oxycarbide. The acoustic wave device can be a surface acoustic wave device in certain applications. The acoustic wave device can be a bulk acoustic wave device in some other applications. Related acoustic wave filters, radio frequency modules, wireless communication devices, and methods are disclosed.

公开(公告)号：US20230336146A1

公开(公告)日：2023-10-19

申请号：US18299616

申请日：2023-04-12

Applicant: Skyworks Solutions, Inc.

Inventor： David Albert Feld ,  Michael David Hill ,  Benjamin Paul Abbott ,  Cedric Olivier Poirel ,  Rei Goto

IPC: H03H9/02

CPC classification number: H03H9/02834 ,  H03H9/02102

Abstract: Aspects of this disclosure relate to an acoustic wave device with a temperature compensation layer that includes silicon oxycarbide. The temperature compensation layer can be in physical contact with at least a portion of a piezoelectric layer of the acoustic wave device. The acoustic wave device can be a surface acoustic wave device in certain applications. The acoustic wave device can be a bulk acoustic wave device in some other applications. Related acoustic wave filters, radio frequency modules, wireless communication devices, and methods are disclosed.