-
1.发明授权Scanning electron microscope and three-dimensional shape measuring device that used it 有权扫描电子显微镜和使用它的三维形状测量装置公开(公告)号：US07705304B2
公开(公告)日：2010-04-27
申请号：US12120053
申请日：2008-05-13
IPC分类号： H01J49/40
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/22 , H01J2237/24465 , H01J2237/24578
摘要： In three-dimensional shape measurement, a backscattered electron detection signal and selection signal generator in a control section controls, by selection signal, a signal switching section and a frame memory so that: detection signals from respective semiconductor elements are sequentially switched in the signal switching section in synchronization with a scanning frame of an electron beam on a sample; and the detection signals from the respective semiconductor elements can be sequentially recorded in recording addresses in the frame memory which correspond to the respective semiconductor elements. After four electron beam scanning sessions, each image data for three-dimensional shape measurement is recorded in the frame memory, and processed in a computing processing section for three-dimensional shape measurement, and the result can be displayed in a display section. The backscattered electron detection signal and selection signal generator in the control section is configured to include, for example, a counter updated in frame scanning units, and can be composed of a very simple circuit or software.
摘要翻译： 在三维形状测量中，控制部分中的反向散射电子检测信号和选择信号发生器通过选择信号控制信号切换部分和帧存储器，使得：来自各个半导体元件的检测信号在信号切换 与样品上的电子束的扫描帧同步; 并且来自各个半导体元件的检测信号可以被顺序记录在对应于各个半导体元件的帧存储器中的记录地址中。 在四个电子束扫描会话之后，将用于三维形状测量的每个图像数据记录在帧存储器中，并在用于三维形状测量的计算处理部分中进行处理，并且可以将结果显示在显示部分中。 控制部中的背散射电子检测信号和选择信号发生器被配置为包括例如以帧扫描单位更新的计数器，并且可以由非常简单的电路或软件组成。
-
2.发明申请Scanning Electron Microscope and Three-Dimensional Shape Measuring Device That Used It 有权扫描电子显微镜和使用它的三维形状测量装置公开(公告)号：US20080283747A1
公开(公告)日：2008-11-20
申请号：US12120053
申请日：2008-05-13
IPC分类号： G01N23/225
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/22 , H01J2237/24465 , H01J2237/24578
摘要： In three-dimensional shape measurement, a backscattered electron detection signal and selection signal generator in a control section controls, by selection signal, a signal switching section and a frame memory so that: detection signals from respective semiconductor elements are sequentially switched in the signal switching section in synchronization with a scanning frame of an electron beam on a sample; and the detection signals from the respective semiconductor elements can be sequentially recorded in recording addresses in the frame memory which correspond to the respective semiconductor elements. After four electron beam scanning sessions, each image data for three-dimensional shape measurement is recorded in the frame memory, and processed in a computing processing section for three-dimensional shape measurement, and the result can be displayed in a display section. The backscattered electron detection signal and selection signal generator in the control section is configured to include, for example, a counter updated in frame scanning units, and can be composed of a very simple circuit or software.
摘要翻译： 在三维形状测量中，控制部分中的反向散射电子检测信号和选择信号发生器通过选择信号控制信号切换部分和帧存储器，使得：来自各个半导体元件的检测信号在信号切换 与样品上的电子束的扫描帧同步; 并且来自各个半导体元件的检测信号可以被顺序记录在对应于各个半导体元件的帧存储器中的记录地址中。 在四个电子束扫描会话之后，将用于三维形状测量的每个图像数据记录在帧存储器中，并在用于三维形状测量的计算处理部分中进行处理，并且可以将结果显示在显示部分中。 控制部中的背散射电子检测信号和选择信号发生器被配置为包括例如以帧扫描单位更新的计数器，并且可以由非常简单的电路或软件组成。
-
3.发明申请CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING DETECTED SIGNAL THEREOF 有权充电颗粒光束装置及其检测信号的校正方法公开(公告)号：US20130278745A1
公开(公告)日：2013-10-24
申请号：US13993797
申请日：2011-12-22
IPC分类号： H04N5/217
CPC分类号： H04N5/217 , H01J37/244 , H01J37/28 , H01J2237/24495 , H01J2237/24592
摘要： A charged particle beam device of the present invention has a signal processing function of acquiring a secondary signal obtained when a charged particle beam is caused to scan at a low speed not subjected to a band limitation of an electrical signal path, and a secondary signal obtained when a charged particle beam is caused to scan at a high speed subjected to the band limitation of the electrical signal path, calculating a degradation function (H−1(s)) between the plurality of secondary signals, and using an inverse function thereof as a correction filter; and a function of updating a parameter of the correction filter to an optimal value as needed or at given timing. Accordingly, the charged particle beam device can perform optimum image restoration even when a detector or an amplifier circuit that constitutes the electrical signal path degrades with time.
摘要翻译： 本发明的带电粒子束装置具有获取当使带电粒子束以不受电信号路径的频带限制的低速扫描时获得的二次信号的信号处理功能，并且获得二次信号 当使带电粒子束以受到电信号路径的频带限制的高速扫描时，计算多个二次信号之间的劣化函数（H-1（s）），并使用其反函数作为 校正滤波器; 以及根据需要或在给定的定时将校正滤波器的参数更新为最佳值的功能。 因此，即使当构成电信号路径的检测器或放大器电路随时间劣化时，带电粒子束装置也能够进行最佳的图像恢复。
-
公开(公告)号：US08947520B2
公开(公告)日：2015-02-03
申请号：US13145955
申请日：2010-01-19
IPC分类号： H04N9/47 , H04N7/18 , H01J37/26 , H01J37/244
CPC分类号： H01J37/26 , H01J37/244
摘要： An electron microscope according to the present invention includes: a backscattered electron detector provided with a backscattered electron detecting element (9); a low-vacuum secondary electron detector provided with a bias electrode (11) and a specimen stage (12); and a signal switch (14) that switches signals detected by the detectors. Optimal observation conditions are stored in an observation condition memory (20) for each of the detectors. A CPU (19) calls observation conditions stored in the observation condition memory (20) on the basis of the switching of the detectors, and sets conditions of the electron microscope to the called observation conditions. An image processing device (22) converts a plurality of the detected signals obtained on the basis of the switching of the detectors into two-dimensional image signals and evaluates the qualities of images of the two-dimensional image signals. In an image quality prioritized mode, the CPU (19) selects a detector causing an evaluated value to be highest on the basis of the results of the evaluation performed by the image processing device (22) and causes an image to be displayed. In the electron microscope that includes the plurality of detectors, a detector can easily be selected, and the optimal observation conditions for the detectors can easily be set.
摘要翻译： 根据本发明的电子显微镜包括：背散射电子检测器，其设置有背散射电子检测元件（9）; 设置有偏置电极（11）和样品台（12）的低真空二次电子检测器; 以及切换由检测器检测到的信号的信号开关（14）。 最佳观察条件存储在用于每个检测器的观察条件存储器（20）中。 CPU（19）基于检测器的切换来调用存储在观察条件存储器（20）中的观察条件，并将电子显微镜的条件设定为所述观察条件。 图像处理装置（22）将基于检测器的切换获得的多个检测信号转换为二维图像信号，并评估二维图像信号的图像质量。 在图像质量优先模式中，CPU（19）基于由图像处理装置（22）进行的评估结果，选择使评估值最高的检测器，并使图像显示。 在包括多个检测器的电子显微镜中，可以容易地选择检测器，并且可以容易地设置检测器的最佳观察条件。
-
5.发明授权Charged particle beam device and method for correcting detected signal thereof 有权带电粒子束装置及其检测信号的校正方法公开(公告)号：US08848049B2
公开(公告)日：2014-09-30
申请号：US13993797
申请日：2011-12-22
IPC分类号： H04N11/02 , H04N5/217 , H01J37/28 , H01J37/244
CPC分类号： H04N5/217 , H01J37/244 , H01J37/28 , H01J2237/24495 , H01J2237/24592
摘要： A charged particle beam device of the present invention has a signal processing function of acquiring a secondary signal obtained when a charged particle beam is caused to scan at a low speed not subjected to a band limitation of an electrical signal path, and a secondary signal obtained when a charged particle beam is caused to scan at a high speed subjected to the band limitation of the electrical signal path, calculating a degradation function (H−1(s)) between the plurality of secondary signals, and using an inverse function thereof as a correction filter; and a function of updating a parameter of the correction filter to an optimal value as needed or at given timing. Accordingly, the charged particle beam device can perform optimum image restoration even when a detector or an amplifier circuit that constitutes the electrical signal path degrades with time.
摘要翻译： 本发明的带电粒子束装置具有获取当使带电粒子束以不受电信号路径的频带限制的低速扫描时获得的二次信号的信号处理功能，并且获得二次信号 当使带电粒子束以受到电信号路径的频带限制的高速扫描时，计算多个二次信号之间的劣化函数（H-1（s）），并使用其反函数作为 校正滤波器; 以及根据需要或在给定的定时将校正滤波器的参数更新为最佳值的功能。 因此，即使当构成电信号路径的检测器或放大器电路随时间劣化时，带电粒子束装置也可以执行最佳的图像恢复。
-
公开(公告)号：US09099283B2
公开(公告)日：2015-08-04
申请号：US13577833
申请日：2010-11-08
申请人： Yoshinobu Hoshino , Shigeru Kawamata , Eisaku Oho
发明人： Yoshinobu Hoshino , Shigeru Kawamata , Eisaku Oho
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/223 , H01J2237/24495 , H01J2237/2809
摘要： A signal processing unit (21) of a charged particle microscope calculates a degradation function (H (s)) of an image, on the basis of detection signals (11) obtained by scanning a charged particle beam (2) at two types of scanning speeds, a scanning speed within the bandwidths of a detector (12) and an amplifying circuit at a subsequent stage of the detector, and another scanning speed exceeding the upper limit of the bandwidths. Then, the signal processing unit creates a one-dimensional correction filter for recovering image quality, from an inverse function (H−1 (s)) of the degradation function, and applies the one-dimensional correction filter to the detection signal recorded at the scanning speed exceeding the upper limit of the bandwidths of the detector and the amplifying circuit at a subsequent stage of the detector, or to a two-dimensional image based on the detection signal.
摘要翻译： 带电粒子显微镜的信号处理单元（21）基于通过以两种扫描方式扫描带电粒子束（2）而获得的检测信号（11）来计算图像的劣化函数（H（s）） 速度，检测器（12）的带宽内的扫描速度和检测器的后续级的放大电路，以及超过带宽上限的另一扫描速度。 然后，信号处理单元从劣化函数的逆函数（H-1（s））创建用于恢复图像质量的一维校正滤波器，并将一维校正滤波器应用于记录在 扫描速度超过检测器的后续阶段的检测器和放大电路的带宽的上限，或者基于检测信号到二维图像。
-
公开(公告)号：US20120307038A1
公开(公告)日：2012-12-06
申请号：US13577833
申请日：2010-11-08
申请人： Yoshinobu Hoshino , Shigeru Kawamata , Eisaku Oho
发明人： Yoshinobu Hoshino , Shigeru Kawamata , Eisaku Oho
IPC分类号： H04N7/18
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/223 , H01J2237/24495 , H01J2237/2809
摘要： A signal processing unit (21) of a charged particle microscope calculates a degradation function (H (s)) of an image, on the basis of detection signals (11) obtained by scanning a charged particle beam (2) at two types of scanning speeds, a scanning speed within the bandwidths of a detector (12) and an amplifying circuit at a subsequent stage of the detector, and another scanning speed exceeding the upper limit of the bandwidths. Then, the signal processing unit creates a one-dimensional correction filter for recovering image quality, from an inverse function (H−1 (s)) of the degradation function, and applies the one-dimensional correction filter to the detection signal recorded at the scanning speed exceeding the upper limit of the bandwidths of the detector and the amplifying circuit at a subsequent stage of the detector, or to a two-dimensional image based on the detection signal.
摘要翻译： 带电粒子显微镜的信号处理单元（21）基于通过以两种扫描方式扫描带电粒子束（2）而获得的检测信号（11）来计算图像的劣化函数（H（s）） 速度，检测器（12）的带宽内的扫描速度和检测器的后续级的放大电路，以及超过带宽上限的另一扫描速度。 然后，信号处理单元从劣化函数的逆函数（H-1（s））创建用于恢复图像质量的一维校正滤波器，并将一维校正滤波器应用于记录在 扫描速度超过检测器的后续阶段的检测器和放大电路的带宽的上限，或者基于检测信号到二维图像。
-
公开(公告)号：US20120019648A1
公开(公告)日：2012-01-26
申请号：US13145955
申请日：2010-01-19
CPC分类号： H01J37/26 , H01J37/244
摘要： An electron microscope according to the present invention includes: a backscattered electron detector provided with a backscattered electron detecting element (9); a low-vacuum secondary electron detector provided with a bias electrode (11) and a specimen stage (12); and a signal switch (14) that switches signals detected by the detectors. Optimal observation conditions are stored in an observation condition memory (20) for each of the detectors. A CPU (19) calls observation conditions stored in the observation condition memory (20) on the basis of the switching of the detectors, and sets conditions of the electron microscope to the called observation conditions. An image processing device (22) converts a plurality of the detected signals obtained on the basis of the switching of the detectors into two-dimensional image signals and evaluates the qualities of images of the two-dimensional image signals. In an image quality prioritized mode, the CPU (19) selects a detector causing an evaluated value to be highest on the basis of the results of the evaluation performed by the image processing device (22) and causes an image to be displayed. In the electron microscope that includes the plurality of detectors, a detector can easily be selected, and the optimal observation conditions for the detectors can easily be set.
摘要翻译： 根据本发明的电子显微镜包括：背散射电子检测器，其设置有背散射电子检测元件（9）; 设置有偏置电极（11）和样品台（12）的低真空二次电子检测器; 以及切换由检测器检测到的信号的信号开关（14）。 最佳观察条件存储在用于每个检测器的观察条件存储器（20）中。 CPU（19）基于检测器的切换来调用存储在观察条件存储器（20）中的观察条件，并将电子显微镜的条件设定为所述观察条件。 图像处理装置（22）将基于检测器的切换获得的多个检测信号转换为二维图像信号，并评估二维图像信号的图像质量。 在图像质量优先模式中，CPU（19）基于由图像处理装置（22）进行的评估结果，选择使评估值最高的检测器，并使图像显示。 在包括多个检测器的电子显微镜中，可以容易地选择检测器，并且可以容易地设置检测器的最佳观察条件。
-
公开(公告)号：US4385845A
公开(公告)日：1983-05-31
申请号：US324355
申请日：1981-11-17
申请人： Yoshinobu Hoshino
发明人： Yoshinobu Hoshino
IPC分类号： F03G3/08 , F16C17/08 , F16C17/24 , F16D57/00 , F16D65/78 , F16F15/30 , F16F15/315 , F16N29/02 , F16N39/02 , H02J15/00 , H02K7/02 , F16C32/06 , F16C17/04
摘要： A highly reliable device for stopping the operation of a flywheel apparatus for storing electrical energy in the event of interruption of power supply includes a thrust plate 11 connected to the rotatory part of the apparatus, and having a lower surface defining a thrust bearing surface. A pressure receiving surface 26 facing the lower surface of the thrust plate, and defining a thrust bearing surface is provided with a plurality of radially extending grooves 27 each having at least one sidewall which defines an upwardly inclined land 28 as viewed in the direction of rotation of the rotatory part. Provided below the pressure receiving surface 26 is a cooling fluid passage 33 connected to an electromagnetic valve 35 adapted to open upon interruption of power supply to allow a cooling fluid to flow into the passage 33. The device further includes means for maintaining a hydraulic fluid between the thrust bearing surfaces during interruption of power supply.
摘要翻译： PCT No.PCT / JP81 / 00149 Sec。 371日期：1981年11月17日 102（e）1981年11月17日PCT PCT。1981年6月30日PCT公布。 公开号WO82 / 00322 日期1982年2月4日。在电源中断的情况下，用于停止用于存储电能的飞轮装置的操作的高度可靠的装置包括连接到装置的旋转部分的止推板11，并且具有下表面 限定推力轴承表面。 面向推力板的下表面并且限定止推轴承表面的压力接收表面26设置有多个径向延伸的凹槽27，每个凹槽27具有至少一个侧壁，其限定了沿旋转方向观察的向上倾斜的凸台28 的旋转部分。 在压力接收表面26下方设置有连接到电磁阀35的冷却流体通道33，其适于在电源中断时打开以允许冷却流体流入通道33.该装置还包括用于将液压流体保持在 电源中断时的推力轴承表面。
-
10.发明授权公开(公告)号：US06499985B1
公开(公告)日：2002-12-31
申请号：US09443457
申请日：1999-11-19
申请人： Yoji Sekiguchi , Hironobu Yoda , Yoshinobu Hoshino
发明人： Yoji Sekiguchi , Hironobu Yoda , Yoshinobu Hoshino
IPC分类号： B28B304
CPC分类号： B28B17/009 , B28B3/028
摘要： A mold box changing apparatus for a concrete block molding machine has a roller type mold box feed line, a split female/male thread type attaching/detaching device constituting a tightening mechanism has a lockable rotary support shaft actuated by a cylinder. The tightening mechanism includes a rotary support shaft capable of rotation by a cylinder pierced into a plunger extending downward from the press. A male thread portion has a split engagement groove disposed at a lower end of the rotary support shaft. The male thread portion has an end face in the form of a first inclination surface cam. A female thread portion has a split engagement groove and provided with a second inclination surface cam corresponding to the first inclination surface cam of said male thread portion such that rotation of said rotary support shaft causes the first inclination surface cam to be contacted, under pressure, with the second inclination surface cam.
摘要翻译： 用于混凝土块成型机的模盒更换装置具有辊式模盒输送线，构成紧固机构的分割阴/外螺纹型安装/拆卸装置具有由气缸驱动的可锁定旋转支撑轴。 紧固机构包括旋转支撑轴，该旋转支撑轴能够被穿过从压机向下延伸的柱塞的气缸旋转。 外螺纹部分具有设置在旋转支撑轴的下端处的分离接合槽。 外螺纹部分具有呈第一倾斜表面凸轮形式的端面。 内螺纹部分具有分割接合槽，并且设置有对应于所述阳螺纹部分的第一倾斜表面凸轮的第二倾斜表面凸轮，使得所述旋转支撑轴的旋转使得第一倾斜表面凸轮在压力下接触， 与第二倾斜面凸轮。
-
-
-
-
-
-
-
-
-
搜索结果
11 条记录 (耗时 0.019 秒)
