公开(公告)号：US20120100948A1

公开(公告)日：2012-04-26

申请号：US13277292

申请日：2011-10-20

申请人： Shih-Liang Lin ,  Hsin-Yang Su ,  Ming-Chih Tsai

发明人： Shih-Liang Lin ,  Hsin-Yang Su ,  Ming-Chih Tsai

IPC分类号： F16H3/44

CPC分类号： B62M11/16 ,  B62M6/65 ,  F16H3/005 ,  F16H3/54

摘要： A speed changing apparatus includes a planet gear set having a sun gear, planet pinions, a planet pinion carrier and a ring gear mounted inside a rotary sleeve. The sun gear is driven by a D.C. motor to rotate in either of two opposed rotary directions. Clutch arrangements are operative to lock one of either the carrier arm or the ring gear to a rotationally fixed component and to drivingly couple the other of the carrier arm and the ring gear to the sleeve ring depending on the direction of rotation of the motor. Different gear ratios are selected by reversing the direction of rotation of the motor whilst the sleeve ring is always driven in same direction. The speed change apparatus may be part of a hub of an electric vehicle in which the sleeve ring is a hub shell and the apparatus is mounted about an axle.

摘要翻译： 一种变速装置包括具有太阳齿轮，行星小齿轮，行星齿轮架和安装在旋转套筒内的齿圈的行星齿轮组。 太阳齿轮由直流电动机驱动以在两个相对的旋转方向中的任一个旋转。 离合器装置可操作以将承载臂或环形齿轮中的一个锁定到旋转固定的部件，并且根据电动机的旋转方向将承载臂和环形齿轮中的另一个驱动地联接到套环。 通过反转马达的旋转方向来选择不同的传动比，同时套筒环总是沿相同的方向驱动。 变速装置可以是电动车辆的轮毂的一部分，其中套筒环是轮毂壳，并且该装置绕轴安装。

公开(公告)号：US09039563B2

公开(公告)日：2015-05-26

申请号：US13277292

申请日：2011-10-20

申请人： Shih-Liang Lin ,  Hsin-Yang Su ,  Ming-Chih Tsai

发明人： Shih-Liang Lin ,  Hsin-Yang Su ,  Ming-Chih Tsai

IPC分类号： B62M6/65 ,  B62M11/16 ,  F16H3/00 ,  F16H3/54

CPC分类号： B62M11/16 ,  B62M6/65 ,  F16H3/005 ,  F16H3/54

摘要： A speed changing apparatus includes a planet gear set having a sun gear, planet pinions, a planet pinion carrier and a ring gear mounted inside a rotary sleeve. The sun gear is driven by a D.C. motor to rotate in either of two opposed rotary directions. Clutch arrangements are operative to lock one of either the carrier arm or the ring gear to a rotationally fixed component and to drivingly couple the other of the carrier arm and the ring gear to the sleeve ring depending on the direction of rotation of the motor. Different gear ratios are selected by reversing the direction of rotation of the motor whilst the sleeve ring is always driven in same direction. The speed change apparatus may be part of a hub of an electric vehicle in which the sleeve ring is a hub shell and the apparatus is mounted about an axle.

摘要翻译： 一种变速装置包括具有太阳齿轮，行星小齿轮，行星齿轮架和安装在旋转套筒内的齿圈的行星齿轮组。 太阳齿轮由直流电动机驱动以在两个相对的旋转方向中的任一个旋转。 离合器装置可操作以将承载臂或环形齿轮中的一个锁定到旋转固定的部件，并且根据电动机的旋转方向将承载臂和环形齿轮中的另一个驱动地联接到套环。 通过反转马达的旋转方向来选择不同的传动比，同时套筒环总是沿相同的方向驱动。 变速装置可以是电动车辆的轮毂的一部分，其中套筒环是轮毂壳，并且该装置绕轴安装。

公开(公告)号：US08226517B2

公开(公告)日：2012-07-24

申请号：US12842890

申请日：2010-07-23

申请人： Ming-Chih Tsai ,  Hsin-Yang Su

发明人： Ming-Chih Tsai ,  Hsin-Yang Su

IPC分类号： F16H48/06 ,  F16H3/44 ,  F16H37/06

CPC分类号： F16H3/005 ,  B62M6/65 ,  B62M11/16 ,  F16H2200/0021 ,  F16H2200/0034 ,  F16H2200/201 ,  F16H2200/2097

摘要： A speed change mechanism in which the gear ratio is selected by changing the direction of rotation of the power input includes first and second planetary gear sets enclosed within a hub shell. A DC electric motor is coupled to the sun gears of both gear sets and drives them simultaneously in the same rotary direction. In one of the gear sets the carrier arm is fixed and the ring gear is the output and in the other gear set the ring gear is fixed and the carrier arm is the output. A first one-way clutch transmits drive from an output of the first gear set to the hub shell and second one-way clutch transmits drive from an output of the second gear set to the hub shell, both clutches operating in the same direction. The outputs of the gear sets are driven in opposite rotary directions so that drive is transmitted to the hub shell either through the first gear set or the second gear set depending on the direction of rotation of the power input to provide two different gear ratios.

摘要翻译： 通过改变动力输入的旋转方向来选择齿轮比的变速机构包括封装在轮毂壳内的第一和第二行星齿轮组。 直流电动机与两个齿轮组的太阳齿轮相连，并以相同的旋转方向同时驱动它们。 在其中一个齿轮组中，承载臂是固定的，而齿圈是输出，在另一个齿轮组中，齿圈是固定的，而承载臂是输出。 第一单向离合器将驱动从第一齿轮组的输出传递到轮毂壳，第二单向离合器将驱动从第二齿轮组的输出传递到轮毂壳，两个离合器在相同的方向上操作。 齿轮组的输出以相反的旋转方向驱动，使得驱动通过第一齿轮组或第二齿轮组根据动力输入的旋转方向传递到轮毂壳，以提供两种不同的齿轮比。

公开(公告)号：US20110034283A1

公开(公告)日：2011-02-10

申请号：US12842890

申请日：2010-07-23

申请人： Ming-Chih Tsai ,  Hsin-Yang Su

发明人： Ming-Chih Tsai ,  Hsin-Yang Su

IPC分类号： F16H3/44 ,  F16H3/72

CPC分类号： F16H3/005 ,  B62M6/65 ,  B62M11/16 ,  F16H2200/0021 ,  F16H2200/0034 ,  F16H2200/201 ,  F16H2200/2097

摘要： A speed change mechanism in which the gear ratio is selected by changing the direction of rotation of the power input includes first and second planetary gear sets enclosed within a hub shell. A DC electric motor is coupled to the sun gears of both gear sets and drives them simultaneously in the same rotary direction. In one of the gear sets the carrier arm is fixed and the ring gear is the output and in the other gear set the ring gear is fixed and the carrier arm is the output. A first one-way clutch transmits drive from an output of the first gear set to the hub shell and second one-way clutch transmits drive from an output of the second gear set to the hub shell, both clutches operating in the same direction. The outputs of the gear sets are driven in opposite rotary directions so that drive is transmitted to the hub shell either through the first gear set or the second gear set depending on the direction of rotation of the power input to provide two different gear ratios.

摘要翻译： 通过改变动力输入的旋转方向来选择齿轮比的变速机构包括封装在轮毂壳内的第一和第二行星齿轮组。 直流电动机与两个齿轮组的太阳齿轮相连，并以相同的旋转方向同时驱动它们。 在其中一个齿轮组中，承载臂是固定的，而齿圈是输出，在另一个齿轮组中，齿圈是固定的，而承载臂是输出。 第一单向离合器将驱动从第一齿轮组的输出传递到轮毂壳，第二单向离合器将驱动从第二齿轮组的输出传递到轮毂壳，两个离合器在相同的方向上操作。 齿轮组的输出以相反的旋转方向驱动，使得驱动通过第一齿轮组或第二齿轮组根据动力输入的旋转方向传递到轮毂壳，以提供两种不同的齿轮比。

公开(公告)号：US09093252B2

公开(公告)日：2015-07-28

申请号：US13397957

申请日：2012-02-16

申请人： Bo-Hung Lin ,  Ming-Chih Tsai ,  You-Hua Chou ,  Chung-En Kao

发明人： Bo-Hung Lin ,  Ming-Chih Tsai ,  You-Hua Chou ,  Chung-En Kao

IPC分类号： C23C14/35 ,  H01J37/34 ,  H01J37/32

CPC分类号： C23C14/351 ,  C23C14/35 ,  H01J37/32669 ,  H01J37/3408 ,  H01J37/3452 ,  H01J37/3455 ,  H01J37/3461

摘要： In some embodiments, the present disclosure relates to a plasma processing system comprising a magnetron configured to provide a symmetric magnetic track through a combination of vibrational and rotational motion. The disclosed magnetron comprises a magnetic element configured to generate a magnetic field. The magnetic element is attached to an elastic element connected between the magnetic element and a rotational shaft configured to rotate magnetic element about a center of the sputtering target. The elastic element is configured to vary its length during rotation of the magnetic element to change the radial distance between the rotational shaft and the magnetic element. The resulting magnetic track enables concurrent motion of the magnetic element in both an angular direction and a radial direction. Such motion enables a symmetric magnetic track that provides good wafer uniformity and a short deposition time.

摘要翻译： 在一些实施例中，本公开涉及等离子体处理系统，其包括被配置为通过振动和旋转运动的组合提供对称磁轨的磁控管。 所公开的磁控管包括被配置为产生磁场的磁性元件。 磁性元件附接到连接在磁性元件和旋转轴之间的弹性元件，该旋转轴构造成围绕溅射靶的中心旋转磁性元件。 弹性元件构造成在磁性元件的旋转期间改变其长度以改变旋转轴和磁性元件之间的径向距离。 由此产生的磁道能够使磁性元件在角度方向和径向方向上同时运动。 这样的运动能够提供良好的晶片均匀性和较短的沉积时间的对称磁迹。

公开(公告)号：US09004446B2

公开(公告)日：2015-04-14

申请号：US13303961

申请日：2011-11-23

申请人： Ming-Chih Tsai

发明人： Ming-Chih Tsai

IPC分类号： F16K31/02 ,  F16K31/528 ,  F16K31/06 ,  F16K3/02

CPC分类号： F16K31/0682 ,  F16K3/0218 ,  F16K3/0254 ,  F16K31/0668

摘要： A sliding valve device includes a fixing portion, a sliding component and a driving member. The fixing portion has an inlet port and an outlet port. The sliding component is connected with the fixing portion, and includes a fluid channel. The driving member is used for driving movement of the sliding component, wherein the driving member is not in contact with the fluid channel, the inlet port and the outlet port.

摘要翻译： 滑阀装置包括固定部分，滑动部件和驱动部件。 固定部具有入口和出口。 滑动部件与固定部分连接，并且包括流体通道。 驱动构件用于驱动滑动部件的移动，其中驱动部件不与流体通道，入口端口和出口端接触。

公开(公告)号：US20080318378A1

公开(公告)日：2008-12-25

申请号：US11765971

申请日：2007-06-20

申请人： Chih-Ta Wu ,  Jason Lee ,  Chung Chien Wang ,  Hsing-Lien Lin ,  Yu-Jen Wang ,  Yeur-Luen Tu ,  Chern-Yow Hsu ,  Yuan-Hung Liu ,  Chi-Hsin Lo ,  Chia-Shiung Tsai ,  Lucy Chang ,  Chia-Lin Chen ,  Ming-Chih Tsai

发明人： Chih-Ta Wu ,  Jason Lee ,  Chung Chien Wang ,  Hsing-Lien Lin ,  Yu-Jen Wang ,  Yeur-Luen Tu ,  Chern-Yow Hsu ,  Yuan-Hung Liu ,  Chi-Hsin Lo ,  Chia-Shiung Tsai ,  Lucy Chang ,  Chia-Lin Chen ,  Ming-Chih Tsai

IPC分类号： H01L21/20 ,  H01L21/8242

CPC分类号： H01L27/10814 ,  H01L27/10852 ,  H01L28/40 ,  H01L28/75

摘要： A capacitor and methods for forming the same are provided. The method includes forming a bottom electrode; treating the bottom electrode in an oxygen-containing environment to convert a top layer of the bottom electrode into a buffer layer; forming an insulating layer on the buffer layer; and forming a top electrode over the insulating layer.

摘要翻译： 提供电容器及其形成方法。 该方法包括形成底部电极; 在含氧环境中处理底部电极以将底部电极的顶层转化为缓冲层; 在缓冲层上形成绝缘层; 并在所述绝缘层上形成顶部电极。

公开(公告)号：US20080204176A1

公开(公告)日：2008-08-28

申请号：US12071761

申请日：2008-02-26

申请人： Konjanat Sriraksat ,  Khachornsak Nimsaila ,  Prasit Wajanasuntorn ,  Palagon Meeso ,  Ming-Chih Tsai ,  Wei Chen ,  Dengyan Zhou

发明人： Konjanat Sriraksat ,  Khachornsak Nimsaila ,  Prasit Wajanasuntorn ,  Palagon Meeso ,  Ming-Chih Tsai ,  Wei Chen ,  Dengyan Zhou

IPC分类号： H01F7/08

CPC分类号： H01F7/122 ,  H01F7/1827

摘要： This invention discloses a magnetically latching solenoid valve and a solenoid thereof. The solenoid includes a coil disposed around a bobbin and divided into two sections by a tap for adjustable pull and release forces to a plunger disposed therein. A first section of the coil, through magnetic induction, pulls the plunger toward a fixed stopper disposed at the lower end of the bobbin and coupled to a cylindrical yoke. A permanent magnet is disposed between the stopper and the yoke. On contact with the stopper, the plunger is held in place by the permanent magnet even after the current flow is removed from the first section of the coil. A second section of the coil, with a differing magnetic induction, returns the plunger. By the operating current at the common tapped junction of the coil, the electromagnetic force generated by the first section will add to the fixed force from the permanent magnet while the electromagnetic force generated by the second section will subtract from the fixed force from the permanent magnet. By using a tapped coil, a simpler and more efficient electronic drive can be used with reduced electrical switching losses.

摘要翻译： 本发明公开了一种磁性闭锁电磁阀及其螺线管。 螺线管包括绕线圈设置的线圈，并通过龙头分成两部分，用于可调节的拉力和释放力到设置在其中的柱塞。 线圈的第一部分通过磁感应将柱塞拉向设置在线轴下端并固定在圆柱形轭上的固定止动件。 永磁体设置在止动器和轭之间。 在与止动器接触时，即使在电流从线圈的第一部分移除之后，柱塞也被永磁体保持在适当位置。 具有不同磁感应的线圈的第二部分返回柱塞。 通过线圈共同点连接处的工作电流，由第一部分产生的电磁力将增加来自永磁体的固定力，同时由第二部分产生的电磁力从永久磁铁的固定力中减去 。 通过使用抽头线圈，可以使用更简单和更有效的电子驱动器，同时降低电气开关损耗。

公开(公告)号：US20130199926A1

公开(公告)日：2013-08-08

申请号：US13366805

申请日：2012-02-06

申请人： Ming-Chih Tsai ,  Bo-Hung Lin ,  Chung-En Kao ,  Chin-Hsiang Lin

发明人： Ming-Chih Tsai ,  Bo-Hung Lin ,  Chung-En Kao ,  Chin-Hsiang Lin

IPC分类号： C23C14/34

CPC分类号： C23C14/351 ,  H01J37/3211 ,  H01J37/34 ,  H05H1/46 ,  H05H2001/4667

摘要： In some embodiments, the present disclosure relates to a plasma processing system configured to form a symmetric plasma distribution around a workpiece. In some embodiments, the plasma processing system comprises a plurality of coils symmetrically positioned around a processing chamber. When a current is provided to the coils, separate magnetic fields, which operate to ionize the target atoms, emanate from the separate coils. The separate magnetic fields operate upon ions within the coils to form a plasma on the interior of the coils. Furthermore, the separate magnetic fields are superimposed upon one another between coils to form a plasma on the exterior of the coils. Therefore, the disclosed plasma processing system can form a plasma that continuously extends along a perimeter of the workpiece with a high degree of uniformity (i.e., without dead spaces).

摘要翻译： 在一些实施例中，本公开涉及一种被配置为在工件周围形成对称等离子体分布的等离子体处理系统。 在一些实施例中，等离子体处理系统包括围绕处理室对称定位的多个线圈。 当向线圈提供电流时，从分离的线圈发出分离的用于电离目标原子的磁场。 单独的磁场对线圈内的离子起作用以在线圈的内部形成等离子体。 此外，单独的磁场在线圈之间彼此重叠，以在线圈的外部形成等离子体。 因此，所公开的等离子体处理系统可以形成等离子体，该等离子体以高度均匀性（即，没有死空间）沿着工件的周边连续地延伸。

公开(公告)号：US20130187546A1

公开(公告)日：2013-07-25

申请号：US13354604

申请日：2012-01-20

申请人： Bo-Hung Lin ,  Ming-Chih Tsai ,  Chia-Ho Chen ,  Chung-En Kao

发明人： Bo-Hung Lin ,  Ming-Chih Tsai ,  Chia-Ho Chen ,  Chung-En Kao

IPC分类号： H05H1/04 ,  C23C16/50 ,  C23C16/52 ,  H01L21/3065

CPC分类号： H01J37/32669

摘要： In some embodiments, the present disclosure relates to a plasma processing system that generates a magnetic field having a maximum strength that is independent of workpiece size. The plasma processing system has a plurality of side electromagnets that have a size which is independent of the workpiece size. The side electromagnets are located around a perimeter of a processing chamber configured to house a semiconductor workpiece. When a current is provided to the side electromagnets, separate magnetic fields emanate from separate positions around the workpiece. The separate magnetic fields contribute to the formation of an overall magnetic field that controls the distribution of plasma within the processing chamber. Because the size of the plurality of separate side magnets is independent of the workpiece size, the plurality of side magnets can generate a magnetic field having a maximum field strength that is independent of workpiece size.

摘要翻译： 在一些实施例中，本公开涉及一种产生具有与工件尺寸无关的最大强度的磁场的等离子体处理系统。 等离子体处理系统具有多个侧面电磁体，其尺寸独立于工件尺寸。 侧面电磁体位于被配置为容纳半导体工件的处理室的周边周围。 当向侧面电磁铁提供电流时，分离的磁场从工件周围的分离位置发出。 单独的磁场有助于形成控制处理室内等离子体分布的整个磁场。 由于多个分离侧磁体的尺寸与工件尺寸无关，所以多个侧磁体可产生具有独立于工件尺寸的最大磁场强度的磁场。