Method and apparatus for maintaining focus and magnification of a projected image
    3.
    发明申请
    Method and apparatus for maintaining focus and magnification of a projected image 审中-公开
    用于保持投影图像的聚焦和放大的方法和装置

    公开(公告)号:US20060007554A1

    公开(公告)日:2006-01-12

    申请号:US11175247

    申请日:2005-07-06

    IPC分类号: G02B27/14

    摘要: A method for operating an optical projection system including projection optics is disclosed. The projection optics project an image of the object on the substrate at an image distance from the projection optics. The image has a size dependent on the size of the object and the ratio of the image distance to the optical distance of the object from the projection optics. The image distance can change with changes in the condition of the projection optics such as changes in the temperature of elements of the projection optics. The image distance is monitored. If the image distance changes, the substrate is moved to the new image distance and the optical distance of the object is correspondingly changed such that the ratio of the image distance to the object distance stays the same.

    摘要翻译: 公开了一种用于操作包括投影光学器件的光学投影系统的方法。 投影光学器件在投影光学器件的图像距离处投射基板上的物体的图像。 图像的尺寸取决于对象的尺寸以及图像距离与物体与投影光学器件的光学距离的比率。 图像距离可以随投影光学元件状态的变化而变化,例如投影光学元件的温度变化。 监视图像距离。 如果图像距离变化,则将基板移动到新的图像距离,并且对象的光学距离相应地改变,使得图像距离与对象距离的比率保持不变。

    Apparatus for projecting a reduced image of a photomask using a schwarzschild objective
    4.
    发明授权
    Apparatus for projecting a reduced image of a photomask using a schwarzschild objective 有权
    用于使用施瓦辛目标投影光掩模的缩小图像的装置

    公开(公告)号:US07331676B2

    公开(公告)日:2008-02-19

    申请号:US11348185

    申请日:2006-02-06

    IPC分类号: G03B21/14

    摘要: An optical system for projecting an image of a photomask on a substrate, using a Schwarzschild objective includes an excimer laser, beam shaping optics for shaping a laser beam from the laser and a beam-dividing prism. The beam-dividing prism has a dividing-face including four facets inclined at an angle to each other. The four facets divide the shaped beam into four beam-portions propagating at an angle to the system axis. The beam-portions overlap at the photomask and mutually diverge into the entrance aperture in the concave mirror of the Schwarzschild objective such that all of the light in the beam portions is incident on the convex mirror of the objective in an annular zone outside of the central obscuration zone of the convex mirror. This essentially eliminates transfer losses normally caused by this obscuration zone.

    摘要翻译: 用于使用Schwarzschild物镜将光掩模图像投影在基板上的光学系统包括准分子激光器,用于使来自激光器的激光束成形的光束整形光学元件和分束棱镜。 分束棱镜具有包括相互倾斜的四个小面的分割面。 四个小面将成形的光束分成与系统轴成一定角度传播的四个光束部分。 光束部分在光掩模处重叠并且相互分开进入施瓦茨物镜的凹面镜中的入口孔,使得光束部分中的所有光在中心的外部的环形区域中入射到物镜的凸面镜上 凸面镜的遮蔽区。 这基本上消除了通常由该遮蔽区引起的传输损耗。

    Two-stage laser-beam homogenizer
    5.
    发明申请
    Two-stage laser-beam homogenizer 审中-公开
    两级激光束匀浆器

    公开(公告)号:US20080013182A1

    公开(公告)日:2008-01-17

    申请号:US11827697

    申请日:2007-07-13

    申请人: Joerg Ferber

    发明人: Joerg Ferber

    IPC分类号: G02B27/10

    摘要: Apparatus for a mask-projection laser system with a laser beam includes a homogenizer having entrance and exit arrays of cylindrical lenses spaced apart in the direction of propagation of the laser beam. A pre-homogenizer is arranged to pre-homogenize the beam such that entrance pupil of the projection lens is about uniformly illuminated.

    摘要翻译: 用于具有激光束的掩模投影激光系统的装置包括均质器,其具有在激光束的传播方向上间隔开的柱面透镜的入射和出射阵列。 布置预均化器以预先均匀化光束,使得投影透镜的入射光瞳约为均匀照明。

    Heat assisted spindle motor
    7.
    发明授权
    Heat assisted spindle motor 有权
    热辅助主轴电机

    公开(公告)号:US08582232B2

    公开(公告)日:2013-11-12

    申请号:US12012883

    申请日:2008-02-05

    IPC分类号: G11B17/02

    摘要: A hard disk drive with a spindle motor that rotates a disk. When the disk drive is exposed to low temperatures a current can be provided to the spindle motor to heat the motor. For example, a DC current can be provided to the spindle motor. The current flowing through the spindle motor coil generates heat. The current can be provided for a predetermined time interval to sufficiently heat the spindle motor so that the fluid bearings of the motor can operate. The current is terminated and then an AC current is provided to the spindle motor to cause motor rotation.

    摘要翻译: 具有旋转磁盘的主轴电机的硬盘驱动器。 当磁盘驱动器暴露于低温时,可以向主轴电机提供电流以加热电动机。 例如,可以向主轴电机提供直流电流。 流经主轴电机线圈的电流产生热量。 电流可以提供预定的时间间隔以充分加热主轴电动机,使得电动机的流体轴承能够操作。 电流终止,然后向主轴电机提供交流电流,使电机旋转。

    Heat assisted spindle motor of a hard disk drive
    8.
    发明申请
    Heat assisted spindle motor of a hard disk drive 有权
    热辅助主轴电机的硬盘驱动器

    公开(公告)号:US20090195923A1

    公开(公告)日:2009-08-06

    申请号:US12012883

    申请日:2008-02-05

    IPC分类号: G11B17/04

    摘要: A hard disk drive with a spindle motor that rotates a disk. When the disk drive is exposed to low temperatures a current can be provided to the spindle motor to heat the motor. For example, a DC current can be provided to the spindle motor. The current flowing through the spindle motor coil generates heat. The current can be provided for a predetermined time interval to sufficiently heat the spindle motor so that the fluid bearings of the motor can operate. The current is terminated and then an AC current is provided to the spindle motor to cause motor rotation.

    摘要翻译: 具有旋转磁盘的主轴电机的硬盘驱动器。 当磁盘驱动器暴露于低温时,可以向主轴电机提供电流以加热电动机。 例如,可以向主轴电机提供直流电流。 流经主轴电机线圈的电流产生热量。 电流可以提供预定的时间间隔以充分加热主轴电动机,使得电动机的流体轴承能够操作。 电流终止,然后向主轴电机提供交流电流,使电机旋转。

    Display hard disk drive status on external display
    9.
    发明申请
    Display hard disk drive status on external display 审中-公开
    在外部显示器上显示硬盘驱动器状态

    公开(公告)号:US20080256265A1

    公开(公告)日:2008-10-16

    申请号:US11787601

    申请日:2007-04-16

    IPC分类号: G06F1/18

    CPC分类号: G06F11/325 G11B33/122

    摘要: A system with a visual display that provides an indication of a reliability of a hard disk drive of the system. The visual display may display the number of sector reallocations that have been performed by the disk drive. The display is coupled to a system housing so that a user can readily determine the reliability of the disk drive.

    摘要翻译: 具有视觉显示的系统,其提供系统的硬盘驱动器的可靠性的指示。 视觉显示可以显示由磁盘驱动器执行的扇区重新分配的数量。 显示器耦合到系统外壳,使得用户可以容易地确定磁盘驱动器的可靠性。